4/5/2012	10:38:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	10:38:20 AM	Recipe started at 10:38 AM
4/5/2012	10:38:20 AM	Helium valve closed
4/5/2012	10:38:20 AM	H2 valve closed
4/5/2012	10:38:20 AM	BCl3 valve closed
4/5/2012	10:38:20 AM	PH3 valve closed
4/5/2012	10:38:20 AM	SiCl4 pre valve closed
4/5/2012	10:38:20 AM	SiCl4 post valve closed
4/5/2012	10:38:20 AM	Main Vac valve closed
4/5/2012	10:38:20 AM	Bypass valve closed
4/5/2012	10:38:20 AM	Bubbler valve closed
4/5/2012	10:38:20 AM	Helium MFC set to  0.000000
4/5/2012	10:38:20 AM	H2 MFC set to  0.000000
4/5/2012	10:38:20 AM	BCl3 MFC set to  0.000000
4/5/2012	10:38:20 AM	PH3 MFC set to  0.000000
4/5/2012	10:38:20 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:38:20 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:38:20 AM	Tube furnace set to 0
4/5/2012	10:38:23 AM	H2 valve closed
4/5/2012	10:38:23 AM	BCl3 valve closed
4/5/2012	10:38:23 AM	PH3 valve closed
4/5/2012	10:38:23 AM	SiCl4 pre valve closed
4/5/2012	10:38:23 AM	SiCl4 post valve closed
4/5/2012	10:38:23 AM	Main Vac valve closed
4/5/2012	10:38:23 AM	Bypass valve closed
4/5/2012	10:38:23 AM	Bubbler valve closed
4/5/2012	10:38:23 AM	Helium valve opened
4/5/2012	10:38:23 AM	Helium MFC set to  500.000000
4/5/2012	10:38:23 AM	H2 MFC set to  0.000000
4/5/2012	10:38:23 AM	BCl3 MFC set to  0.000000
4/5/2012	10:38:23 AM	PH3 MFC set to  0.000000
4/5/2012	10:38:23 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:38:23 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:38:23 AM	Tube furnace set to 0
4/5/2012	10:39:28 AM	Helium valve closed
4/5/2012	10:39:28 AM	H2 valve closed
4/5/2012	10:39:28 AM	BCl3 valve closed
4/5/2012	10:39:28 AM	PH3 valve closed
4/5/2012	10:39:28 AM	SiCl4 pre valve closed
4/5/2012	10:39:28 AM	SiCl4 post valve closed
4/5/2012	10:39:28 AM	Main Vac valve closed
4/5/2012	10:39:28 AM	Bypass valve closed
4/5/2012	10:39:28 AM	Bubbler valve closed
4/5/2012	10:39:28 AM	Helium MFC set to  0.000000
4/5/2012	10:39:28 AM	H2 MFC set to  0.000000
4/5/2012	10:39:28 AM	BCl3 MFC set to  0.000000
4/5/2012	10:39:28 AM	PH3 MFC set to  0.000000
4/5/2012	10:39:28 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:39:28 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:39:28 AM	Tube furnace set to 0
4/5/2012	10:39:29 AM	Run finished at 10:39 AM
4/5/2012	10:39:29 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	10:44:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	10:44:48 AM	Recipe started at 10:44 AM
4/5/2012	10:44:48 AM	Helium valve closed
4/5/2012	10:44:48 AM	H2 valve closed
4/5/2012	10:44:48 AM	BCl3 valve closed
4/5/2012	10:44:48 AM	PH3 valve closed
4/5/2012	10:44:48 AM	SiCl4 pre valve closed
4/5/2012	10:44:48 AM	SiCl4 post valve closed
4/5/2012	10:44:48 AM	Main Vac valve closed
4/5/2012	10:44:48 AM	Bubbler valve closed
4/5/2012	10:44:48 AM	Bypass valve opened
4/5/2012	10:44:48 AM	Helium MFC set to  0.000000
4/5/2012	10:44:48 AM	H2 MFC set to  0.000000
4/5/2012	10:44:48 AM	BCl3 MFC set to  0.000000
4/5/2012	10:44:48 AM	PH3 MFC set to  0.000000
4/5/2012	10:44:48 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:44:48 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:44:48 AM	Tube furnace set to 0
4/5/2012	10:45:52 AM	Helium valve closed
4/5/2012	10:45:52 AM	H2 valve closed
4/5/2012	10:45:52 AM	BCl3 valve closed
4/5/2012	10:45:52 AM	PH3 valve closed
4/5/2012	10:45:52 AM	SiCl4 pre valve closed
4/5/2012	10:45:52 AM	SiCl4 post valve closed
4/5/2012	10:45:52 AM	Main Vac valve closed
4/5/2012	10:45:52 AM	Bubbler valve closed
4/5/2012	10:45:52 AM	Bypass valve opened
4/5/2012	10:45:52 AM	Helium MFC set to  0.000000
4/5/2012	10:45:52 AM	H2 MFC set to  0.000000
4/5/2012	10:45:52 AM	BCl3 MFC set to  0.000000
4/5/2012	10:45:52 AM	PH3 MFC set to  0.000000
4/5/2012	10:45:52 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:45:52 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:45:52 AM	Tube furnace set to 0
4/5/2012	10:46:52 AM	Helium valve closed
4/5/2012	10:46:52 AM	H2 valve closed
4/5/2012	10:46:52 AM	BCl3 valve closed
4/5/2012	10:46:52 AM	PH3 valve closed
4/5/2012	10:46:52 AM	SiCl4 pre valve closed
4/5/2012	10:46:52 AM	SiCl4 post valve closed
4/5/2012	10:46:52 AM	Bypass valve closed
4/5/2012	10:46:52 AM	Bubbler valve closed
4/5/2012	10:46:52 AM	Main Vac valve opened
4/5/2012	10:46:52 AM	Helium MFC set to  0.000000
4/5/2012	10:46:52 AM	H2 MFC set to  0.000000
4/5/2012	10:46:52 AM	BCl3 MFC set to  0.000000
4/5/2012	10:46:52 AM	PH3 MFC set to  0.000000
4/5/2012	10:46:52 AM	SiCl4 MFC set to  0.000000
4/5/2012	10:46:52 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:46:52 AM	Tube furnace set to 0
4/5/2012	10:46:53 AM	Run finished at 10:46 AM
4/5/2012	10:46:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	11:00:23 AM	Recipe started at 11:00 AM
4/5/2012	11:00:23 AM	Helium valve closed
4/5/2012	11:00:23 AM	H2 valve closed
4/5/2012	11:00:23 AM	BCl3 valve closed
4/5/2012	11:00:23 AM	PH3 valve closed
4/5/2012	11:00:23 AM	SiCl4 pre valve closed
4/5/2012	11:00:23 AM	SiCl4 post valve closed
4/5/2012	11:00:23 AM	Bypass valve closed
4/5/2012	11:00:23 AM	Bubbler valve closed
4/5/2012	11:00:23 AM	Main Vac valve opened
4/5/2012	11:00:23 AM	Helium MFC set to  0.000000
4/5/2012	11:00:23 AM	H2 MFC set to  0.000000
4/5/2012	11:00:23 AM	BCl3 MFC set to  0.000000
4/5/2012	11:00:23 AM	PH3 MFC set to  0.000000
4/5/2012	11:00:23 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:00:23 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:00:23 AM	Tube furnace set to 0
4/5/2012	11:00:53 AM	H2 valve closed
4/5/2012	11:00:53 AM	BCl3 valve closed
4/5/2012	11:00:53 AM	PH3 valve closed
4/5/2012	11:00:53 AM	SiCl4 pre valve closed
4/5/2012	11:00:53 AM	SiCl4 post valve closed
4/5/2012	11:00:53 AM	Bypass valve closed
4/5/2012	11:00:53 AM	Bubbler valve closed
4/5/2012	11:00:53 AM	Helium valve opened
4/5/2012	11:00:53 AM	Main Vac valve opened
4/5/2012	11:00:53 AM	Helium MFC set to  20.000000
4/5/2012	11:00:53 AM	H2 MFC set to  0.000000
4/5/2012	11:00:53 AM	BCl3 MFC set to  0.000000
4/5/2012	11:00:53 AM	PH3 MFC set to  0.000000
4/5/2012	11:00:53 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:00:53 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:00:53 AM	Tube furnace set to 0
4/5/2012	11:01:23 AM	Helium valve closed
4/5/2012	11:01:23 AM	H2 valve closed
4/5/2012	11:01:23 AM	BCl3 valve closed
4/5/2012	11:01:23 AM	PH3 valve closed
4/5/2012	11:01:23 AM	SiCl4 pre valve closed
4/5/2012	11:01:23 AM	SiCl4 post valve closed
4/5/2012	11:01:23 AM	Bypass valve closed
4/5/2012	11:01:23 AM	Bubbler valve closed
4/5/2012	11:01:23 AM	Main Vac valve opened
4/5/2012	11:01:23 AM	Helium MFC set to  0.000000
4/5/2012	11:01:23 AM	H2 MFC set to  0.000000
4/5/2012	11:01:23 AM	BCl3 MFC set to  0.000000
4/5/2012	11:01:23 AM	PH3 MFC set to  0.000000
4/5/2012	11:01:23 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:01:23 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:01:23 AM	Tube furnace set to 0
4/5/2012	11:01:53 AM	H2 valve closed
4/5/2012	11:01:53 AM	BCl3 valve closed
4/5/2012	11:01:53 AM	PH3 valve closed
4/5/2012	11:01:53 AM	SiCl4 pre valve closed
4/5/2012	11:01:53 AM	SiCl4 post valve closed
4/5/2012	11:01:53 AM	Bypass valve closed
4/5/2012	11:01:53 AM	Bubbler valve closed
4/5/2012	11:01:53 AM	Helium valve opened
4/5/2012	11:01:53 AM	Main Vac valve opened
4/5/2012	11:01:53 AM	Helium MFC set to  20.000000
4/5/2012	11:01:53 AM	H2 MFC set to  0.000000
4/5/2012	11:01:53 AM	BCl3 MFC set to  0.000000
4/5/2012	11:01:53 AM	PH3 MFC set to  0.000000
4/5/2012	11:01:53 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:01:53 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:01:53 AM	Tube furnace set to 0
4/5/2012	11:02:23 AM	Helium valve closed
4/5/2012	11:02:23 AM	H2 valve closed
4/5/2012	11:02:23 AM	BCl3 valve closed
4/5/2012	11:02:23 AM	PH3 valve closed
4/5/2012	11:02:23 AM	SiCl4 pre valve closed
4/5/2012	11:02:23 AM	SiCl4 post valve closed
4/5/2012	11:02:24 AM	Bypass valve closed
4/5/2012	11:02:24 AM	Bubbler valve closed
4/5/2012	11:02:24 AM	Main Vac valve opened
4/5/2012	11:02:24 AM	Helium MFC set to  0.000000
4/5/2012	11:02:24 AM	H2 MFC set to  0.000000
4/5/2012	11:02:24 AM	BCl3 MFC set to  0.000000
4/5/2012	11:02:24 AM	PH3 MFC set to  0.000000
4/5/2012	11:02:24 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:02:24 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:02:24 AM	Tube furnace set to 0
4/5/2012	11:02:54 AM	H2 valve closed
4/5/2012	11:02:54 AM	BCl3 valve closed
4/5/2012	11:02:54 AM	PH3 valve closed
4/5/2012	11:02:54 AM	SiCl4 pre valve closed
4/5/2012	11:02:54 AM	SiCl4 post valve closed
4/5/2012	11:02:54 AM	Bypass valve closed
4/5/2012	11:02:54 AM	Bubbler valve closed
4/5/2012	11:02:54 AM	Helium valve opened
4/5/2012	11:02:54 AM	Main Vac valve opened
4/5/2012	11:02:54 AM	Helium MFC set to  20.000000
4/5/2012	11:02:54 AM	H2 MFC set to  0.000000
4/5/2012	11:02:54 AM	BCl3 MFC set to  0.000000
4/5/2012	11:02:54 AM	PH3 MFC set to  0.000000
4/5/2012	11:02:54 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:02:54 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:02:54 AM	Tube furnace set to 0
4/5/2012	11:03:24 AM	Helium valve closed
4/5/2012	11:03:24 AM	H2 valve closed
4/5/2012	11:03:24 AM	BCl3 valve closed
4/5/2012	11:03:24 AM	PH3 valve closed
4/5/2012	11:03:24 AM	SiCl4 pre valve closed
4/5/2012	11:03:24 AM	SiCl4 post valve closed
4/5/2012	11:03:24 AM	Bypass valve closed
4/5/2012	11:03:24 AM	Bubbler valve closed
4/5/2012	11:03:24 AM	Main Vac valve opened
4/5/2012	11:03:24 AM	Helium MFC set to  0.000000
4/5/2012	11:03:24 AM	H2 MFC set to  0.000000
4/5/2012	11:03:24 AM	BCl3 MFC set to  0.000000
4/5/2012	11:03:24 AM	PH3 MFC set to  0.000000
4/5/2012	11:03:24 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:03:24 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:03:24 AM	Tube furnace set to 0
4/5/2012	11:03:54 AM	H2 valve closed
4/5/2012	11:03:54 AM	BCl3 valve closed
4/5/2012	11:03:54 AM	PH3 valve closed
4/5/2012	11:03:54 AM	SiCl4 pre valve closed
4/5/2012	11:03:54 AM	SiCl4 post valve closed
4/5/2012	11:03:54 AM	Bypass valve closed
4/5/2012	11:03:54 AM	Bubbler valve closed
4/5/2012	11:03:54 AM	Helium valve opened
4/5/2012	11:03:54 AM	Main Vac valve opened
4/5/2012	11:03:54 AM	Helium MFC set to  20.000000
4/5/2012	11:03:54 AM	H2 MFC set to  0.000000
4/5/2012	11:03:54 AM	BCl3 MFC set to  0.000000
4/5/2012	11:03:54 AM	PH3 MFC set to  0.000000
4/5/2012	11:03:54 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:03:54 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:03:54 AM	Tube furnace set to 0
4/5/2012	11:04:24 AM	Helium valve closed
4/5/2012	11:04:24 AM	H2 valve closed
4/5/2012	11:04:24 AM	BCl3 valve closed
4/5/2012	11:04:24 AM	PH3 valve closed
4/5/2012	11:04:24 AM	SiCl4 pre valve closed
4/5/2012	11:04:24 AM	SiCl4 post valve closed
4/5/2012	11:04:24 AM	Bypass valve closed
4/5/2012	11:04:24 AM	Bubbler valve closed
4/5/2012	11:04:24 AM	Main Vac valve opened
4/5/2012	11:04:24 AM	Helium MFC set to  0.000000
4/5/2012	11:04:24 AM	H2 MFC set to  0.000000
4/5/2012	11:04:24 AM	BCl3 MFC set to  0.000000
4/5/2012	11:04:24 AM	PH3 MFC set to  0.000000
4/5/2012	11:04:24 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:04:24 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:04:25 AM	Tube furnace set to 0
4/5/2012	11:04:55 AM	H2 valve closed
4/5/2012	11:04:55 AM	BCl3 valve closed
4/5/2012	11:04:55 AM	PH3 valve closed
4/5/2012	11:04:55 AM	SiCl4 pre valve closed
4/5/2012	11:04:55 AM	SiCl4 post valve closed
4/5/2012	11:04:55 AM	Bypass valve closed
4/5/2012	11:04:55 AM	Bubbler valve closed
4/5/2012	11:04:55 AM	Helium valve opened
4/5/2012	11:04:55 AM	Main Vac valve opened
4/5/2012	11:04:55 AM	Helium MFC set to  20.000000
4/5/2012	11:04:55 AM	H2 MFC set to  0.000000
4/5/2012	11:04:55 AM	BCl3 MFC set to  0.000000
4/5/2012	11:04:55 AM	PH3 MFC set to  0.000000
4/5/2012	11:04:55 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:04:55 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:04:55 AM	Tube furnace set to 0
4/5/2012	11:05:25 AM	Helium valve closed
4/5/2012	11:05:25 AM	H2 valve closed
4/5/2012	11:05:25 AM	BCl3 valve closed
4/5/2012	11:05:25 AM	PH3 valve closed
4/5/2012	11:05:25 AM	SiCl4 pre valve closed
4/5/2012	11:05:25 AM	SiCl4 post valve closed
4/5/2012	11:05:25 AM	Bypass valve closed
4/5/2012	11:05:25 AM	Bubbler valve closed
4/5/2012	11:05:25 AM	Main Vac valve opened
4/5/2012	11:05:25 AM	Helium MFC set to  0.000000
4/5/2012	11:05:25 AM	H2 MFC set to  0.000000
4/5/2012	11:05:25 AM	BCl3 MFC set to  0.000000
4/5/2012	11:05:25 AM	PH3 MFC set to  0.000000
4/5/2012	11:05:25 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:05:25 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:05:25 AM	Tube furnace set to 0
4/5/2012	11:05:55 AM	H2 valve closed
4/5/2012	11:05:55 AM	BCl3 valve closed
4/5/2012	11:05:55 AM	PH3 valve closed
4/5/2012	11:05:55 AM	SiCl4 pre valve closed
4/5/2012	11:05:55 AM	SiCl4 post valve closed
4/5/2012	11:05:55 AM	Bypass valve closed
4/5/2012	11:05:55 AM	Bubbler valve closed
4/5/2012	11:05:55 AM	Helium valve opened
4/5/2012	11:05:55 AM	Main Vac valve opened
4/5/2012	11:05:55 AM	Helium MFC set to  20.000000
4/5/2012	11:05:55 AM	H2 MFC set to  0.000000
4/5/2012	11:05:55 AM	BCl3 MFC set to  0.000000
4/5/2012	11:05:55 AM	PH3 MFC set to  0.000000
4/5/2012	11:05:55 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:05:55 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:05:55 AM	Tube furnace set to 0
4/5/2012	11:06:25 AM	Helium valve closed
4/5/2012	11:06:25 AM	H2 valve closed
4/5/2012	11:06:25 AM	BCl3 valve closed
4/5/2012	11:06:25 AM	PH3 valve closed
4/5/2012	11:06:25 AM	SiCl4 pre valve closed
4/5/2012	11:06:25 AM	SiCl4 post valve closed
4/5/2012	11:06:25 AM	Bypass valve closed
4/5/2012	11:06:25 AM	Bubbler valve closed
4/5/2012	11:06:25 AM	Main Vac valve opened
4/5/2012	11:06:25 AM	Helium MFC set to  0.000000
4/5/2012	11:06:25 AM	H2 MFC set to  0.000000
4/5/2012	11:06:25 AM	BCl3 MFC set to  0.000000
4/5/2012	11:06:25 AM	PH3 MFC set to  0.000000
4/5/2012	11:06:25 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:06:25 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:06:26 AM	Tube furnace set to 0
4/5/2012	11:06:56 AM	H2 valve closed
4/5/2012	11:06:56 AM	BCl3 valve closed
4/5/2012	11:06:56 AM	PH3 valve closed
4/5/2012	11:06:56 AM	SiCl4 pre valve closed
4/5/2012	11:06:56 AM	SiCl4 post valve closed
4/5/2012	11:06:56 AM	Bypass valve closed
4/5/2012	11:06:56 AM	Bubbler valve closed
4/5/2012	11:06:56 AM	Helium valve opened
4/5/2012	11:06:56 AM	Main Vac valve opened
4/5/2012	11:06:56 AM	Helium MFC set to  20.000000
4/5/2012	11:06:56 AM	H2 MFC set to  0.000000
4/5/2012	11:06:56 AM	BCl3 MFC set to  0.000000
4/5/2012	11:06:56 AM	PH3 MFC set to  0.000000
4/5/2012	11:06:56 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:06:56 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:06:56 AM	Tube furnace set to 0
4/5/2012	11:07:26 AM	Helium valve closed
4/5/2012	11:07:26 AM	H2 valve closed
4/5/2012	11:07:26 AM	BCl3 valve closed
4/5/2012	11:07:26 AM	PH3 valve closed
4/5/2012	11:07:26 AM	SiCl4 pre valve closed
4/5/2012	11:07:26 AM	SiCl4 post valve closed
4/5/2012	11:07:26 AM	Bypass valve closed
4/5/2012	11:07:26 AM	Bubbler valve closed
4/5/2012	11:07:26 AM	Main Vac valve opened
4/5/2012	11:07:26 AM	Helium MFC set to  0.000000
4/5/2012	11:07:26 AM	H2 MFC set to  0.000000
4/5/2012	11:07:26 AM	BCl3 MFC set to  0.000000
4/5/2012	11:07:26 AM	PH3 MFC set to  0.000000
4/5/2012	11:07:26 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:07:26 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:07:26 AM	Tube furnace set to 0
4/5/2012	11:07:56 AM	H2 valve closed
4/5/2012	11:07:56 AM	BCl3 valve closed
4/5/2012	11:07:56 AM	PH3 valve closed
4/5/2012	11:07:56 AM	SiCl4 pre valve closed
4/5/2012	11:07:56 AM	SiCl4 post valve closed
4/5/2012	11:07:56 AM	Bypass valve closed
4/5/2012	11:07:56 AM	Bubbler valve closed
4/5/2012	11:07:56 AM	Helium valve opened
4/5/2012	11:07:56 AM	Main Vac valve opened
4/5/2012	11:07:56 AM	Helium MFC set to  20.000000
4/5/2012	11:07:56 AM	H2 MFC set to  0.000000
4/5/2012	11:07:56 AM	BCl3 MFC set to  0.000000
4/5/2012	11:07:56 AM	PH3 MFC set to  0.000000
4/5/2012	11:07:56 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:07:56 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:07:56 AM	Tube furnace set to 0
4/5/2012	11:08:26 AM	Helium valve closed
4/5/2012	11:08:26 AM	H2 valve closed
4/5/2012	11:08:26 AM	BCl3 valve closed
4/5/2012	11:08:26 AM	PH3 valve closed
4/5/2012	11:08:26 AM	SiCl4 pre valve closed
4/5/2012	11:08:26 AM	SiCl4 post valve closed
4/5/2012	11:08:26 AM	Bypass valve closed
4/5/2012	11:08:26 AM	Bubbler valve closed
4/5/2012	11:08:26 AM	Main Vac valve opened
4/5/2012	11:08:26 AM	Helium MFC set to  0.000000
4/5/2012	11:08:26 AM	H2 MFC set to  0.000000
4/5/2012	11:08:26 AM	BCl3 MFC set to  0.000000
4/5/2012	11:08:26 AM	PH3 MFC set to  0.000000
4/5/2012	11:08:26 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:08:26 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:08:26 AM	Tube furnace set to 0
4/5/2012	11:08:56 AM	H2 valve closed
4/5/2012	11:08:56 AM	BCl3 valve closed
4/5/2012	11:08:56 AM	PH3 valve closed
4/5/2012	11:08:56 AM	SiCl4 pre valve closed
4/5/2012	11:08:57 AM	SiCl4 post valve closed
4/5/2012	11:08:57 AM	Bypass valve closed
4/5/2012	11:08:57 AM	Bubbler valve closed
4/5/2012	11:08:57 AM	Helium valve opened
4/5/2012	11:08:57 AM	Main Vac valve opened
4/5/2012	11:08:57 AM	Helium MFC set to  20.000000
4/5/2012	11:08:57 AM	H2 MFC set to  0.000000
4/5/2012	11:08:57 AM	BCl3 MFC set to  0.000000
4/5/2012	11:08:57 AM	PH3 MFC set to  0.000000
4/5/2012	11:08:57 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:08:57 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:08:57 AM	Tube furnace set to 0
4/5/2012	11:09:27 AM	Helium valve closed
4/5/2012	11:09:27 AM	H2 valve closed
4/5/2012	11:09:27 AM	BCl3 valve closed
4/5/2012	11:09:27 AM	PH3 valve closed
4/5/2012	11:09:27 AM	SiCl4 pre valve closed
4/5/2012	11:09:27 AM	SiCl4 post valve closed
4/5/2012	11:09:27 AM	Bypass valve closed
4/5/2012	11:09:27 AM	Bubbler valve closed
4/5/2012	11:09:27 AM	Main Vac valve opened
4/5/2012	11:09:27 AM	Helium MFC set to  0.000000
4/5/2012	11:09:27 AM	H2 MFC set to  0.000000
4/5/2012	11:09:27 AM	BCl3 MFC set to  0.000000
4/5/2012	11:09:27 AM	PH3 MFC set to  0.000000
4/5/2012	11:09:27 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:09:27 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:09:27 AM	Tube furnace set to 200
4/5/2012	11:09:57 AM	H2 valve closed
4/5/2012	11:09:57 AM	BCl3 valve closed
4/5/2012	11:09:57 AM	PH3 valve closed
4/5/2012	11:09:57 AM	SiCl4 pre valve closed
4/5/2012	11:09:57 AM	SiCl4 post valve closed
4/5/2012	11:09:57 AM	Bypass valve closed
4/5/2012	11:09:57 AM	Bubbler valve closed
4/5/2012	11:09:57 AM	Helium valve opened
4/5/2012	11:09:57 AM	Main Vac valve opened
4/5/2012	11:09:57 AM	Helium MFC set to  20.000000
4/5/2012	11:09:57 AM	H2 MFC set to  0.000000
4/5/2012	11:09:57 AM	BCl3 MFC set to  0.000000
4/5/2012	11:09:57 AM	PH3 MFC set to  0.000000
4/5/2012	11:09:57 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:09:57 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:09:57 AM	Tube furnace set to 200
4/5/2012	11:10:27 AM	Helium valve closed
4/5/2012	11:10:27 AM	H2 valve closed
4/5/2012	11:10:27 AM	BCl3 valve closed
4/5/2012	11:10:27 AM	PH3 valve closed
4/5/2012	11:10:27 AM	SiCl4 pre valve closed
4/5/2012	11:10:27 AM	SiCl4 post valve closed
4/5/2012	11:10:27 AM	Bypass valve closed
4/5/2012	11:10:27 AM	Bubbler valve closed
4/5/2012	11:10:27 AM	Main Vac valve opened
4/5/2012	11:10:27 AM	Helium MFC set to  0.000000
4/5/2012	11:10:27 AM	H2 MFC set to  0.000000
4/5/2012	11:10:27 AM	BCl3 MFC set to  0.000000
4/5/2012	11:10:27 AM	PH3 MFC set to  0.000000
4/5/2012	11:10:27 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:10:27 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:10:27 AM	Tube furnace set to 200
4/5/2012	11:10:57 AM	H2 valve closed
4/5/2012	11:10:57 AM	BCl3 valve closed
4/5/2012	11:10:57 AM	PH3 valve closed
4/5/2012	11:10:57 AM	SiCl4 pre valve closed
4/5/2012	11:10:57 AM	SiCl4 post valve closed
4/5/2012	11:10:57 AM	Bypass valve closed
4/5/2012	11:10:57 AM	Bubbler valve closed
4/5/2012	11:10:57 AM	Helium valve opened
4/5/2012	11:10:57 AM	Main Vac valve opened
4/5/2012	11:10:57 AM	Helium MFC set to  20.000000
4/5/2012	11:10:57 AM	H2 MFC set to  0.000000
4/5/2012	11:10:57 AM	BCl3 MFC set to  0.000000
4/5/2012	11:10:57 AM	PH3 MFC set to  0.000000
4/5/2012	11:10:57 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:10:57 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:10:58 AM	Tube furnace set to 200
4/5/2012	11:11:28 AM	Helium valve closed
4/5/2012	11:11:28 AM	H2 valve closed
4/5/2012	11:11:28 AM	BCl3 valve closed
4/5/2012	11:11:28 AM	PH3 valve closed
4/5/2012	11:11:28 AM	SiCl4 pre valve closed
4/5/2012	11:11:28 AM	SiCl4 post valve closed
4/5/2012	11:11:28 AM	Bypass valve closed
4/5/2012	11:11:28 AM	Bubbler valve closed
4/5/2012	11:11:28 AM	Main Vac valve opened
4/5/2012	11:11:28 AM	Helium MFC set to  0.000000
4/5/2012	11:11:28 AM	H2 MFC set to  0.000000
4/5/2012	11:11:28 AM	BCl3 MFC set to  0.000000
4/5/2012	11:11:28 AM	PH3 MFC set to  0.000000
4/5/2012	11:11:28 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:11:28 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:11:28 AM	Tube furnace set to 200
4/5/2012	11:11:58 AM	H2 valve closed
4/5/2012	11:11:58 AM	BCl3 valve closed
4/5/2012	11:11:58 AM	PH3 valve closed
4/5/2012	11:11:58 AM	SiCl4 pre valve closed
4/5/2012	11:11:58 AM	SiCl4 post valve closed
4/5/2012	11:11:58 AM	Bypass valve closed
4/5/2012	11:11:58 AM	Bubbler valve closed
4/5/2012	11:11:58 AM	Helium valve opened
4/5/2012	11:11:58 AM	Main Vac valve opened
4/5/2012	11:11:58 AM	Helium MFC set to  20.000000
4/5/2012	11:11:58 AM	H2 MFC set to  0.000000
4/5/2012	11:11:58 AM	BCl3 MFC set to  0.000000
4/5/2012	11:11:58 AM	PH3 MFC set to  0.000000
4/5/2012	11:11:58 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:11:58 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:11:58 AM	Tube furnace set to 200
4/5/2012	11:12:28 AM	Helium valve closed
4/5/2012	11:12:28 AM	H2 valve closed
4/5/2012	11:12:28 AM	BCl3 valve closed
4/5/2012	11:12:28 AM	PH3 valve closed
4/5/2012	11:12:28 AM	SiCl4 pre valve closed
4/5/2012	11:12:28 AM	SiCl4 post valve closed
4/5/2012	11:12:28 AM	Bypass valve closed
4/5/2012	11:12:28 AM	Bubbler valve closed
4/5/2012	11:12:28 AM	Main Vac valve opened
4/5/2012	11:12:28 AM	Helium MFC set to  0.000000
4/5/2012	11:12:28 AM	H2 MFC set to  0.000000
4/5/2012	11:12:28 AM	BCl3 MFC set to  0.000000
4/5/2012	11:12:28 AM	PH3 MFC set to  0.000000
4/5/2012	11:12:28 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:12:28 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:12:28 AM	Tube furnace set to 200
4/5/2012	11:12:58 AM	H2 valve closed
4/5/2012	11:12:58 AM	BCl3 valve closed
4/5/2012	11:12:58 AM	PH3 valve closed
4/5/2012	11:12:58 AM	SiCl4 pre valve closed
4/5/2012	11:12:58 AM	SiCl4 post valve closed
4/5/2012	11:12:58 AM	Bypass valve closed
4/5/2012	11:12:58 AM	Bubbler valve closed
4/5/2012	11:12:58 AM	Helium valve opened
4/5/2012	11:12:58 AM	Main Vac valve opened
4/5/2012	11:12:58 AM	Helium MFC set to  20.000000
4/5/2012	11:12:58 AM	H2 MFC set to  0.000000
4/5/2012	11:12:58 AM	BCl3 MFC set to  0.000000
4/5/2012	11:12:58 AM	PH3 MFC set to  0.000000
4/5/2012	11:12:58 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:12:58 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:12:59 AM	Tube furnace set to 200
4/5/2012	11:13:29 AM	Helium valve closed
4/5/2012	11:13:29 AM	H2 valve closed
4/5/2012	11:13:29 AM	BCl3 valve closed
4/5/2012	11:13:29 AM	PH3 valve closed
4/5/2012	11:13:29 AM	SiCl4 pre valve closed
4/5/2012	11:13:29 AM	SiCl4 post valve closed
4/5/2012	11:13:29 AM	Bypass valve closed
4/5/2012	11:13:29 AM	Bubbler valve closed
4/5/2012	11:13:29 AM	Main Vac valve opened
4/5/2012	11:13:29 AM	Helium MFC set to  0.000000
4/5/2012	11:13:29 AM	H2 MFC set to  0.000000
4/5/2012	11:13:29 AM	BCl3 MFC set to  0.000000
4/5/2012	11:13:29 AM	PH3 MFC set to  0.000000
4/5/2012	11:13:29 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:13:29 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:13:29 AM	Tube furnace set to 200
4/5/2012	11:13:59 AM	H2 valve closed
4/5/2012	11:13:59 AM	BCl3 valve closed
4/5/2012	11:13:59 AM	PH3 valve closed
4/5/2012	11:13:59 AM	SiCl4 pre valve closed
4/5/2012	11:13:59 AM	SiCl4 post valve closed
4/5/2012	11:13:59 AM	Bypass valve closed
4/5/2012	11:13:59 AM	Bubbler valve closed
4/5/2012	11:13:59 AM	Helium valve opened
4/5/2012	11:13:59 AM	Main Vac valve opened
4/5/2012	11:13:59 AM	Helium MFC set to  20.000000
4/5/2012	11:13:59 AM	H2 MFC set to  0.000000
4/5/2012	11:13:59 AM	BCl3 MFC set to  0.000000
4/5/2012	11:13:59 AM	PH3 MFC set to  0.000000
4/5/2012	11:13:59 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:13:59 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:13:59 AM	Tube furnace set to 200
4/5/2012	11:14:29 AM	Helium valve closed
4/5/2012	11:14:29 AM	H2 valve closed
4/5/2012	11:14:29 AM	BCl3 valve closed
4/5/2012	11:14:29 AM	PH3 valve closed
4/5/2012	11:14:29 AM	SiCl4 pre valve closed
4/5/2012	11:14:29 AM	SiCl4 post valve closed
4/5/2012	11:14:29 AM	Bypass valve closed
4/5/2012	11:14:29 AM	Bubbler valve closed
4/5/2012	11:14:29 AM	Main Vac valve opened
4/5/2012	11:14:29 AM	Helium MFC set to  0.000000
4/5/2012	11:14:29 AM	H2 MFC set to  0.000000
4/5/2012	11:14:29 AM	BCl3 MFC set to  0.000000
4/5/2012	11:14:29 AM	PH3 MFC set to  0.000000
4/5/2012	11:14:29 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:14:29 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:14:29 AM	Tube furnace set to 200
4/5/2012	11:14:59 AM	H2 valve closed
4/5/2012	11:14:59 AM	BCl3 valve closed
4/5/2012	11:14:59 AM	PH3 valve closed
4/5/2012	11:14:59 AM	SiCl4 pre valve closed
4/5/2012	11:14:59 AM	SiCl4 post valve closed
4/5/2012	11:14:59 AM	Bypass valve closed
4/5/2012	11:14:59 AM	Bubbler valve closed
4/5/2012	11:14:59 AM	Helium valve opened
4/5/2012	11:14:59 AM	Main Vac valve opened
4/5/2012	11:14:59 AM	Helium MFC set to  20.000000
4/5/2012	11:14:59 AM	H2 MFC set to  0.000000
4/5/2012	11:14:59 AM	BCl3 MFC set to  0.000000
4/5/2012	11:14:59 AM	PH3 MFC set to  0.000000
4/5/2012	11:14:59 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:14:59 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:15:00 AM	Tube furnace set to 200
4/5/2012	11:15:30 AM	Helium valve closed
4/5/2012	11:15:30 AM	H2 valve closed
4/5/2012	11:15:30 AM	BCl3 valve closed
4/5/2012	11:15:30 AM	PH3 valve closed
4/5/2012	11:15:30 AM	SiCl4 pre valve closed
4/5/2012	11:15:30 AM	SiCl4 post valve closed
4/5/2012	11:15:30 AM	Bypass valve closed
4/5/2012	11:15:30 AM	Bubbler valve closed
4/5/2012	11:15:30 AM	Main Vac valve opened
4/5/2012	11:15:30 AM	Helium MFC set to  0.000000
4/5/2012	11:15:30 AM	H2 MFC set to  0.000000
4/5/2012	11:15:30 AM	BCl3 MFC set to  0.000000
4/5/2012	11:15:30 AM	PH3 MFC set to  0.000000
4/5/2012	11:15:30 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:15:30 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:15:30 AM	Tube furnace set to 0
4/5/2012	11:15:31 AM	Run finished at 11:15 AM
4/5/2012	11:45:31 AM	Main Vac valve closed
4/5/2012	11:45:40 AM	Main Vac valve opened
4/5/2012	11:46:00 AM	Recipe started at 11:45 AM
4/5/2012	11:46:00 AM	Helium valve closed
4/5/2012	11:46:00 AM	H2 valve closed
4/5/2012	11:46:00 AM	BCl3 valve closed
4/5/2012	11:46:00 AM	PH3 valve closed
4/5/2012	11:46:00 AM	SiCl4 pre valve closed
4/5/2012	11:46:00 AM	SiCl4 post valve closed
4/5/2012	11:46:00 AM	Main Vac valve closed
4/5/2012	11:46:00 AM	Bypass valve closed
4/5/2012	11:46:00 AM	Bubbler valve closed
4/5/2012	11:46:00 AM	Helium MFC set to  0.000000
4/5/2012	11:46:00 AM	H2 MFC set to  0.000000
4/5/2012	11:46:00 AM	BCl3 MFC set to  0.000000
4/5/2012	11:46:00 AM	PH3 MFC set to  0.000000
4/5/2012	11:46:00 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:46:00 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:46:00 AM	Tube furnace set to 0
4/5/2012	11:46:03 AM	Helium valve closed
4/5/2012	11:46:03 AM	BCl3 valve closed
4/5/2012	11:46:03 AM	PH3 valve closed
4/5/2012	11:46:03 AM	SiCl4 pre valve closed
4/5/2012	11:46:03 AM	SiCl4 post valve closed
4/5/2012	11:46:03 AM	Main Vac valve closed
4/5/2012	11:46:03 AM	Bypass valve closed
4/5/2012	11:46:03 AM	Bubbler valve closed
4/5/2012	11:46:03 AM	H2 valve opened
4/5/2012	11:46:03 AM	Helium MFC set to  0.000000
4/5/2012	11:46:03 AM	H2 MFC set to  500.000000
4/5/2012	11:46:03 AM	BCl3 MFC set to  0.000000
4/5/2012	11:46:03 AM	PH3 MFC set to  0.000000
4/5/2012	11:46:03 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:46:03 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:46:03 AM	Tube furnace set to 0
4/5/2012	11:47:09 AM	Helium valve closed
4/5/2012	11:47:09 AM	BCl3 valve closed
4/5/2012	11:47:09 AM	PH3 valve closed
4/5/2012	11:47:09 AM	SiCl4 pre valve closed
4/5/2012	11:47:09 AM	SiCl4 post valve closed
4/5/2012	11:47:09 AM	Main Vac valve closed
4/5/2012	11:47:09 AM	Bypass valve closed
4/5/2012	11:47:09 AM	H2 valve opened
4/5/2012	11:47:09 AM	Bubbler valve opened
4/5/2012	11:47:09 AM	Helium MFC set to  0.000000
4/5/2012	11:47:09 AM	H2 MFC set to  500.000000
4/5/2012	11:47:09 AM	BCl3 MFC set to  0.000000
4/5/2012	11:47:09 AM	PH3 MFC set to  0.000000
4/5/2012	11:47:09 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:47:09 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:47:09 AM	Tube furnace set to 0
4/5/2012	11:47:10 AM	Helium valve closed
4/5/2012	11:47:10 AM	BCl3 valve closed
4/5/2012	11:47:10 AM	PH3 valve closed
4/5/2012	11:47:10 AM	SiCl4 pre valve closed
4/5/2012	11:47:10 AM	SiCl4 post valve closed
4/5/2012	11:47:10 AM	Main Vac valve closed
4/5/2012	11:47:10 AM	Bypass valve closed
4/5/2012	11:47:10 AM	H2 valve opened
4/5/2012	11:47:10 AM	Bubbler valve opened
4/5/2012	11:47:10 AM	Helium MFC set to  0.000000
4/5/2012	11:47:10 AM	H2 MFC set to  500.000000
4/5/2012	11:47:10 AM	BCl3 MFC set to  0.000000
4/5/2012	11:47:10 AM	PH3 MFC set to  0.000000
4/5/2012	11:47:10 AM	SiCl4 MFC set to  0.000000
4/5/2012	11:47:10 AM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:47:10 AM	Tube furnace set to 1000
4/5/2012	12:07:10 PM	Helium valve closed
4/5/2012	12:07:10 PM	PH3 valve closed
4/5/2012	12:07:10 PM	Main Vac valve closed
4/5/2012	12:07:10 PM	Bypass valve closed
4/5/2012	12:07:10 PM	H2 valve opened
4/5/2012	12:07:10 PM	BCl3 valve opened
4/5/2012	12:07:10 PM	SiCl4 pre valve opened
4/5/2012	12:07:10 PM	SiCl4 post valve opened
4/5/2012	12:07:10 PM	Bubbler valve opened
4/5/2012	12:07:10 PM	Helium MFC set to  0.000000
4/5/2012	12:07:10 PM	H2 MFC set to  450.000000
4/5/2012	12:07:10 PM	BCl3 MFC set to  1.500000
4/5/2012	12:07:10 PM	PH3 MFC set to  0.000000
4/5/2012	12:07:10 PM	SiCl4 MFC set to  50.000000
4/5/2012	12:07:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:07:10 PM	Tube furnace set to 1000
4/5/2012	12:19:10 PM	Helium valve closed
4/5/2012	12:19:10 PM	BCl3 valve closed
4/5/2012	12:19:10 PM	PH3 valve closed
4/5/2012	12:19:10 PM	SiCl4 pre valve closed
4/5/2012	12:19:10 PM	SiCl4 post valve closed
4/5/2012	12:19:10 PM	Main Vac valve closed
4/5/2012	12:19:10 PM	Bypass valve closed
4/5/2012	12:19:10 PM	H2 valve opened
4/5/2012	12:19:10 PM	Bubbler valve opened
4/5/2012	12:19:10 PM	Helium MFC set to  0.000000
4/5/2012	12:19:10 PM	H2 MFC set to  500.000000
4/5/2012	12:19:10 PM	BCl3 MFC set to  0.000000
4/5/2012	12:19:10 PM	PH3 MFC set to  0.000000
4/5/2012	12:19:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:19:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:19:11 PM	Tube furnace set to 950
4/5/2012	12:21:11 PM	Helium valve closed
4/5/2012	12:21:11 PM	BCl3 valve closed
4/5/2012	12:21:11 PM	PH3 valve closed
4/5/2012	12:21:11 PM	SiCl4 pre valve closed
4/5/2012	12:21:11 PM	SiCl4 post valve closed
4/5/2012	12:21:11 PM	Main Vac valve closed
4/5/2012	12:21:11 PM	Bypass valve closed
4/5/2012	12:21:11 PM	H2 valve opened
4/5/2012	12:21:11 PM	Bubbler valve opened
4/5/2012	12:21:11 PM	Helium MFC set to  0.000000
4/5/2012	12:21:11 PM	H2 MFC set to  500.000000
4/5/2012	12:21:11 PM	BCl3 MFC set to  0.000000
4/5/2012	12:21:11 PM	PH3 MFC set to  0.000000
4/5/2012	12:21:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:21:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:21:11 PM	Tube furnace set to 900
4/5/2012	12:23:11 PM	Helium valve closed
4/5/2012	12:23:11 PM	BCl3 valve closed
4/5/2012	12:23:11 PM	PH3 valve closed
4/5/2012	12:23:11 PM	SiCl4 pre valve closed
4/5/2012	12:23:11 PM	SiCl4 post valve closed
4/5/2012	12:23:11 PM	Main Vac valve closed
4/5/2012	12:23:11 PM	Bypass valve closed
4/5/2012	12:23:11 PM	H2 valve opened
4/5/2012	12:23:11 PM	Bubbler valve opened
4/5/2012	12:23:11 PM	Helium MFC set to  0.000000
4/5/2012	12:23:11 PM	H2 MFC set to  500.000000
4/5/2012	12:23:11 PM	BCl3 MFC set to  0.000000
4/5/2012	12:23:11 PM	PH3 MFC set to  0.000000
4/5/2012	12:23:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:23:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:23:11 PM	Tube furnace set to 850
4/5/2012	12:25:11 PM	H2 valve closed
4/5/2012	12:25:11 PM	BCl3 valve closed
4/5/2012	12:25:11 PM	PH3 valve closed
4/5/2012	12:25:11 PM	SiCl4 pre valve closed
4/5/2012	12:25:11 PM	SiCl4 post valve closed
4/5/2012	12:25:11 PM	Main Vac valve closed
4/5/2012	12:25:11 PM	Bypass valve closed
4/5/2012	12:25:11 PM	Helium valve opened
4/5/2012	12:25:11 PM	Bubbler valve opened
4/5/2012	12:25:11 PM	Helium MFC set to  500.000000
4/5/2012	12:25:11 PM	H2 MFC set to  0.000000
4/5/2012	12:25:11 PM	BCl3 MFC set to  0.000000
4/5/2012	12:25:11 PM	PH3 MFC set to  0.000000
4/5/2012	12:25:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:25:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:25:11 PM	Tube furnace set to 800
4/5/2012	12:27:11 PM	H2 valve closed
4/5/2012	12:27:11 PM	BCl3 valve closed
4/5/2012	12:27:11 PM	PH3 valve closed
4/5/2012	12:27:11 PM	SiCl4 pre valve closed
4/5/2012	12:27:11 PM	SiCl4 post valve closed
4/5/2012	12:27:11 PM	Main Vac valve closed
4/5/2012	12:27:11 PM	Bypass valve closed
4/5/2012	12:27:11 PM	Helium valve opened
4/5/2012	12:27:11 PM	Bubbler valve opened
4/5/2012	12:27:11 PM	Helium MFC set to  500.000000
4/5/2012	12:27:11 PM	H2 MFC set to  0.000000
4/5/2012	12:27:11 PM	BCl3 MFC set to  0.000000
4/5/2012	12:27:11 PM	PH3 MFC set to  0.000000
4/5/2012	12:27:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:27:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:27:11 PM	Tube furnace set to 750
4/5/2012	12:29:11 PM	H2 valve closed
4/5/2012	12:29:11 PM	BCl3 valve closed
4/5/2012	12:29:11 PM	PH3 valve closed
4/5/2012	12:29:11 PM	SiCl4 pre valve closed
4/5/2012	12:29:11 PM	SiCl4 post valve closed
4/5/2012	12:29:11 PM	Main Vac valve closed
4/5/2012	12:29:11 PM	Bypass valve closed
4/5/2012	12:29:11 PM	Helium valve opened
4/5/2012	12:29:11 PM	Bubbler valve opened
4/5/2012	12:29:11 PM	Helium MFC set to  500.000000
4/5/2012	12:29:11 PM	H2 MFC set to  0.000000
4/5/2012	12:29:11 PM	BCl3 MFC set to  0.000000
4/5/2012	12:29:11 PM	PH3 MFC set to  0.000000
4/5/2012	12:29:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:29:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:29:12 PM	Tube furnace set to 0
4/5/2012	12:49:12 PM	Helium valve closed
4/5/2012	12:49:12 PM	H2 valve closed
4/5/2012	12:49:12 PM	BCl3 valve closed
4/5/2012	12:49:12 PM	PH3 valve closed
4/5/2012	12:49:12 PM	SiCl4 pre valve closed
4/5/2012	12:49:12 PM	SiCl4 post valve closed
4/5/2012	12:49:12 PM	Main Vac valve closed
4/5/2012	12:49:12 PM	Bypass valve closed
4/5/2012	12:49:12 PM	Bubbler valve closed
4/5/2012	12:49:12 PM	Helium MFC set to  0.000000
4/5/2012	12:49:12 PM	H2 MFC set to  0.000000
4/5/2012	12:49:12 PM	BCl3 MFC set to  0.000000
4/5/2012	12:49:12 PM	PH3 MFC set to  0.000000
4/5/2012	12:49:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:49:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:49:12 PM	Tube furnace set to 0
4/5/2012	12:49:13 PM	Run finished at 12:49 PM
4/5/2012	12:54:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	12:54:55 PM	Recipe started at 12:54 PM
4/5/2012	12:54:55 PM	Helium valve closed
4/5/2012	12:54:55 PM	H2 valve closed
4/5/2012	12:54:55 PM	BCl3 valve closed
4/5/2012	12:54:55 PM	PH3 valve closed
4/5/2012	12:54:55 PM	SiCl4 pre valve closed
4/5/2012	12:54:55 PM	SiCl4 post valve closed
4/5/2012	12:54:55 PM	Main Vac valve closed
4/5/2012	12:54:55 PM	Bypass valve closed
4/5/2012	12:54:55 PM	Bubbler valve closed
4/5/2012	12:54:55 PM	Helium MFC set to  0.000000
4/5/2012	12:54:55 PM	H2 MFC set to  0.000000
4/5/2012	12:54:55 PM	BCl3 MFC set to  0.000000
4/5/2012	12:54:55 PM	PH3 MFC set to  0.000000
4/5/2012	12:54:55 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:54:55 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:54:55 PM	Tube furnace set to 0
4/5/2012	12:54:58 PM	H2 valve closed
4/5/2012	12:54:58 PM	BCl3 valve closed
4/5/2012	12:54:58 PM	PH3 valve closed
4/5/2012	12:54:58 PM	SiCl4 pre valve closed
4/5/2012	12:54:58 PM	SiCl4 post valve closed
4/5/2012	12:54:58 PM	Main Vac valve closed
4/5/2012	12:54:58 PM	Bypass valve closed
4/5/2012	12:54:58 PM	Bubbler valve closed
4/5/2012	12:54:58 PM	Helium valve opened
4/5/2012	12:54:58 PM	Helium MFC set to  500.000000
4/5/2012	12:54:58 PM	H2 MFC set to  0.000000
4/5/2012	12:54:58 PM	BCl3 MFC set to  0.000000
4/5/2012	12:54:58 PM	PH3 MFC set to  0.000000
4/5/2012	12:54:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:54:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:54:58 PM	Tube furnace set to 0
4/5/2012	12:55:00 PM	Helium valve closed
4/5/2012	12:55:00 PM	H2 valve closed
4/5/2012	12:55:00 PM	BCl3 valve closed
4/5/2012	12:55:00 PM	PH3 valve closed
4/5/2012	12:55:00 PM	SiCl4 pre valve closed
4/5/2012	12:55:00 PM	SiCl4 post valve closed
4/5/2012	12:55:00 PM	Main Vac valve closed
4/5/2012	12:55:00 PM	Bypass valve closed
4/5/2012	12:55:00 PM	Bubbler valve closed
4/5/2012	12:55:00 PM	Helium MFC set to  0.000000
4/5/2012	12:55:00 PM	H2 MFC set to  0.000000
4/5/2012	12:55:00 PM	BCl3 MFC set to  0.000000
4/5/2012	12:55:00 PM	PH3 MFC set to  0.000000
4/5/2012	12:55:00 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:55:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:55:00 PM	Tube furnace set to 0
4/5/2012	12:55:01 PM	Run finished at 12:55 PM
4/5/2012	12:55:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	12:57:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	12:57:59 PM	Recipe started at 12:57 PM
4/5/2012	12:57:59 PM	Helium valve closed
4/5/2012	12:57:59 PM	H2 valve closed
4/5/2012	12:57:59 PM	BCl3 valve closed
4/5/2012	12:57:59 PM	PH3 valve closed
4/5/2012	12:57:59 PM	SiCl4 pre valve closed
4/5/2012	12:57:59 PM	SiCl4 post valve closed
4/5/2012	12:57:59 PM	Main Vac valve closed
4/5/2012	12:57:59 PM	Bubbler valve closed
4/5/2012	12:57:59 PM	Bypass valve opened
4/5/2012	12:57:59 PM	Helium MFC set to  0.000000
4/5/2012	12:57:59 PM	H2 MFC set to  0.000000
4/5/2012	12:57:59 PM	BCl3 MFC set to  0.000000
4/5/2012	12:57:59 PM	PH3 MFC set to  0.000000
4/5/2012	12:57:59 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:57:59 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:57:59 PM	Tube furnace set to 0
4/5/2012	12:58:58 PM	Helium valve closed
4/5/2012	12:58:58 PM	H2 valve closed
4/5/2012	12:58:58 PM	BCl3 valve closed
4/5/2012	12:58:58 PM	PH3 valve closed
4/5/2012	12:58:58 PM	SiCl4 pre valve closed
4/5/2012	12:58:58 PM	SiCl4 post valve closed
4/5/2012	12:58:58 PM	Main Vac valve closed
4/5/2012	12:58:58 PM	Bubbler valve closed
4/5/2012	12:58:58 PM	Bypass valve opened
4/5/2012	12:58:58 PM	Helium MFC set to  0.000000
4/5/2012	12:58:58 PM	H2 MFC set to  0.000000
4/5/2012	12:58:58 PM	BCl3 MFC set to  0.000000
4/5/2012	12:58:58 PM	PH3 MFC set to  0.000000
4/5/2012	12:58:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:58:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:58:58 PM	Tube furnace set to 0
4/5/2012	12:59:58 PM	Helium valve closed
4/5/2012	12:59:58 PM	H2 valve closed
4/5/2012	12:59:58 PM	BCl3 valve closed
4/5/2012	12:59:58 PM	PH3 valve closed
4/5/2012	12:59:58 PM	SiCl4 pre valve closed
4/5/2012	12:59:58 PM	SiCl4 post valve closed
4/5/2012	12:59:58 PM	Bypass valve closed
4/5/2012	12:59:58 PM	Bubbler valve closed
4/5/2012	12:59:58 PM	Main Vac valve opened
4/5/2012	12:59:58 PM	Helium MFC set to  0.000000
4/5/2012	12:59:58 PM	H2 MFC set to  0.000000
4/5/2012	12:59:58 PM	BCl3 MFC set to  0.000000
4/5/2012	12:59:58 PM	PH3 MFC set to  0.000000
4/5/2012	12:59:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	12:59:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	12:59:58 PM	Tube furnace set to 0
4/5/2012	12:59:59 PM	Run finished at 12:59 PM
4/5/2012	12:59:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	1:03:16 PM	Recipe started at 1:03 PM
4/5/2012	1:03:16 PM	Helium valve closed
4/5/2012	1:03:16 PM	H2 valve closed
4/5/2012	1:03:16 PM	BCl3 valve closed
4/5/2012	1:03:16 PM	PH3 valve closed
4/5/2012	1:03:16 PM	SiCl4 pre valve closed
4/5/2012	1:03:16 PM	SiCl4 post valve closed
4/5/2012	1:03:16 PM	Bypass valve closed
4/5/2012	1:03:16 PM	Bubbler valve closed
4/5/2012	1:03:16 PM	Main Vac valve opened
4/5/2012	1:03:16 PM	Helium MFC set to  0.000000
4/5/2012	1:03:16 PM	H2 MFC set to  0.000000
4/5/2012	1:03:16 PM	BCl3 MFC set to  0.000000
4/5/2012	1:03:16 PM	PH3 MFC set to  0.000000
4/5/2012	1:03:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:03:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:03:16 PM	Tube furnace set to 0
4/5/2012	1:03:46 PM	H2 valve closed
4/5/2012	1:03:46 PM	BCl3 valve closed
4/5/2012	1:03:46 PM	PH3 valve closed
4/5/2012	1:03:46 PM	SiCl4 pre valve closed
4/5/2012	1:03:46 PM	SiCl4 post valve closed
4/5/2012	1:03:46 PM	Bypass valve closed
4/5/2012	1:03:46 PM	Bubbler valve closed
4/5/2012	1:03:46 PM	Helium valve opened
4/5/2012	1:03:46 PM	Main Vac valve opened
4/5/2012	1:03:46 PM	Helium MFC set to  20.000000
4/5/2012	1:03:46 PM	H2 MFC set to  0.000000
4/5/2012	1:03:46 PM	BCl3 MFC set to  0.000000
4/5/2012	1:03:46 PM	PH3 MFC set to  0.000000
4/5/2012	1:03:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:03:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:03:46 PM	Tube furnace set to 0
4/5/2012	1:04:16 PM	Helium valve closed
4/5/2012	1:04:16 PM	H2 valve closed
4/5/2012	1:04:16 PM	BCl3 valve closed
4/5/2012	1:04:16 PM	PH3 valve closed
4/5/2012	1:04:16 PM	SiCl4 pre valve closed
4/5/2012	1:04:16 PM	SiCl4 post valve closed
4/5/2012	1:04:16 PM	Bypass valve closed
4/5/2012	1:04:16 PM	Bubbler valve closed
4/5/2012	1:04:16 PM	Main Vac valve opened
4/5/2012	1:04:16 PM	Helium MFC set to  0.000000
4/5/2012	1:04:16 PM	H2 MFC set to  0.000000
4/5/2012	1:04:16 PM	BCl3 MFC set to  0.000000
4/5/2012	1:04:16 PM	PH3 MFC set to  0.000000
4/5/2012	1:04:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:04:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:04:16 PM	Tube furnace set to 0
4/5/2012	1:04:46 PM	H2 valve closed
4/5/2012	1:04:46 PM	BCl3 valve closed
4/5/2012	1:04:46 PM	PH3 valve closed
4/5/2012	1:04:46 PM	SiCl4 pre valve closed
4/5/2012	1:04:46 PM	SiCl4 post valve closed
4/5/2012	1:04:46 PM	Bypass valve closed
4/5/2012	1:04:46 PM	Bubbler valve closed
4/5/2012	1:04:46 PM	Helium valve opened
4/5/2012	1:04:46 PM	Main Vac valve opened
4/5/2012	1:04:46 PM	Helium MFC set to  20.000000
4/5/2012	1:04:46 PM	H2 MFC set to  0.000000
4/5/2012	1:04:46 PM	BCl3 MFC set to  0.000000
4/5/2012	1:04:46 PM	PH3 MFC set to  0.000000
4/5/2012	1:04:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:04:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:04:47 PM	Tube furnace set to 0
4/5/2012	1:05:17 PM	Helium valve closed
4/5/2012	1:05:17 PM	H2 valve closed
4/5/2012	1:05:17 PM	BCl3 valve closed
4/5/2012	1:05:17 PM	PH3 valve closed
4/5/2012	1:05:17 PM	SiCl4 pre valve closed
4/5/2012	1:05:17 PM	SiCl4 post valve closed
4/5/2012	1:05:17 PM	Bypass valve closed
4/5/2012	1:05:17 PM	Bubbler valve closed
4/5/2012	1:05:17 PM	Main Vac valve opened
4/5/2012	1:05:17 PM	Helium MFC set to  0.000000
4/5/2012	1:05:17 PM	H2 MFC set to  0.000000
4/5/2012	1:05:17 PM	BCl3 MFC set to  0.000000
4/5/2012	1:05:17 PM	PH3 MFC set to  0.000000
4/5/2012	1:05:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:05:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:05:17 PM	Tube furnace set to 0
4/5/2012	1:05:47 PM	H2 valve closed
4/5/2012	1:05:47 PM	BCl3 valve closed
4/5/2012	1:05:47 PM	PH3 valve closed
4/5/2012	1:05:47 PM	SiCl4 pre valve closed
4/5/2012	1:05:47 PM	SiCl4 post valve closed
4/5/2012	1:05:47 PM	Bypass valve closed
4/5/2012	1:05:47 PM	Bubbler valve closed
4/5/2012	1:05:47 PM	Helium valve opened
4/5/2012	1:05:47 PM	Main Vac valve opened
4/5/2012	1:05:47 PM	Helium MFC set to  20.000000
4/5/2012	1:05:47 PM	H2 MFC set to  0.000000
4/5/2012	1:05:47 PM	BCl3 MFC set to  0.000000
4/5/2012	1:05:47 PM	PH3 MFC set to  0.000000
4/5/2012	1:05:47 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:05:47 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:05:47 PM	Tube furnace set to 0
4/5/2012	1:06:17 PM	Helium valve closed
4/5/2012	1:06:17 PM	H2 valve closed
4/5/2012	1:06:17 PM	BCl3 valve closed
4/5/2012	1:06:17 PM	PH3 valve closed
4/5/2012	1:06:17 PM	SiCl4 pre valve closed
4/5/2012	1:06:17 PM	SiCl4 post valve closed
4/5/2012	1:06:17 PM	Bypass valve closed
4/5/2012	1:06:17 PM	Bubbler valve closed
4/5/2012	1:06:17 PM	Main Vac valve opened
4/5/2012	1:06:17 PM	Helium MFC set to  0.000000
4/5/2012	1:06:17 PM	H2 MFC set to  0.000000
4/5/2012	1:06:17 PM	BCl3 MFC set to  0.000000
4/5/2012	1:06:17 PM	PH3 MFC set to  0.000000
4/5/2012	1:06:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:06:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:06:17 PM	Tube furnace set to 0
4/5/2012	1:06:47 PM	H2 valve closed
4/5/2012	1:06:47 PM	BCl3 valve closed
4/5/2012	1:06:47 PM	PH3 valve closed
4/5/2012	1:06:47 PM	SiCl4 pre valve closed
4/5/2012	1:06:47 PM	SiCl4 post valve closed
4/5/2012	1:06:47 PM	Bypass valve closed
4/5/2012	1:06:47 PM	Bubbler valve closed
4/5/2012	1:06:47 PM	Helium valve opened
4/5/2012	1:06:47 PM	Main Vac valve opened
4/5/2012	1:06:47 PM	Helium MFC set to  20.000000
4/5/2012	1:06:47 PM	H2 MFC set to  0.000000
4/5/2012	1:06:47 PM	BCl3 MFC set to  0.000000
4/5/2012	1:06:47 PM	PH3 MFC set to  0.000000
4/5/2012	1:06:47 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:06:47 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:06:47 PM	Tube furnace set to 0
4/5/2012	1:07:18 PM	Helium valve closed
4/5/2012	1:07:18 PM	H2 valve closed
4/5/2012	1:07:18 PM	BCl3 valve closed
4/5/2012	1:07:18 PM	PH3 valve closed
4/5/2012	1:07:18 PM	SiCl4 pre valve closed
4/5/2012	1:07:18 PM	SiCl4 post valve closed
4/5/2012	1:07:18 PM	Bypass valve closed
4/5/2012	1:07:18 PM	Bubbler valve closed
4/5/2012	1:07:18 PM	Main Vac valve opened
4/5/2012	1:07:18 PM	Helium MFC set to  0.000000
4/5/2012	1:07:18 PM	H2 MFC set to  0.000000
4/5/2012	1:07:18 PM	BCl3 MFC set to  0.000000
4/5/2012	1:07:18 PM	PH3 MFC set to  0.000000
4/5/2012	1:07:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:07:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:07:18 PM	Tube furnace set to 0
4/5/2012	1:07:48 PM	H2 valve closed
4/5/2012	1:07:48 PM	BCl3 valve closed
4/5/2012	1:07:48 PM	PH3 valve closed
4/5/2012	1:07:48 PM	SiCl4 pre valve closed
4/5/2012	1:07:48 PM	SiCl4 post valve closed
4/5/2012	1:07:48 PM	Bypass valve closed
4/5/2012	1:07:48 PM	Bubbler valve closed
4/5/2012	1:07:48 PM	Helium valve opened
4/5/2012	1:07:48 PM	Main Vac valve opened
4/5/2012	1:07:48 PM	Helium MFC set to  20.000000
4/5/2012	1:07:48 PM	H2 MFC set to  0.000000
4/5/2012	1:07:48 PM	BCl3 MFC set to  0.000000
4/5/2012	1:07:48 PM	PH3 MFC set to  0.000000
4/5/2012	1:07:48 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:07:48 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:07:48 PM	Tube furnace set to 0
4/5/2012	1:08:18 PM	Helium valve closed
4/5/2012	1:08:18 PM	H2 valve closed
4/5/2012	1:08:18 PM	BCl3 valve closed
4/5/2012	1:08:18 PM	PH3 valve closed
4/5/2012	1:08:18 PM	SiCl4 pre valve closed
4/5/2012	1:08:18 PM	SiCl4 post valve closed
4/5/2012	1:08:18 PM	Bypass valve closed
4/5/2012	1:08:18 PM	Bubbler valve closed
4/5/2012	1:08:18 PM	Main Vac valve opened
4/5/2012	1:08:18 PM	Helium MFC set to  0.000000
4/5/2012	1:08:18 PM	H2 MFC set to  0.000000
4/5/2012	1:08:18 PM	BCl3 MFC set to  0.000000
4/5/2012	1:08:18 PM	PH3 MFC set to  0.000000
4/5/2012	1:08:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:08:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:08:18 PM	Tube furnace set to 0
4/5/2012	1:08:48 PM	H2 valve closed
4/5/2012	1:08:48 PM	BCl3 valve closed
4/5/2012	1:08:48 PM	PH3 valve closed
4/5/2012	1:08:48 PM	SiCl4 pre valve closed
4/5/2012	1:08:48 PM	SiCl4 post valve closed
4/5/2012	1:08:48 PM	Bypass valve closed
4/5/2012	1:08:48 PM	Bubbler valve closed
4/5/2012	1:08:48 PM	Helium valve opened
4/5/2012	1:08:48 PM	Main Vac valve opened
4/5/2012	1:08:48 PM	Helium MFC set to  20.000000
4/5/2012	1:08:48 PM	H2 MFC set to  0.000000
4/5/2012	1:08:48 PM	BCl3 MFC set to  0.000000
4/5/2012	1:08:48 PM	PH3 MFC set to  0.000000
4/5/2012	1:08:48 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:08:48 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:08:48 PM	Tube furnace set to 0
4/5/2012	1:09:18 PM	Helium valve closed
4/5/2012	1:09:18 PM	H2 valve closed
4/5/2012	1:09:18 PM	BCl3 valve closed
4/5/2012	1:09:18 PM	PH3 valve closed
4/5/2012	1:09:18 PM	SiCl4 pre valve closed
4/5/2012	1:09:18 PM	SiCl4 post valve closed
4/5/2012	1:09:18 PM	Bypass valve closed
4/5/2012	1:09:18 PM	Bubbler valve closed
4/5/2012	1:09:18 PM	Main Vac valve opened
4/5/2012	1:09:18 PM	Helium MFC set to  0.000000
4/5/2012	1:09:18 PM	H2 MFC set to  0.000000
4/5/2012	1:09:18 PM	BCl3 MFC set to  0.000000
4/5/2012	1:09:19 PM	PH3 MFC set to  0.000000
4/5/2012	1:09:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:09:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:09:19 PM	Tube furnace set to 0
4/5/2012	1:09:49 PM	H2 valve closed
4/5/2012	1:09:49 PM	BCl3 valve closed
4/5/2012	1:09:49 PM	PH3 valve closed
4/5/2012	1:09:49 PM	SiCl4 pre valve closed
4/5/2012	1:09:49 PM	SiCl4 post valve closed
4/5/2012	1:09:49 PM	Bypass valve closed
4/5/2012	1:09:49 PM	Bubbler valve closed
4/5/2012	1:09:49 PM	Helium valve opened
4/5/2012	1:09:49 PM	Main Vac valve opened
4/5/2012	1:09:49 PM	Helium MFC set to  20.000000
4/5/2012	1:09:49 PM	H2 MFC set to  0.000000
4/5/2012	1:09:49 PM	BCl3 MFC set to  0.000000
4/5/2012	1:09:49 PM	PH3 MFC set to  0.000000
4/5/2012	1:09:49 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:09:49 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:09:49 PM	Tube furnace set to 0
4/5/2012	1:10:19 PM	Helium valve closed
4/5/2012	1:10:19 PM	H2 valve closed
4/5/2012	1:10:19 PM	BCl3 valve closed
4/5/2012	1:10:19 PM	PH3 valve closed
4/5/2012	1:10:19 PM	SiCl4 pre valve closed
4/5/2012	1:10:19 PM	SiCl4 post valve closed
4/5/2012	1:10:19 PM	Bypass valve closed
4/5/2012	1:10:19 PM	Bubbler valve closed
4/5/2012	1:10:19 PM	Main Vac valve opened
4/5/2012	1:10:19 PM	Helium MFC set to  0.000000
4/5/2012	1:10:19 PM	H2 MFC set to  0.000000
4/5/2012	1:10:19 PM	BCl3 MFC set to  0.000000
4/5/2012	1:10:19 PM	PH3 MFC set to  0.000000
4/5/2012	1:10:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:10:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:10:19 PM	Tube furnace set to 0
4/5/2012	1:10:49 PM	H2 valve closed
4/5/2012	1:10:49 PM	BCl3 valve closed
4/5/2012	1:10:49 PM	PH3 valve closed
4/5/2012	1:10:49 PM	SiCl4 pre valve closed
4/5/2012	1:10:49 PM	SiCl4 post valve closed
4/5/2012	1:10:49 PM	Bypass valve closed
4/5/2012	1:10:49 PM	Bubbler valve closed
4/5/2012	1:10:49 PM	Helium valve opened
4/5/2012	1:10:49 PM	Main Vac valve opened
4/5/2012	1:10:49 PM	Helium MFC set to  20.000000
4/5/2012	1:10:49 PM	H2 MFC set to  0.000000
4/5/2012	1:10:49 PM	BCl3 MFC set to  0.000000
4/5/2012	1:10:49 PM	PH3 MFC set to  0.000000
4/5/2012	1:10:49 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:10:49 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:10:49 PM	Tube furnace set to 0
4/5/2012	1:11:19 PM	Helium valve closed
4/5/2012	1:11:19 PM	H2 valve closed
4/5/2012	1:11:19 PM	BCl3 valve closed
4/5/2012	1:11:19 PM	PH3 valve closed
4/5/2012	1:11:19 PM	SiCl4 pre valve closed
4/5/2012	1:11:19 PM	SiCl4 post valve closed
4/5/2012	1:11:19 PM	Bypass valve closed
4/5/2012	1:11:19 PM	Bubbler valve closed
4/5/2012	1:11:19 PM	Main Vac valve opened
4/5/2012	1:11:19 PM	Helium MFC set to  0.000000
4/5/2012	1:11:19 PM	H2 MFC set to  0.000000
4/5/2012	1:11:19 PM	BCl3 MFC set to  0.000000
4/5/2012	1:11:19 PM	PH3 MFC set to  0.000000
4/5/2012	1:11:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:11:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:11:19 PM	Tube furnace set to 0
4/5/2012	1:11:49 PM	H2 valve closed
4/5/2012	1:11:49 PM	BCl3 valve closed
4/5/2012	1:11:49 PM	PH3 valve closed
4/5/2012	1:11:49 PM	SiCl4 pre valve closed
4/5/2012	1:11:49 PM	SiCl4 post valve closed
4/5/2012	1:11:49 PM	Bypass valve closed
4/5/2012	1:11:50 PM	Bubbler valve closed
4/5/2012	1:11:50 PM	Helium valve opened
4/5/2012	1:11:50 PM	Main Vac valve opened
4/5/2012	1:11:50 PM	Helium MFC set to  20.000000
4/5/2012	1:11:50 PM	H2 MFC set to  0.000000
4/5/2012	1:11:50 PM	BCl3 MFC set to  0.000000
4/5/2012	1:11:50 PM	PH3 MFC set to  0.000000
4/5/2012	1:11:50 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:11:50 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:11:50 PM	Tube furnace set to 0
4/5/2012	1:12:20 PM	Helium valve closed
4/5/2012	1:12:20 PM	H2 valve closed
4/5/2012	1:12:20 PM	BCl3 valve closed
4/5/2012	1:12:20 PM	PH3 valve closed
4/5/2012	1:12:20 PM	SiCl4 pre valve closed
4/5/2012	1:12:20 PM	SiCl4 post valve closed
4/5/2012	1:12:20 PM	Bypass valve closed
4/5/2012	1:12:20 PM	Bubbler valve closed
4/5/2012	1:12:20 PM	Main Vac valve opened
4/5/2012	1:12:20 PM	Helium MFC set to  0.000000
4/5/2012	1:12:20 PM	H2 MFC set to  0.000000
4/5/2012	1:12:20 PM	BCl3 MFC set to  0.000000
4/5/2012	1:12:20 PM	PH3 MFC set to  0.000000
4/5/2012	1:12:20 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:12:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:12:20 PM	Tube furnace set to 200
4/5/2012	1:12:50 PM	H2 valve closed
4/5/2012	1:12:50 PM	BCl3 valve closed
4/5/2012	1:12:50 PM	PH3 valve closed
4/5/2012	1:12:50 PM	SiCl4 pre valve closed
4/5/2012	1:12:50 PM	SiCl4 post valve closed
4/5/2012	1:12:50 PM	Bypass valve closed
4/5/2012	1:12:50 PM	Bubbler valve closed
4/5/2012	1:12:50 PM	Helium valve opened
4/5/2012	1:12:50 PM	Main Vac valve opened
4/5/2012	1:12:50 PM	Helium MFC set to  20.000000
4/5/2012	1:12:50 PM	H2 MFC set to  0.000000
4/5/2012	1:12:50 PM	BCl3 MFC set to  0.000000
4/5/2012	1:12:50 PM	PH3 MFC set to  0.000000
4/5/2012	1:12:50 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:12:50 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:12:50 PM	Tube furnace set to 200
4/5/2012	1:13:20 PM	Helium valve closed
4/5/2012	1:13:20 PM	H2 valve closed
4/5/2012	1:13:20 PM	BCl3 valve closed
4/5/2012	1:13:20 PM	PH3 valve closed
4/5/2012	1:13:20 PM	SiCl4 pre valve closed
4/5/2012	1:13:20 PM	SiCl4 post valve closed
4/5/2012	1:13:20 PM	Bypass valve closed
4/5/2012	1:13:20 PM	Bubbler valve closed
4/5/2012	1:13:20 PM	Main Vac valve opened
4/5/2012	1:13:20 PM	Helium MFC set to  0.000000
4/5/2012	1:13:20 PM	H2 MFC set to  0.000000
4/5/2012	1:13:20 PM	BCl3 MFC set to  0.000000
4/5/2012	1:13:20 PM	PH3 MFC set to  0.000000
4/5/2012	1:13:20 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:13:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:13:20 PM	Tube furnace set to 200
4/5/2012	1:13:50 PM	H2 valve closed
4/5/2012	1:13:50 PM	BCl3 valve closed
4/5/2012	1:13:50 PM	PH3 valve closed
4/5/2012	1:13:50 PM	SiCl4 pre valve closed
4/5/2012	1:13:50 PM	SiCl4 post valve closed
4/5/2012	1:13:50 PM	Bypass valve closed
4/5/2012	1:13:50 PM	Bubbler valve closed
4/5/2012	1:13:50 PM	Helium valve opened
4/5/2012	1:13:50 PM	Main Vac valve opened
4/5/2012	1:13:50 PM	Helium MFC set to  20.000000
4/5/2012	1:13:50 PM	H2 MFC set to  0.000000
4/5/2012	1:13:50 PM	BCl3 MFC set to  0.000000
4/5/2012	1:13:50 PM	PH3 MFC set to  0.000000
4/5/2012	1:13:50 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:13:50 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:13:51 PM	Tube furnace set to 200
4/5/2012	1:14:21 PM	Helium valve closed
4/5/2012	1:14:21 PM	H2 valve closed
4/5/2012	1:14:21 PM	BCl3 valve closed
4/5/2012	1:14:21 PM	PH3 valve closed
4/5/2012	1:14:21 PM	SiCl4 pre valve closed
4/5/2012	1:14:21 PM	SiCl4 post valve closed
4/5/2012	1:14:21 PM	Bypass valve closed
4/5/2012	1:14:21 PM	Bubbler valve closed
4/5/2012	1:14:21 PM	Main Vac valve opened
4/5/2012	1:14:21 PM	Helium MFC set to  0.000000
4/5/2012	1:14:21 PM	H2 MFC set to  0.000000
4/5/2012	1:14:21 PM	BCl3 MFC set to  0.000000
4/5/2012	1:14:21 PM	PH3 MFC set to  0.000000
4/5/2012	1:14:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:14:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:14:21 PM	Tube furnace set to 200
4/5/2012	1:14:51 PM	H2 valve closed
4/5/2012	1:14:51 PM	BCl3 valve closed
4/5/2012	1:14:51 PM	PH3 valve closed
4/5/2012	1:14:51 PM	SiCl4 pre valve closed
4/5/2012	1:14:51 PM	SiCl4 post valve closed
4/5/2012	1:14:51 PM	Bypass valve closed
4/5/2012	1:14:51 PM	Bubbler valve closed
4/5/2012	1:14:51 PM	Helium valve opened
4/5/2012	1:14:51 PM	Main Vac valve opened
4/5/2012	1:14:51 PM	Helium MFC set to  20.000000
4/5/2012	1:14:51 PM	H2 MFC set to  0.000000
4/5/2012	1:14:51 PM	BCl3 MFC set to  0.000000
4/5/2012	1:14:51 PM	PH3 MFC set to  0.000000
4/5/2012	1:14:51 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:14:51 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:14:51 PM	Tube furnace set to 200
4/5/2012	1:15:21 PM	Helium valve closed
4/5/2012	1:15:21 PM	H2 valve closed
4/5/2012	1:15:21 PM	BCl3 valve closed
4/5/2012	1:15:21 PM	PH3 valve closed
4/5/2012	1:15:21 PM	SiCl4 pre valve closed
4/5/2012	1:15:21 PM	SiCl4 post valve closed
4/5/2012	1:15:21 PM	Bypass valve closed
4/5/2012	1:15:21 PM	Bubbler valve closed
4/5/2012	1:15:21 PM	Main Vac valve opened
4/5/2012	1:15:21 PM	Helium MFC set to  0.000000
4/5/2012	1:15:21 PM	H2 MFC set to  0.000000
4/5/2012	1:15:21 PM	BCl3 MFC set to  0.000000
4/5/2012	1:15:21 PM	PH3 MFC set to  0.000000
4/5/2012	1:15:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:15:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:15:21 PM	Tube furnace set to 200
4/5/2012	1:15:51 PM	H2 valve closed
4/5/2012	1:15:51 PM	BCl3 valve closed
4/5/2012	1:15:51 PM	PH3 valve closed
4/5/2012	1:15:51 PM	SiCl4 pre valve closed
4/5/2012	1:15:51 PM	SiCl4 post valve closed
4/5/2012	1:15:51 PM	Bypass valve closed
4/5/2012	1:15:51 PM	Bubbler valve closed
4/5/2012	1:15:51 PM	Helium valve opened
4/5/2012	1:15:51 PM	Main Vac valve opened
4/5/2012	1:15:51 PM	Helium MFC set to  20.000000
4/5/2012	1:15:51 PM	H2 MFC set to  0.000000
4/5/2012	1:15:51 PM	BCl3 MFC set to  0.000000
4/5/2012	1:15:51 PM	PH3 MFC set to  0.000000
4/5/2012	1:15:51 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:15:51 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:15:52 PM	Tube furnace set to 200
4/5/2012	1:16:22 PM	Helium valve closed
4/5/2012	1:16:22 PM	H2 valve closed
4/5/2012	1:16:22 PM	BCl3 valve closed
4/5/2012	1:16:22 PM	PH3 valve closed
4/5/2012	1:16:22 PM	SiCl4 pre valve closed
4/5/2012	1:16:22 PM	SiCl4 post valve closed
4/5/2012	1:16:22 PM	Bypass valve closed
4/5/2012	1:16:22 PM	Bubbler valve closed
4/5/2012	1:16:22 PM	Main Vac valve opened
4/5/2012	1:16:22 PM	Helium MFC set to  0.000000
4/5/2012	1:16:22 PM	H2 MFC set to  0.000000
4/5/2012	1:16:22 PM	BCl3 MFC set to  0.000000
4/5/2012	1:16:22 PM	PH3 MFC set to  0.000000
4/5/2012	1:16:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:16:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:16:22 PM	Tube furnace set to 200
4/5/2012	1:16:52 PM	H2 valve closed
4/5/2012	1:16:52 PM	BCl3 valve closed
4/5/2012	1:16:52 PM	PH3 valve closed
4/5/2012	1:16:52 PM	SiCl4 pre valve closed
4/5/2012	1:16:52 PM	SiCl4 post valve closed
4/5/2012	1:16:52 PM	Bypass valve closed
4/5/2012	1:16:52 PM	Bubbler valve closed
4/5/2012	1:16:52 PM	Helium valve opened
4/5/2012	1:16:52 PM	Main Vac valve opened
4/5/2012	1:16:52 PM	Helium MFC set to  20.000000
4/5/2012	1:16:52 PM	H2 MFC set to  0.000000
4/5/2012	1:16:52 PM	BCl3 MFC set to  0.000000
4/5/2012	1:16:52 PM	PH3 MFC set to  0.000000
4/5/2012	1:16:52 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:16:52 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:16:52 PM	Tube furnace set to 200
4/5/2012	1:17:22 PM	Helium valve closed
4/5/2012	1:17:22 PM	H2 valve closed
4/5/2012	1:17:22 PM	BCl3 valve closed
4/5/2012	1:17:22 PM	PH3 valve closed
4/5/2012	1:17:22 PM	SiCl4 pre valve closed
4/5/2012	1:17:22 PM	SiCl4 post valve closed
4/5/2012	1:17:22 PM	Bypass valve closed
4/5/2012	1:17:22 PM	Bubbler valve closed
4/5/2012	1:17:22 PM	Main Vac valve opened
4/5/2012	1:17:22 PM	Helium MFC set to  0.000000
4/5/2012	1:17:22 PM	H2 MFC set to  0.000000
4/5/2012	1:17:22 PM	BCl3 MFC set to  0.000000
4/5/2012	1:17:22 PM	PH3 MFC set to  0.000000
4/5/2012	1:17:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:17:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:17:22 PM	Tube furnace set to 200
4/5/2012	1:17:52 PM	H2 valve closed
4/5/2012	1:17:52 PM	BCl3 valve closed
4/5/2012	1:17:52 PM	PH3 valve closed
4/5/2012	1:17:52 PM	SiCl4 pre valve closed
4/5/2012	1:17:52 PM	SiCl4 post valve closed
4/5/2012	1:17:52 PM	Bypass valve closed
4/5/2012	1:17:52 PM	Bubbler valve closed
4/5/2012	1:17:52 PM	Helium valve opened
4/5/2012	1:17:52 PM	Main Vac valve opened
4/5/2012	1:17:52 PM	Helium MFC set to  20.000000
4/5/2012	1:17:52 PM	H2 MFC set to  0.000000
4/5/2012	1:17:52 PM	BCl3 MFC set to  0.000000
4/5/2012	1:17:52 PM	PH3 MFC set to  0.000000
4/5/2012	1:17:52 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:17:52 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:17:53 PM	Tube furnace set to 200
4/5/2012	1:18:23 PM	Helium valve closed
4/5/2012	1:18:23 PM	H2 valve closed
4/5/2012	1:18:23 PM	BCl3 valve closed
4/5/2012	1:18:23 PM	PH3 valve closed
4/5/2012	1:18:23 PM	SiCl4 pre valve closed
4/5/2012	1:18:23 PM	SiCl4 post valve closed
4/5/2012	1:18:23 PM	Bypass valve closed
4/5/2012	1:18:23 PM	Bubbler valve closed
4/5/2012	1:18:23 PM	Main Vac valve opened
4/5/2012	1:18:23 PM	Helium MFC set to  0.000000
4/5/2012	1:18:23 PM	H2 MFC set to  0.000000
4/5/2012	1:18:23 PM	BCl3 MFC set to  0.000000
4/5/2012	1:18:23 PM	PH3 MFC set to  0.000000
4/5/2012	1:18:23 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:18:23 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:18:23 PM	Tube furnace set to 0
4/5/2012	1:18:24 PM	Run finished at 1:18 PM
4/5/2012	1:22:10 PM	Main Vac valve closed
4/5/2012	1:22:16 PM	Main Vac valve opened
4/5/2012	1:22:27 PM	Recipe started at 1:22 PM
4/5/2012	1:22:27 PM	Helium valve closed
4/5/2012	1:22:27 PM	H2 valve closed
4/5/2012	1:22:27 PM	BCl3 valve closed
4/5/2012	1:22:27 PM	PH3 valve closed
4/5/2012	1:22:27 PM	SiCl4 pre valve closed
4/5/2012	1:22:27 PM	SiCl4 post valve closed
4/5/2012	1:22:27 PM	Bypass valve closed
4/5/2012	1:22:27 PM	Bubbler valve closed
4/5/2012	1:22:27 PM	Main Vac valve opened
4/5/2012	1:22:28 PM	Helium MFC set to  0.000000
4/5/2012	1:22:28 PM	H2 MFC set to  0.000000
4/5/2012	1:22:28 PM	BCl3 MFC set to  0.000000
4/5/2012	1:22:28 PM	PH3 MFC set to  0.000000
4/5/2012	1:22:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:22:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:22:28 PM	Tube furnace set to 0
4/5/2012	1:22:58 PM	H2 valve closed
4/5/2012	1:22:58 PM	BCl3 valve closed
4/5/2012	1:22:58 PM	PH3 valve closed
4/5/2012	1:22:58 PM	SiCl4 pre valve closed
4/5/2012	1:22:58 PM	SiCl4 post valve closed
4/5/2012	1:22:58 PM	Bypass valve closed
4/5/2012	1:22:58 PM	Bubbler valve closed
4/5/2012	1:22:58 PM	Helium valve opened
4/5/2012	1:22:58 PM	Main Vac valve opened
4/5/2012	1:22:58 PM	Helium MFC set to  20.000000
4/5/2012	1:22:58 PM	H2 MFC set to  0.000000
4/5/2012	1:22:58 PM	BCl3 MFC set to  0.000000
4/5/2012	1:22:58 PM	PH3 MFC set to  0.000000
4/5/2012	1:22:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:22:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:22:58 PM	Tube furnace set to 0
4/5/2012	1:23:28 PM	Helium valve closed
4/5/2012	1:23:28 PM	H2 valve closed
4/5/2012	1:23:28 PM	BCl3 valve closed
4/5/2012	1:23:28 PM	PH3 valve closed
4/5/2012	1:23:28 PM	SiCl4 pre valve closed
4/5/2012	1:23:28 PM	SiCl4 post valve closed
4/5/2012	1:23:28 PM	Bypass valve closed
4/5/2012	1:23:28 PM	Bubbler valve closed
4/5/2012	1:23:28 PM	Main Vac valve opened
4/5/2012	1:23:28 PM	Helium MFC set to  0.000000
4/5/2012	1:23:28 PM	H2 MFC set to  0.000000
4/5/2012	1:23:28 PM	BCl3 MFC set to  0.000000
4/5/2012	1:23:28 PM	PH3 MFC set to  0.000000
4/5/2012	1:23:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:23:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:23:28 PM	Tube furnace set to 0
4/5/2012	1:23:58 PM	H2 valve closed
4/5/2012	1:23:58 PM	BCl3 valve closed
4/5/2012	1:23:58 PM	PH3 valve closed
4/5/2012	1:23:58 PM	SiCl4 pre valve closed
4/5/2012	1:23:58 PM	SiCl4 post valve closed
4/5/2012	1:23:58 PM	Bypass valve closed
4/5/2012	1:23:58 PM	Bubbler valve closed
4/5/2012	1:23:58 PM	Helium valve opened
4/5/2012	1:23:58 PM	Main Vac valve opened
4/5/2012	1:23:58 PM	Helium MFC set to  20.000000
4/5/2012	1:23:58 PM	H2 MFC set to  0.000000
4/5/2012	1:23:58 PM	BCl3 MFC set to  0.000000
4/5/2012	1:23:58 PM	PH3 MFC set to  0.000000
4/5/2012	1:23:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:23:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:23:58 PM	Tube furnace set to 0
4/5/2012	1:24:28 PM	Helium valve closed
4/5/2012	1:24:28 PM	H2 valve closed
4/5/2012	1:24:28 PM	BCl3 valve closed
4/5/2012	1:24:28 PM	PH3 valve closed
4/5/2012	1:24:28 PM	SiCl4 pre valve closed
4/5/2012	1:24:28 PM	SiCl4 post valve closed
4/5/2012	1:24:28 PM	Bypass valve closed
4/5/2012	1:24:28 PM	Bubbler valve closed
4/5/2012	1:24:28 PM	Main Vac valve opened
4/5/2012	1:24:28 PM	Helium MFC set to  0.000000
4/5/2012	1:24:28 PM	H2 MFC set to  0.000000
4/5/2012	1:24:28 PM	BCl3 MFC set to  0.000000
4/5/2012	1:24:28 PM	PH3 MFC set to  0.000000
4/5/2012	1:24:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:24:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:24:29 PM	Tube furnace set to 0
4/5/2012	1:24:59 PM	H2 valve closed
4/5/2012	1:24:59 PM	BCl3 valve closed
4/5/2012	1:24:59 PM	PH3 valve closed
4/5/2012	1:24:59 PM	SiCl4 pre valve closed
4/5/2012	1:24:59 PM	SiCl4 post valve closed
4/5/2012	1:24:59 PM	Bypass valve closed
4/5/2012	1:24:59 PM	Bubbler valve closed
4/5/2012	1:24:59 PM	Helium valve opened
4/5/2012	1:24:59 PM	Main Vac valve opened
4/5/2012	1:24:59 PM	Helium MFC set to  20.000000
4/5/2012	1:24:59 PM	H2 MFC set to  0.000000
4/5/2012	1:24:59 PM	BCl3 MFC set to  0.000000
4/5/2012	1:24:59 PM	PH3 MFC set to  0.000000
4/5/2012	1:24:59 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:24:59 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:24:59 PM	Tube furnace set to 0
4/5/2012	1:25:29 PM	Helium valve closed
4/5/2012	1:25:29 PM	H2 valve closed
4/5/2012	1:25:29 PM	BCl3 valve closed
4/5/2012	1:25:29 PM	PH3 valve closed
4/5/2012	1:25:29 PM	SiCl4 pre valve closed
4/5/2012	1:25:29 PM	SiCl4 post valve closed
4/5/2012	1:25:29 PM	Bypass valve closed
4/5/2012	1:25:29 PM	Bubbler valve closed
4/5/2012	1:25:29 PM	Main Vac valve opened
4/5/2012	1:25:29 PM	Helium MFC set to  0.000000
4/5/2012	1:25:29 PM	H2 MFC set to  0.000000
4/5/2012	1:25:29 PM	BCl3 MFC set to  0.000000
4/5/2012	1:25:29 PM	PH3 MFC set to  0.000000
4/5/2012	1:25:29 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:25:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:25:29 PM	Tube furnace set to 0
4/5/2012	1:25:59 PM	H2 valve closed
4/5/2012	1:25:59 PM	BCl3 valve closed
4/5/2012	1:25:59 PM	PH3 valve closed
4/5/2012	1:25:59 PM	SiCl4 pre valve closed
4/5/2012	1:25:59 PM	SiCl4 post valve closed
4/5/2012	1:25:59 PM	Bypass valve closed
4/5/2012	1:25:59 PM	Bubbler valve closed
4/5/2012	1:25:59 PM	Helium valve opened
4/5/2012	1:25:59 PM	Main Vac valve opened
4/5/2012	1:25:59 PM	Helium MFC set to  20.000000
4/5/2012	1:25:59 PM	H2 MFC set to  0.000000
4/5/2012	1:25:59 PM	BCl3 MFC set to  0.000000
4/5/2012	1:25:59 PM	PH3 MFC set to  0.000000
4/5/2012	1:25:59 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:25:59 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:25:59 PM	Tube furnace set to 0
4/5/2012	1:26:29 PM	Helium valve closed
4/5/2012	1:26:29 PM	H2 valve closed
4/5/2012	1:26:29 PM	BCl3 valve closed
4/5/2012	1:26:29 PM	PH3 valve closed
4/5/2012	1:26:29 PM	SiCl4 pre valve closed
4/5/2012	1:26:29 PM	SiCl4 post valve closed
4/5/2012	1:26:29 PM	Bypass valve closed
4/5/2012	1:26:29 PM	Bubbler valve closed
4/5/2012	1:26:29 PM	Main Vac valve opened
4/5/2012	1:26:29 PM	Helium MFC set to  0.000000
4/5/2012	1:26:29 PM	H2 MFC set to  0.000000
4/5/2012	1:26:29 PM	BCl3 MFC set to  0.000000
4/5/2012	1:26:29 PM	PH3 MFC set to  0.000000
4/5/2012	1:26:29 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:26:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:26:30 PM	Tube furnace set to 0
4/5/2012	1:27:00 PM	H2 valve closed
4/5/2012	1:27:00 PM	BCl3 valve closed
4/5/2012	1:27:00 PM	PH3 valve closed
4/5/2012	1:27:00 PM	SiCl4 pre valve closed
4/5/2012	1:27:00 PM	SiCl4 post valve closed
4/5/2012	1:27:00 PM	Bypass valve closed
4/5/2012	1:27:00 PM	Bubbler valve closed
4/5/2012	1:27:00 PM	Helium valve opened
4/5/2012	1:27:00 PM	Main Vac valve opened
4/5/2012	1:27:00 PM	Helium MFC set to  20.000000
4/5/2012	1:27:00 PM	H2 MFC set to  0.000000
4/5/2012	1:27:00 PM	BCl3 MFC set to  0.000000
4/5/2012	1:27:00 PM	PH3 MFC set to  0.000000
4/5/2012	1:27:00 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:27:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:27:00 PM	Tube furnace set to 0
4/5/2012	1:27:30 PM	Helium valve closed
4/5/2012	1:27:30 PM	H2 valve closed
4/5/2012	1:27:30 PM	BCl3 valve closed
4/5/2012	1:27:30 PM	PH3 valve closed
4/5/2012	1:27:30 PM	SiCl4 pre valve closed
4/5/2012	1:27:30 PM	SiCl4 post valve closed
4/5/2012	1:27:30 PM	Bypass valve closed
4/5/2012	1:27:30 PM	Bubbler valve closed
4/5/2012	1:27:30 PM	Main Vac valve opened
4/5/2012	1:27:30 PM	Helium MFC set to  0.000000
4/5/2012	1:27:30 PM	H2 MFC set to  0.000000
4/5/2012	1:27:30 PM	BCl3 MFC set to  0.000000
4/5/2012	1:27:30 PM	PH3 MFC set to  0.000000
4/5/2012	1:27:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:27:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:27:30 PM	Tube furnace set to 0
4/5/2012	1:28:00 PM	H2 valve closed
4/5/2012	1:28:00 PM	BCl3 valve closed
4/5/2012	1:28:00 PM	PH3 valve closed
4/5/2012	1:28:00 PM	SiCl4 pre valve closed
4/5/2012	1:28:00 PM	SiCl4 post valve closed
4/5/2012	1:28:00 PM	Bypass valve closed
4/5/2012	1:28:00 PM	Bubbler valve closed
4/5/2012	1:28:00 PM	Helium valve opened
4/5/2012	1:28:00 PM	Main Vac valve opened
4/5/2012	1:28:00 PM	Helium MFC set to  20.000000
4/5/2012	1:28:00 PM	H2 MFC set to  0.000000
4/5/2012	1:28:00 PM	BCl3 MFC set to  0.000000
4/5/2012	1:28:00 PM	PH3 MFC set to  0.000000
4/5/2012	1:28:00 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:28:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:28:00 PM	Tube furnace set to 0
4/5/2012	1:28:30 PM	Helium valve closed
4/5/2012	1:28:30 PM	H2 valve closed
4/5/2012	1:28:30 PM	BCl3 valve closed
4/5/2012	1:28:30 PM	PH3 valve closed
4/5/2012	1:28:30 PM	SiCl4 pre valve closed
4/5/2012	1:28:30 PM	SiCl4 post valve closed
4/5/2012	1:28:30 PM	Bypass valve closed
4/5/2012	1:28:30 PM	Bubbler valve closed
4/5/2012	1:28:30 PM	Main Vac valve opened
4/5/2012	1:28:30 PM	Helium MFC set to  0.000000
4/5/2012	1:28:30 PM	H2 MFC set to  0.000000
4/5/2012	1:28:30 PM	BCl3 MFC set to  0.000000
4/5/2012	1:28:30 PM	PH3 MFC set to  0.000000
4/5/2012	1:28:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:28:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:28:31 PM	Tube furnace set to 0
4/5/2012	1:29:01 PM	H2 valve closed
4/5/2012	1:29:01 PM	BCl3 valve closed
4/5/2012	1:29:01 PM	PH3 valve closed
4/5/2012	1:29:01 PM	SiCl4 pre valve closed
4/5/2012	1:29:01 PM	SiCl4 post valve closed
4/5/2012	1:29:01 PM	Bypass valve closed
4/5/2012	1:29:01 PM	Bubbler valve closed
4/5/2012	1:29:01 PM	Helium valve opened
4/5/2012	1:29:01 PM	Main Vac valve opened
4/5/2012	1:29:01 PM	Helium MFC set to  20.000000
4/5/2012	1:29:01 PM	H2 MFC set to  0.000000
4/5/2012	1:29:01 PM	BCl3 MFC set to  0.000000
4/5/2012	1:29:01 PM	PH3 MFC set to  0.000000
4/5/2012	1:29:01 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:29:01 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:29:01 PM	Tube furnace set to 0
4/5/2012	1:29:31 PM	Helium valve closed
4/5/2012	1:29:31 PM	H2 valve closed
4/5/2012	1:29:31 PM	BCl3 valve closed
4/5/2012	1:29:31 PM	PH3 valve closed
4/5/2012	1:29:31 PM	SiCl4 pre valve closed
4/5/2012	1:29:31 PM	SiCl4 post valve closed
4/5/2012	1:29:31 PM	Bypass valve closed
4/5/2012	1:29:31 PM	Bubbler valve closed
4/5/2012	1:29:31 PM	Main Vac valve opened
4/5/2012	1:29:31 PM	Helium MFC set to  0.000000
4/5/2012	1:29:31 PM	H2 MFC set to  0.000000
4/5/2012	1:29:31 PM	BCl3 MFC set to  0.000000
4/5/2012	1:29:31 PM	PH3 MFC set to  0.000000
4/5/2012	1:29:31 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:29:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:29:31 PM	Tube furnace set to 0
4/5/2012	1:30:01 PM	H2 valve closed
4/5/2012	1:30:01 PM	BCl3 valve closed
4/5/2012	1:30:01 PM	PH3 valve closed
4/5/2012	1:30:01 PM	SiCl4 pre valve closed
4/5/2012	1:30:01 PM	SiCl4 post valve closed
4/5/2012	1:30:01 PM	Bypass valve closed
4/5/2012	1:30:01 PM	Bubbler valve closed
4/5/2012	1:30:01 PM	Helium valve opened
4/5/2012	1:30:01 PM	Main Vac valve opened
4/5/2012	1:30:01 PM	Helium MFC set to  20.000000
4/5/2012	1:30:01 PM	H2 MFC set to  0.000000
4/5/2012	1:30:01 PM	BCl3 MFC set to  0.000000
4/5/2012	1:30:01 PM	PH3 MFC set to  0.000000
4/5/2012	1:30:01 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:30:01 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:30:01 PM	Tube furnace set to 0
4/5/2012	1:30:31 PM	Helium valve closed
4/5/2012	1:30:31 PM	H2 valve closed
4/5/2012	1:30:31 PM	BCl3 valve closed
4/5/2012	1:30:31 PM	PH3 valve closed
4/5/2012	1:30:31 PM	SiCl4 pre valve closed
4/5/2012	1:30:31 PM	SiCl4 post valve closed
4/5/2012	1:30:31 PM	Bypass valve closed
4/5/2012	1:30:31 PM	Bubbler valve closed
4/5/2012	1:30:31 PM	Main Vac valve opened
4/5/2012	1:30:31 PM	Helium MFC set to  0.000000
4/5/2012	1:30:31 PM	H2 MFC set to  0.000000
4/5/2012	1:30:31 PM	BCl3 MFC set to  0.000000
4/5/2012	1:30:31 PM	PH3 MFC set to  0.000000
4/5/2012	1:30:31 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:30:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:30:31 PM	Tube furnace set to 0
4/5/2012	1:31:01 PM	H2 valve closed
4/5/2012	1:31:01 PM	BCl3 valve closed
4/5/2012	1:31:01 PM	PH3 valve closed
4/5/2012	1:31:01 PM	SiCl4 pre valve closed
4/5/2012	1:31:01 PM	SiCl4 post valve closed
4/5/2012	1:31:01 PM	Bypass valve closed
4/5/2012	1:31:01 PM	Bubbler valve closed
4/5/2012	1:31:02 PM	Helium valve opened
4/5/2012	1:31:02 PM	Main Vac valve opened
4/5/2012	1:31:02 PM	Helium MFC set to  20.000000
4/5/2012	1:31:02 PM	H2 MFC set to  0.000000
4/5/2012	1:31:02 PM	BCl3 MFC set to  0.000000
4/5/2012	1:31:02 PM	PH3 MFC set to  0.000000
4/5/2012	1:31:02 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:31:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:31:02 PM	Tube furnace set to 0
4/5/2012	1:31:32 PM	Helium valve closed
4/5/2012	1:31:32 PM	H2 valve closed
4/5/2012	1:31:32 PM	BCl3 valve closed
4/5/2012	1:31:32 PM	PH3 valve closed
4/5/2012	1:31:32 PM	SiCl4 pre valve closed
4/5/2012	1:31:32 PM	SiCl4 post valve closed
4/5/2012	1:31:32 PM	Bypass valve closed
4/5/2012	1:31:32 PM	Bubbler valve closed
4/5/2012	1:31:32 PM	Main Vac valve opened
4/5/2012	1:31:32 PM	Helium MFC set to  0.000000
4/5/2012	1:31:32 PM	H2 MFC set to  0.000000
4/5/2012	1:31:32 PM	BCl3 MFC set to  0.000000
4/5/2012	1:31:32 PM	PH3 MFC set to  0.000000
4/5/2012	1:31:32 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:31:32 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:31:32 PM	Tube furnace set to 200
4/5/2012	1:32:02 PM	H2 valve closed
4/5/2012	1:32:02 PM	BCl3 valve closed
4/5/2012	1:32:02 PM	PH3 valve closed
4/5/2012	1:32:02 PM	SiCl4 pre valve closed
4/5/2012	1:32:02 PM	SiCl4 post valve closed
4/5/2012	1:32:02 PM	Bypass valve closed
4/5/2012	1:32:02 PM	Bubbler valve closed
4/5/2012	1:32:02 PM	Helium valve opened
4/5/2012	1:32:02 PM	Main Vac valve opened
4/5/2012	1:32:02 PM	Helium MFC set to  20.000000
4/5/2012	1:32:02 PM	H2 MFC set to  0.000000
4/5/2012	1:32:02 PM	BCl3 MFC set to  0.000000
4/5/2012	1:32:02 PM	PH3 MFC set to  0.000000
4/5/2012	1:32:02 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:32:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:32:02 PM	Tube furnace set to 200
4/5/2012	1:32:32 PM	Helium valve closed
4/5/2012	1:32:32 PM	H2 valve closed
4/5/2012	1:32:32 PM	BCl3 valve closed
4/5/2012	1:32:32 PM	PH3 valve closed
4/5/2012	1:32:32 PM	SiCl4 pre valve closed
4/5/2012	1:32:32 PM	SiCl4 post valve closed
4/5/2012	1:32:32 PM	Bypass valve closed
4/5/2012	1:32:32 PM	Bubbler valve closed
4/5/2012	1:32:32 PM	Main Vac valve opened
4/5/2012	1:32:32 PM	Helium MFC set to  0.000000
4/5/2012	1:32:32 PM	H2 MFC set to  0.000000
4/5/2012	1:32:32 PM	BCl3 MFC set to  0.000000
4/5/2012	1:32:32 PM	PH3 MFC set to  0.000000
4/5/2012	1:32:32 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:32:32 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:32:32 PM	Tube furnace set to 200
4/5/2012	1:33:02 PM	H2 valve closed
4/5/2012	1:33:02 PM	BCl3 valve closed
4/5/2012	1:33:02 PM	PH3 valve closed
4/5/2012	1:33:02 PM	SiCl4 pre valve closed
4/5/2012	1:33:02 PM	SiCl4 post valve closed
4/5/2012	1:33:02 PM	Bypass valve closed
4/5/2012	1:33:02 PM	Bubbler valve closed
4/5/2012	1:33:02 PM	Helium valve opened
4/5/2012	1:33:02 PM	Main Vac valve opened
4/5/2012	1:33:02 PM	Helium MFC set to  20.000000
4/5/2012	1:33:02 PM	H2 MFC set to  0.000000
4/5/2012	1:33:02 PM	BCl3 MFC set to  0.000000
4/5/2012	1:33:02 PM	PH3 MFC set to  0.000000
4/5/2012	1:33:02 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:33:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:33:03 PM	Tube furnace set to 200
4/5/2012	1:33:33 PM	Helium valve closed
4/5/2012	1:33:33 PM	H2 valve closed
4/5/2012	1:33:33 PM	BCl3 valve closed
4/5/2012	1:33:33 PM	PH3 valve closed
4/5/2012	1:33:33 PM	SiCl4 pre valve closed
4/5/2012	1:33:33 PM	SiCl4 post valve closed
4/5/2012	1:33:33 PM	Bypass valve closed
4/5/2012	1:33:33 PM	Bubbler valve closed
4/5/2012	1:33:33 PM	Main Vac valve opened
4/5/2012	1:33:33 PM	Helium MFC set to  0.000000
4/5/2012	1:33:33 PM	H2 MFC set to  0.000000
4/5/2012	1:33:33 PM	BCl3 MFC set to  0.000000
4/5/2012	1:33:33 PM	PH3 MFC set to  0.000000
4/5/2012	1:33:33 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:33:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:33:33 PM	Tube furnace set to 200
4/5/2012	1:34:03 PM	H2 valve closed
4/5/2012	1:34:03 PM	BCl3 valve closed
4/5/2012	1:34:03 PM	PH3 valve closed
4/5/2012	1:34:03 PM	SiCl4 pre valve closed
4/5/2012	1:34:03 PM	SiCl4 post valve closed
4/5/2012	1:34:03 PM	Bypass valve closed
4/5/2012	1:34:03 PM	Bubbler valve closed
4/5/2012	1:34:03 PM	Helium valve opened
4/5/2012	1:34:03 PM	Main Vac valve opened
4/5/2012	1:34:03 PM	Helium MFC set to  20.000000
4/5/2012	1:34:03 PM	H2 MFC set to  0.000000
4/5/2012	1:34:03 PM	BCl3 MFC set to  0.000000
4/5/2012	1:34:03 PM	PH3 MFC set to  0.000000
4/5/2012	1:34:03 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:34:03 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:34:03 PM	Tube furnace set to 200
4/5/2012	1:34:33 PM	Helium valve closed
4/5/2012	1:34:33 PM	H2 valve closed
4/5/2012	1:34:33 PM	BCl3 valve closed
4/5/2012	1:34:33 PM	PH3 valve closed
4/5/2012	1:34:33 PM	SiCl4 pre valve closed
4/5/2012	1:34:33 PM	SiCl4 post valve closed
4/5/2012	1:34:33 PM	Bypass valve closed
4/5/2012	1:34:33 PM	Bubbler valve closed
4/5/2012	1:34:33 PM	Main Vac valve opened
4/5/2012	1:34:33 PM	Helium MFC set to  0.000000
4/5/2012	1:34:33 PM	H2 MFC set to  0.000000
4/5/2012	1:34:33 PM	BCl3 MFC set to  0.000000
4/5/2012	1:34:33 PM	PH3 MFC set to  0.000000
4/5/2012	1:34:33 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:34:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:34:33 PM	Tube furnace set to 200
4/5/2012	1:35:03 PM	H2 valve closed
4/5/2012	1:35:03 PM	BCl3 valve closed
4/5/2012	1:35:03 PM	PH3 valve closed
4/5/2012	1:35:03 PM	SiCl4 pre valve closed
4/5/2012	1:35:03 PM	SiCl4 post valve closed
4/5/2012	1:35:03 PM	Bypass valve closed
4/5/2012	1:35:03 PM	Bubbler valve closed
4/5/2012	1:35:03 PM	Helium valve opened
4/5/2012	1:35:03 PM	Main Vac valve opened
4/5/2012	1:35:03 PM	Helium MFC set to  20.000000
4/5/2012	1:35:03 PM	H2 MFC set to  0.000000
4/5/2012	1:35:03 PM	BCl3 MFC set to  0.000000
4/5/2012	1:35:03 PM	PH3 MFC set to  0.000000
4/5/2012	1:35:03 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:35:03 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:35:04 PM	Tube furnace set to 200
4/5/2012	1:35:34 PM	Helium valve closed
4/5/2012	1:35:34 PM	H2 valve closed
4/5/2012	1:35:34 PM	BCl3 valve closed
4/5/2012	1:35:34 PM	PH3 valve closed
4/5/2012	1:35:34 PM	SiCl4 pre valve closed
4/5/2012	1:35:34 PM	SiCl4 post valve closed
4/5/2012	1:35:34 PM	Bypass valve closed
4/5/2012	1:35:34 PM	Bubbler valve closed
4/5/2012	1:35:34 PM	Main Vac valve opened
4/5/2012	1:35:34 PM	Helium MFC set to  0.000000
4/5/2012	1:35:34 PM	H2 MFC set to  0.000000
4/5/2012	1:35:34 PM	BCl3 MFC set to  0.000000
4/5/2012	1:35:34 PM	PH3 MFC set to  0.000000
4/5/2012	1:35:34 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:35:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:35:34 PM	Tube furnace set to 200
4/5/2012	1:36:04 PM	H2 valve closed
4/5/2012	1:36:04 PM	BCl3 valve closed
4/5/2012	1:36:04 PM	PH3 valve closed
4/5/2012	1:36:04 PM	SiCl4 pre valve closed
4/5/2012	1:36:04 PM	SiCl4 post valve closed
4/5/2012	1:36:04 PM	Bypass valve closed
4/5/2012	1:36:04 PM	Bubbler valve closed
4/5/2012	1:36:04 PM	Helium valve opened
4/5/2012	1:36:04 PM	Main Vac valve opened
4/5/2012	1:36:04 PM	Helium MFC set to  20.000000
4/5/2012	1:36:04 PM	H2 MFC set to  0.000000
4/5/2012	1:36:04 PM	BCl3 MFC set to  0.000000
4/5/2012	1:36:04 PM	PH3 MFC set to  0.000000
4/5/2012	1:36:04 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:36:04 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:36:04 PM	Tube furnace set to 200
4/5/2012	1:36:34 PM	Helium valve closed
4/5/2012	1:36:34 PM	H2 valve closed
4/5/2012	1:36:34 PM	BCl3 valve closed
4/5/2012	1:36:34 PM	PH3 valve closed
4/5/2012	1:36:34 PM	SiCl4 pre valve closed
4/5/2012	1:36:34 PM	SiCl4 post valve closed
4/5/2012	1:36:34 PM	Bypass valve closed
4/5/2012	1:36:34 PM	Bubbler valve closed
4/5/2012	1:36:34 PM	Main Vac valve opened
4/5/2012	1:36:34 PM	Helium MFC set to  0.000000
4/5/2012	1:36:34 PM	H2 MFC set to  0.000000
4/5/2012	1:36:34 PM	BCl3 MFC set to  0.000000
4/5/2012	1:36:34 PM	PH3 MFC set to  0.000000
4/5/2012	1:36:34 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:36:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:36:34 PM	Tube furnace set to 200
4/5/2012	1:37:04 PM	H2 valve closed
4/5/2012	1:37:04 PM	BCl3 valve closed
4/5/2012	1:37:04 PM	PH3 valve closed
4/5/2012	1:37:04 PM	SiCl4 pre valve closed
4/5/2012	1:37:04 PM	SiCl4 post valve closed
4/5/2012	1:37:04 PM	Bypass valve closed
4/5/2012	1:37:04 PM	Bubbler valve closed
4/5/2012	1:37:04 PM	Helium valve opened
4/5/2012	1:37:04 PM	Main Vac valve opened
4/5/2012	1:37:04 PM	Helium MFC set to  20.000000
4/5/2012	1:37:04 PM	H2 MFC set to  0.000000
4/5/2012	1:37:04 PM	BCl3 MFC set to  0.000000
4/5/2012	1:37:04 PM	PH3 MFC set to  0.000000
4/5/2012	1:37:04 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:37:04 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:37:04 PM	Tube furnace set to 200
4/5/2012	1:37:35 PM	Helium valve closed
4/5/2012	1:37:35 PM	H2 valve closed
4/5/2012	1:37:35 PM	BCl3 valve closed
4/5/2012	1:37:35 PM	PH3 valve closed
4/5/2012	1:37:35 PM	SiCl4 pre valve closed
4/5/2012	1:37:35 PM	SiCl4 post valve closed
4/5/2012	1:37:35 PM	Bypass valve closed
4/5/2012	1:37:35 PM	Bubbler valve closed
4/5/2012	1:37:35 PM	Main Vac valve opened
4/5/2012	1:37:35 PM	Helium MFC set to  0.000000
4/5/2012	1:37:35 PM	H2 MFC set to  0.000000
4/5/2012	1:37:35 PM	BCl3 MFC set to  0.000000
4/5/2012	1:37:35 PM	PH3 MFC set to  0.000000
4/5/2012	1:37:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:37:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:37:35 PM	Tube furnace set to 0
4/5/2012	1:37:36 PM	Run finished at 1:37 PM
4/5/2012	1:57:53 PM	Main Vac valve closed
4/5/2012	1:58:05 PM	Main Vac valve opened
4/5/2012	1:59:04 PM	Recipe started at 1:59 PM
4/5/2012	1:59:04 PM	Helium valve closed
4/5/2012	1:59:04 PM	H2 valve closed
4/5/2012	1:59:04 PM	BCl3 valve closed
4/5/2012	1:59:04 PM	PH3 valve closed
4/5/2012	1:59:04 PM	SiCl4 pre valve closed
4/5/2012	1:59:04 PM	SiCl4 post valve closed
4/5/2012	1:59:04 PM	Main Vac valve closed
4/5/2012	1:59:04 PM	Bypass valve closed
4/5/2012	1:59:04 PM	Bubbler valve closed
4/5/2012	1:59:04 PM	Helium MFC set to  0.000000
4/5/2012	1:59:04 PM	H2 MFC set to  0.000000
4/5/2012	1:59:04 PM	BCl3 MFC set to  0.000000
4/5/2012	1:59:04 PM	PH3 MFC set to  0.000000
4/5/2012	1:59:04 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:59:04 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:59:05 PM	Tube furnace set to 0
4/5/2012	1:59:08 PM	Helium valve closed
4/5/2012	1:59:08 PM	BCl3 valve closed
4/5/2012	1:59:08 PM	PH3 valve closed
4/5/2012	1:59:08 PM	SiCl4 pre valve closed
4/5/2012	1:59:08 PM	SiCl4 post valve closed
4/5/2012	1:59:08 PM	Main Vac valve closed
4/5/2012	1:59:08 PM	Bypass valve closed
4/5/2012	1:59:08 PM	Bubbler valve closed
4/5/2012	1:59:08 PM	H2 valve opened
4/5/2012	1:59:08 PM	Helium MFC set to  0.000000
4/5/2012	1:59:08 PM	H2 MFC set to  500.000000
4/5/2012	1:59:08 PM	BCl3 MFC set to  0.000000
4/5/2012	1:59:08 PM	PH3 MFC set to  0.000000
4/5/2012	1:59:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	1:59:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	1:59:08 PM	Tube furnace set to 0
4/5/2012	2:00:12 PM	Helium valve closed
4/5/2012	2:00:12 PM	BCl3 valve closed
4/5/2012	2:00:12 PM	PH3 valve closed
4/5/2012	2:00:12 PM	SiCl4 pre valve closed
4/5/2012	2:00:12 PM	SiCl4 post valve closed
4/5/2012	2:00:12 PM	Main Vac valve closed
4/5/2012	2:00:12 PM	Bypass valve closed
4/5/2012	2:00:12 PM	H2 valve opened
4/5/2012	2:00:12 PM	Bubbler valve opened
4/5/2012	2:00:12 PM	Helium MFC set to  0.000000
4/5/2012	2:00:12 PM	H2 MFC set to  500.000000
4/5/2012	2:00:12 PM	BCl3 MFC set to  0.000000
4/5/2012	2:00:12 PM	PH3 MFC set to  0.000000
4/5/2012	2:00:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:00:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:00:12 PM	Tube furnace set to 0
4/5/2012	2:00:13 PM	Helium valve closed
4/5/2012	2:00:13 PM	BCl3 valve closed
4/5/2012	2:00:13 PM	PH3 valve closed
4/5/2012	2:00:13 PM	SiCl4 pre valve closed
4/5/2012	2:00:13 PM	SiCl4 post valve closed
4/5/2012	2:00:13 PM	Main Vac valve closed
4/5/2012	2:00:13 PM	Bypass valve closed
4/5/2012	2:00:13 PM	H2 valve opened
4/5/2012	2:00:13 PM	Bubbler valve opened
4/5/2012	2:00:13 PM	Helium MFC set to  0.000000
4/5/2012	2:00:13 PM	H2 MFC set to  500.000000
4/5/2012	2:00:13 PM	BCl3 MFC set to  0.000000
4/5/2012	2:00:13 PM	PH3 MFC set to  0.000000
4/5/2012	2:00:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:00:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:00:13 PM	Tube furnace set to 1000
4/5/2012	2:20:13 PM	Helium valve closed
4/5/2012	2:20:13 PM	PH3 valve closed
4/5/2012	2:20:13 PM	Main Vac valve closed
4/5/2012	2:20:13 PM	Bypass valve closed
4/5/2012	2:20:13 PM	H2 valve opened
4/5/2012	2:20:13 PM	BCl3 valve opened
4/5/2012	2:20:13 PM	SiCl4 pre valve opened
4/5/2012	2:20:13 PM	SiCl4 post valve opened
4/5/2012	2:20:13 PM	Bubbler valve opened
4/5/2012	2:20:13 PM	Helium MFC set to  0.000000
4/5/2012	2:20:13 PM	H2 MFC set to  450.000000
4/5/2012	2:20:13 PM	BCl3 MFC set to  1.500000
4/5/2012	2:20:13 PM	PH3 MFC set to  0.000000
4/5/2012	2:20:13 PM	SiCl4 MFC set to  50.000000
4/5/2012	2:20:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:20:14 PM	Tube furnace set to 1000
4/5/2012	2:32:14 PM	Helium valve closed
4/5/2012	2:32:14 PM	BCl3 valve closed
4/5/2012	2:32:14 PM	PH3 valve closed
4/5/2012	2:32:14 PM	SiCl4 pre valve closed
4/5/2012	2:32:14 PM	SiCl4 post valve closed
4/5/2012	2:32:14 PM	Main Vac valve closed
4/5/2012	2:32:14 PM	Bypass valve closed
4/5/2012	2:32:14 PM	H2 valve opened
4/5/2012	2:32:14 PM	Bubbler valve opened
4/5/2012	2:32:14 PM	Helium MFC set to  0.000000
4/5/2012	2:32:14 PM	H2 MFC set to  500.000000
4/5/2012	2:32:14 PM	BCl3 MFC set to  0.000000
4/5/2012	2:32:14 PM	PH3 MFC set to  0.000000
4/5/2012	2:32:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:32:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:32:14 PM	Tube furnace set to 950
4/5/2012	2:34:14 PM	Helium valve closed
4/5/2012	2:34:14 PM	BCl3 valve closed
4/5/2012	2:34:14 PM	PH3 valve closed
4/5/2012	2:34:14 PM	SiCl4 pre valve closed
4/5/2012	2:34:14 PM	SiCl4 post valve closed
4/5/2012	2:34:14 PM	Main Vac valve closed
4/5/2012	2:34:14 PM	Bypass valve closed
4/5/2012	2:34:14 PM	H2 valve opened
4/5/2012	2:34:14 PM	Bubbler valve opened
4/5/2012	2:34:14 PM	Helium MFC set to  0.000000
4/5/2012	2:34:14 PM	H2 MFC set to  500.000000
4/5/2012	2:34:14 PM	BCl3 MFC set to  0.000000
4/5/2012	2:34:14 PM	PH3 MFC set to  0.000000
4/5/2012	2:34:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:34:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:34:14 PM	Tube furnace set to 900
4/5/2012	2:36:14 PM	Helium valve closed
4/5/2012	2:36:14 PM	BCl3 valve closed
4/5/2012	2:36:14 PM	PH3 valve closed
4/5/2012	2:36:14 PM	SiCl4 pre valve closed
4/5/2012	2:36:14 PM	SiCl4 post valve closed
4/5/2012	2:36:14 PM	Main Vac valve closed
4/5/2012	2:36:14 PM	Bypass valve closed
4/5/2012	2:36:14 PM	H2 valve opened
4/5/2012	2:36:14 PM	Bubbler valve opened
4/5/2012	2:36:14 PM	Helium MFC set to  0.000000
4/5/2012	2:36:14 PM	H2 MFC set to  500.000000
4/5/2012	2:36:14 PM	BCl3 MFC set to  0.000000
4/5/2012	2:36:14 PM	PH3 MFC set to  0.000000
4/5/2012	2:36:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:36:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:36:14 PM	Tube furnace set to 850
4/5/2012	2:38:14 PM	H2 valve closed
4/5/2012	2:38:14 PM	BCl3 valve closed
4/5/2012	2:38:14 PM	PH3 valve closed
4/5/2012	2:38:14 PM	SiCl4 pre valve closed
4/5/2012	2:38:14 PM	SiCl4 post valve closed
4/5/2012	2:38:14 PM	Main Vac valve closed
4/5/2012	2:38:14 PM	Bypass valve closed
4/5/2012	2:38:14 PM	Helium valve opened
4/5/2012	2:38:14 PM	Bubbler valve opened
4/5/2012	2:38:14 PM	Helium MFC set to  500.000000
4/5/2012	2:38:14 PM	H2 MFC set to  0.000000
4/5/2012	2:38:14 PM	BCl3 MFC set to  0.000000
4/5/2012	2:38:14 PM	PH3 MFC set to  0.000000
4/5/2012	2:38:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:38:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:38:15 PM	Tube furnace set to 800
4/5/2012	2:40:15 PM	H2 valve closed
4/5/2012	2:40:15 PM	BCl3 valve closed
4/5/2012	2:40:15 PM	PH3 valve closed
4/5/2012	2:40:15 PM	SiCl4 pre valve closed
4/5/2012	2:40:15 PM	SiCl4 post valve closed
4/5/2012	2:40:15 PM	Main Vac valve closed
4/5/2012	2:40:15 PM	Bypass valve closed
4/5/2012	2:40:15 PM	Helium valve opened
4/5/2012	2:40:15 PM	Bubbler valve opened
4/5/2012	2:40:15 PM	Helium MFC set to  500.000000
4/5/2012	2:40:15 PM	H2 MFC set to  0.000000
4/5/2012	2:40:15 PM	BCl3 MFC set to  0.000000
4/5/2012	2:40:15 PM	PH3 MFC set to  0.000000
4/5/2012	2:40:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:40:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:40:15 PM	Tube furnace set to 750
4/5/2012	2:42:15 PM	H2 valve closed
4/5/2012	2:42:15 PM	BCl3 valve closed
4/5/2012	2:42:15 PM	PH3 valve closed
4/5/2012	2:42:15 PM	SiCl4 pre valve closed
4/5/2012	2:42:15 PM	SiCl4 post valve closed
4/5/2012	2:42:15 PM	Main Vac valve closed
4/5/2012	2:42:15 PM	Bypass valve closed
4/5/2012	2:42:15 PM	Helium valve opened
4/5/2012	2:42:15 PM	Bubbler valve opened
4/5/2012	2:42:15 PM	Helium MFC set to  500.000000
4/5/2012	2:42:15 PM	H2 MFC set to  0.000000
4/5/2012	2:42:15 PM	BCl3 MFC set to  0.000000
4/5/2012	2:42:15 PM	PH3 MFC set to  0.000000
4/5/2012	2:42:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	2:42:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	2:42:15 PM	Tube furnace set to 0
4/5/2012	3:02:15 PM	Helium valve closed
4/5/2012	3:02:15 PM	H2 valve closed
4/5/2012	3:02:15 PM	BCl3 valve closed
4/5/2012	3:02:15 PM	PH3 valve closed
4/5/2012	3:02:15 PM	SiCl4 pre valve closed
4/5/2012	3:02:15 PM	SiCl4 post valve closed
4/5/2012	3:02:15 PM	Main Vac valve closed
4/5/2012	3:02:15 PM	Bypass valve closed
4/5/2012	3:02:15 PM	Bubbler valve closed
4/5/2012	3:02:15 PM	Helium MFC set to  0.000000
4/5/2012	3:02:15 PM	H2 MFC set to  0.000000
4/5/2012	3:02:15 PM	BCl3 MFC set to  0.000000
4/5/2012	3:02:15 PM	PH3 MFC set to  0.000000
4/5/2012	3:02:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:02:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:02:15 PM	Tube furnace set to 0
4/5/2012	3:02:16 PM	Run finished at 3:02 PM
4/5/2012	3:46:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	3:46:05 PM	Recipe started at 3:46 PM
4/5/2012	3:46:05 PM	Helium valve closed
4/5/2012	3:46:05 PM	H2 valve closed
4/5/2012	3:46:05 PM	BCl3 valve closed
4/5/2012	3:46:05 PM	PH3 valve closed
4/5/2012	3:46:05 PM	SiCl4 pre valve closed
4/5/2012	3:46:05 PM	SiCl4 post valve closed
4/5/2012	3:46:05 PM	Main Vac valve closed
4/5/2012	3:46:05 PM	Bypass valve closed
4/5/2012	3:46:05 PM	Bubbler valve closed
4/5/2012	3:46:05 PM	Helium MFC set to  0.000000
4/5/2012	3:46:05 PM	H2 MFC set to  0.000000
4/5/2012	3:46:05 PM	BCl3 MFC set to  0.000000
4/5/2012	3:46:05 PM	PH3 MFC set to  0.000000
4/5/2012	3:46:05 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:46:05 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:46:05 PM	Tube furnace set to 0
4/5/2012	3:46:08 PM	H2 valve closed
4/5/2012	3:46:08 PM	BCl3 valve closed
4/5/2012	3:46:08 PM	PH3 valve closed
4/5/2012	3:46:08 PM	SiCl4 pre valve closed
4/5/2012	3:46:08 PM	SiCl4 post valve closed
4/5/2012	3:46:08 PM	Main Vac valve closed
4/5/2012	3:46:08 PM	Bypass valve closed
4/5/2012	3:46:08 PM	Bubbler valve closed
4/5/2012	3:46:08 PM	Helium valve opened
4/5/2012	3:46:08 PM	Helium MFC set to  500.000000
4/5/2012	3:46:08 PM	H2 MFC set to  0.000000
4/5/2012	3:46:08 PM	BCl3 MFC set to  0.000000
4/5/2012	3:46:08 PM	PH3 MFC set to  0.000000
4/5/2012	3:46:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:46:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:46:08 PM	Tube furnace set to 0
4/5/2012	3:46:16 PM	Helium valve closed
4/5/2012	3:46:16 PM	H2 valve closed
4/5/2012	3:46:16 PM	BCl3 valve closed
4/5/2012	3:46:16 PM	PH3 valve closed
4/5/2012	3:46:16 PM	SiCl4 pre valve closed
4/5/2012	3:46:16 PM	SiCl4 post valve closed
4/5/2012	3:46:16 PM	Main Vac valve closed
4/5/2012	3:46:16 PM	Bypass valve closed
4/5/2012	3:46:16 PM	Bubbler valve closed
4/5/2012	3:46:16 PM	Helium MFC set to  0.000000
4/5/2012	3:46:16 PM	H2 MFC set to  0.000000
4/5/2012	3:46:16 PM	BCl3 MFC set to  0.000000
4/5/2012	3:46:16 PM	PH3 MFC set to  0.000000
4/5/2012	3:46:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:46:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:46:16 PM	Tube furnace set to 0
4/5/2012	3:46:17 PM	Run finished at 3:46 PM
4/5/2012	3:46:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	3:48:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	3:48:25 PM	Recipe started at 3:48 PM
4/5/2012	3:48:25 PM	Helium valve closed
4/5/2012	3:48:25 PM	H2 valve closed
4/5/2012	3:48:25 PM	BCl3 valve closed
4/5/2012	3:48:25 PM	PH3 valve closed
4/5/2012	3:48:25 PM	SiCl4 pre valve closed
4/5/2012	3:48:25 PM	SiCl4 post valve closed
4/5/2012	3:48:25 PM	Main Vac valve closed
4/5/2012	3:48:25 PM	Bubbler valve closed
4/5/2012	3:48:25 PM	Bypass valve opened
4/5/2012	3:48:25 PM	Helium MFC set to  0.000000
4/5/2012	3:48:25 PM	H2 MFC set to  0.000000
4/5/2012	3:48:25 PM	BCl3 MFC set to  0.000000
4/5/2012	3:48:25 PM	PH3 MFC set to  0.000000
4/5/2012	3:48:25 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:48:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:48:26 PM	Tube furnace set to 0
4/5/2012	3:49:25 PM	Helium valve closed
4/5/2012	3:49:25 PM	H2 valve closed
4/5/2012	3:49:25 PM	BCl3 valve closed
4/5/2012	3:49:25 PM	PH3 valve closed
4/5/2012	3:49:25 PM	SiCl4 pre valve closed
4/5/2012	3:49:25 PM	SiCl4 post valve closed
4/5/2012	3:49:25 PM	Main Vac valve closed
4/5/2012	3:49:25 PM	Bubbler valve closed
4/5/2012	3:49:25 PM	Bypass valve opened
4/5/2012	3:49:25 PM	Helium MFC set to  0.000000
4/5/2012	3:49:25 PM	H2 MFC set to  0.000000
4/5/2012	3:49:25 PM	BCl3 MFC set to  0.000000
4/5/2012	3:49:25 PM	PH3 MFC set to  0.000000
4/5/2012	3:49:25 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:49:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:49:25 PM	Tube furnace set to 0
4/5/2012	3:50:25 PM	Helium valve closed
4/5/2012	3:50:25 PM	H2 valve closed
4/5/2012	3:50:25 PM	BCl3 valve closed
4/5/2012	3:50:25 PM	PH3 valve closed
4/5/2012	3:50:25 PM	SiCl4 pre valve closed
4/5/2012	3:50:25 PM	SiCl4 post valve closed
4/5/2012	3:50:25 PM	Bypass valve closed
4/5/2012	3:50:25 PM	Bubbler valve closed
4/5/2012	3:50:25 PM	Main Vac valve opened
4/5/2012	3:50:25 PM	Helium MFC set to  0.000000
4/5/2012	3:50:25 PM	H2 MFC set to  0.000000
4/5/2012	3:50:25 PM	BCl3 MFC set to  0.000000
4/5/2012	3:50:25 PM	PH3 MFC set to  0.000000
4/5/2012	3:50:25 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:50:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:50:25 PM	Tube furnace set to 0
4/5/2012	3:50:26 PM	Run finished at 3:50 PM
4/5/2012	3:50:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	3:53:08 PM	Recipe started at 3:52 PM
4/5/2012	3:53:08 PM	Helium valve closed
4/5/2012	3:53:08 PM	H2 valve closed
4/5/2012	3:53:08 PM	BCl3 valve closed
4/5/2012	3:53:09 PM	PH3 valve closed
4/5/2012	3:53:09 PM	SiCl4 pre valve closed
4/5/2012	3:53:09 PM	SiCl4 post valve closed
4/5/2012	3:53:09 PM	Bypass valve closed
4/5/2012	3:53:09 PM	Bubbler valve closed
4/5/2012	3:53:09 PM	Main Vac valve opened
4/5/2012	3:53:09 PM	Helium MFC set to  0.000000
4/5/2012	3:53:09 PM	H2 MFC set to  0.000000
4/5/2012	3:53:09 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:09 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:09 PM	Tube furnace set to 0
4/5/2012	3:53:11 PM	H2 valve closed
4/5/2012	3:53:11 PM	BCl3 valve closed
4/5/2012	3:53:11 PM	PH3 valve closed
4/5/2012	3:53:11 PM	SiCl4 pre valve closed
4/5/2012	3:53:11 PM	SiCl4 post valve closed
4/5/2012	3:53:11 PM	Bypass valve closed
4/5/2012	3:53:11 PM	Bubbler valve closed
4/5/2012	3:53:11 PM	Helium valve opened
4/5/2012	3:53:11 PM	Main Vac valve opened
4/5/2012	3:53:11 PM	Helium MFC set to  20.000000
4/5/2012	3:53:11 PM	H2 MFC set to  0.000000
4/5/2012	3:53:11 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:11 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:11 PM	Tube furnace set to 0
4/5/2012	3:53:12 PM	Helium valve closed
4/5/2012	3:53:12 PM	H2 valve closed
4/5/2012	3:53:12 PM	BCl3 valve closed
4/5/2012	3:53:12 PM	PH3 valve closed
4/5/2012	3:53:12 PM	SiCl4 pre valve closed
4/5/2012	3:53:12 PM	SiCl4 post valve closed
4/5/2012	3:53:12 PM	Bypass valve closed
4/5/2012	3:53:12 PM	Bubbler valve closed
4/5/2012	3:53:12 PM	Main Vac valve opened
4/5/2012	3:53:12 PM	Helium MFC set to  0.000000
4/5/2012	3:53:12 PM	H2 MFC set to  0.000000
4/5/2012	3:53:12 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:12 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:12 PM	Tube furnace set to 0
4/5/2012	3:53:12 PM	H2 valve closed
4/5/2012	3:53:12 PM	BCl3 valve closed
4/5/2012	3:53:12 PM	PH3 valve closed
4/5/2012	3:53:12 PM	SiCl4 pre valve closed
4/5/2012	3:53:12 PM	SiCl4 post valve closed
4/5/2012	3:53:12 PM	Bypass valve closed
4/5/2012	3:53:12 PM	Bubbler valve closed
4/5/2012	3:53:12 PM	Helium valve opened
4/5/2012	3:53:12 PM	Main Vac valve opened
4/5/2012	3:53:12 PM	Helium MFC set to  20.000000
4/5/2012	3:53:12 PM	H2 MFC set to  0.000000
4/5/2012	3:53:12 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:12 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:13 PM	Tube furnace set to 0
4/5/2012	3:53:13 PM	Helium valve closed
4/5/2012	3:53:13 PM	H2 valve closed
4/5/2012	3:53:13 PM	BCl3 valve closed
4/5/2012	3:53:13 PM	PH3 valve closed
4/5/2012	3:53:13 PM	SiCl4 pre valve closed
4/5/2012	3:53:13 PM	SiCl4 post valve closed
4/5/2012	3:53:13 PM	Bypass valve closed
4/5/2012	3:53:13 PM	Bubbler valve closed
4/5/2012	3:53:13 PM	Main Vac valve opened
4/5/2012	3:53:13 PM	Helium MFC set to  0.000000
4/5/2012	3:53:13 PM	H2 MFC set to  0.000000
4/5/2012	3:53:13 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:13 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:13 PM	Tube furnace set to 0
4/5/2012	3:53:14 PM	H2 valve closed
4/5/2012	3:53:14 PM	BCl3 valve closed
4/5/2012	3:53:14 PM	PH3 valve closed
4/5/2012	3:53:14 PM	SiCl4 pre valve closed
4/5/2012	3:53:14 PM	SiCl4 post valve closed
4/5/2012	3:53:14 PM	Bypass valve closed
4/5/2012	3:53:14 PM	Bubbler valve closed
4/5/2012	3:53:14 PM	Helium valve opened
4/5/2012	3:53:14 PM	Main Vac valve opened
4/5/2012	3:53:14 PM	Helium MFC set to  20.000000
4/5/2012	3:53:14 PM	H2 MFC set to  0.000000
4/5/2012	3:53:14 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:14 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:14 PM	Tube furnace set to 0
4/5/2012	3:53:14 PM	Helium valve closed
4/5/2012	3:53:14 PM	H2 valve closed
4/5/2012	3:53:14 PM	BCl3 valve closed
4/5/2012	3:53:14 PM	PH3 valve closed
4/5/2012	3:53:14 PM	SiCl4 pre valve closed
4/5/2012	3:53:14 PM	SiCl4 post valve closed
4/5/2012	3:53:14 PM	Bypass valve closed
4/5/2012	3:53:14 PM	Bubbler valve closed
4/5/2012	3:53:14 PM	Main Vac valve opened
4/5/2012	3:53:14 PM	Helium MFC set to  0.000000
4/5/2012	3:53:14 PM	H2 MFC set to  0.000000
4/5/2012	3:53:14 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:14 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:15 PM	Tube furnace set to 0
4/5/2012	3:53:15 PM	H2 valve closed
4/5/2012	3:53:15 PM	BCl3 valve closed
4/5/2012	3:53:15 PM	PH3 valve closed
4/5/2012	3:53:15 PM	SiCl4 pre valve closed
4/5/2012	3:53:15 PM	SiCl4 post valve closed
4/5/2012	3:53:15 PM	Bypass valve closed
4/5/2012	3:53:15 PM	Bubbler valve closed
4/5/2012	3:53:15 PM	Helium valve opened
4/5/2012	3:53:15 PM	Main Vac valve opened
4/5/2012	3:53:15 PM	Helium MFC set to  20.000000
4/5/2012	3:53:15 PM	H2 MFC set to  0.000000
4/5/2012	3:53:15 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:15 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:15 PM	Tube furnace set to 0
4/5/2012	3:53:16 PM	Helium valve closed
4/5/2012	3:53:16 PM	H2 valve closed
4/5/2012	3:53:16 PM	BCl3 valve closed
4/5/2012	3:53:16 PM	PH3 valve closed
4/5/2012	3:53:16 PM	SiCl4 pre valve closed
4/5/2012	3:53:16 PM	SiCl4 post valve closed
4/5/2012	3:53:16 PM	Bypass valve closed
4/5/2012	3:53:16 PM	Bubbler valve closed
4/5/2012	3:53:16 PM	Main Vac valve opened
4/5/2012	3:53:16 PM	Helium MFC set to  0.000000
4/5/2012	3:53:16 PM	H2 MFC set to  0.000000
4/5/2012	3:53:16 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:16 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:16 PM	Tube furnace set to 0
4/5/2012	3:53:16 PM	H2 valve closed
4/5/2012	3:53:16 PM	BCl3 valve closed
4/5/2012	3:53:16 PM	PH3 valve closed
4/5/2012	3:53:16 PM	SiCl4 pre valve closed
4/5/2012	3:53:16 PM	SiCl4 post valve closed
4/5/2012	3:53:16 PM	Bypass valve closed
4/5/2012	3:53:16 PM	Bubbler valve closed
4/5/2012	3:53:16 PM	Helium valve opened
4/5/2012	3:53:16 PM	Main Vac valve opened
4/5/2012	3:53:16 PM	Helium MFC set to  20.000000
4/5/2012	3:53:16 PM	H2 MFC set to  0.000000
4/5/2012	3:53:16 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:16 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:16 PM	Tube furnace set to 0
4/5/2012	3:53:17 PM	Helium valve closed
4/5/2012	3:53:17 PM	H2 valve closed
4/5/2012	3:53:17 PM	BCl3 valve closed
4/5/2012	3:53:17 PM	PH3 valve closed
4/5/2012	3:53:17 PM	SiCl4 pre valve closed
4/5/2012	3:53:17 PM	SiCl4 post valve closed
4/5/2012	3:53:17 PM	Bypass valve closed
4/5/2012	3:53:17 PM	Bubbler valve closed
4/5/2012	3:53:17 PM	Main Vac valve opened
4/5/2012	3:53:17 PM	Helium MFC set to  0.000000
4/5/2012	3:53:17 PM	H2 MFC set to  0.000000
4/5/2012	3:53:17 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:17 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:17 PM	Tube furnace set to 0
4/5/2012	3:53:17 PM	H2 valve closed
4/5/2012	3:53:17 PM	BCl3 valve closed
4/5/2012	3:53:17 PM	PH3 valve closed
4/5/2012	3:53:17 PM	SiCl4 pre valve closed
4/5/2012	3:53:17 PM	SiCl4 post valve closed
4/5/2012	3:53:17 PM	Bypass valve closed
4/5/2012	3:53:17 PM	Bubbler valve closed
4/5/2012	3:53:17 PM	Helium valve opened
4/5/2012	3:53:17 PM	Main Vac valve opened
4/5/2012	3:53:17 PM	Helium MFC set to  20.000000
4/5/2012	3:53:17 PM	H2 MFC set to  0.000000
4/5/2012	3:53:17 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:17 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:17 PM	Tube furnace set to 0
4/5/2012	3:53:18 PM	Helium valve closed
4/5/2012	3:53:18 PM	H2 valve closed
4/5/2012	3:53:18 PM	BCl3 valve closed
4/5/2012	3:53:18 PM	PH3 valve closed
4/5/2012	3:53:18 PM	SiCl4 pre valve closed
4/5/2012	3:53:18 PM	SiCl4 post valve closed
4/5/2012	3:53:18 PM	Bypass valve closed
4/5/2012	3:53:18 PM	Bubbler valve closed
4/5/2012	3:53:18 PM	Main Vac valve opened
4/5/2012	3:53:18 PM	Helium MFC set to  0.000000
4/5/2012	3:53:18 PM	H2 MFC set to  0.000000
4/5/2012	3:53:18 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:18 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:18 PM	Tube furnace set to 0
4/5/2012	3:53:18 PM	H2 valve closed
4/5/2012	3:53:18 PM	BCl3 valve closed
4/5/2012	3:53:18 PM	PH3 valve closed
4/5/2012	3:53:18 PM	SiCl4 pre valve closed
4/5/2012	3:53:18 PM	SiCl4 post valve closed
4/5/2012	3:53:18 PM	Bypass valve closed
4/5/2012	3:53:18 PM	Bubbler valve closed
4/5/2012	3:53:18 PM	Helium valve opened
4/5/2012	3:53:18 PM	Main Vac valve opened
4/5/2012	3:53:18 PM	Helium MFC set to  20.000000
4/5/2012	3:53:18 PM	H2 MFC set to  0.000000
4/5/2012	3:53:18 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:18 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:18 PM	Tube furnace set to 0
4/5/2012	3:53:19 PM	Helium valve closed
4/5/2012	3:53:19 PM	H2 valve closed
4/5/2012	3:53:19 PM	BCl3 valve closed
4/5/2012	3:53:19 PM	PH3 valve closed
4/5/2012	3:53:19 PM	SiCl4 pre valve closed
4/5/2012	3:53:19 PM	SiCl4 post valve closed
4/5/2012	3:53:19 PM	Bypass valve closed
4/5/2012	3:53:19 PM	Bubbler valve closed
4/5/2012	3:53:19 PM	Main Vac valve opened
4/5/2012	3:53:19 PM	Helium MFC set to  0.000000
4/5/2012	3:53:19 PM	H2 MFC set to  0.000000
4/5/2012	3:53:19 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:19 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:19 PM	Tube furnace set to 0
4/5/2012	3:53:19 PM	H2 valve closed
4/5/2012	3:53:19 PM	BCl3 valve closed
4/5/2012	3:53:19 PM	PH3 valve closed
4/5/2012	3:53:19 PM	SiCl4 pre valve closed
4/5/2012	3:53:19 PM	SiCl4 post valve closed
4/5/2012	3:53:19 PM	Bypass valve closed
4/5/2012	3:53:19 PM	Bubbler valve closed
4/5/2012	3:53:19 PM	Helium valve opened
4/5/2012	3:53:19 PM	Main Vac valve opened
4/5/2012	3:53:19 PM	Helium MFC set to  20.000000
4/5/2012	3:53:19 PM	H2 MFC set to  0.000000
4/5/2012	3:53:19 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:19 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:19 PM	Tube furnace set to 0
4/5/2012	3:53:21 PM	Helium valve closed
4/5/2012	3:53:22 PM	H2 valve closed
4/5/2012	3:53:22 PM	BCl3 valve closed
4/5/2012	3:53:22 PM	PH3 valve closed
4/5/2012	3:53:22 PM	SiCl4 pre valve closed
4/5/2012	3:53:22 PM	SiCl4 post valve closed
4/5/2012	3:53:22 PM	Bypass valve closed
4/5/2012	3:53:22 PM	Bubbler valve closed
4/5/2012	3:53:22 PM	Main Vac valve opened
4/5/2012	3:53:22 PM	Helium MFC set to  0.000000
4/5/2012	3:53:22 PM	H2 MFC set to  0.000000
4/5/2012	3:53:22 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:22 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:22 PM	Tube furnace set to 0
4/5/2012	3:53:22 PM	H2 valve closed
4/5/2012	3:53:22 PM	BCl3 valve closed
4/5/2012	3:53:22 PM	PH3 valve closed
4/5/2012	3:53:22 PM	SiCl4 pre valve closed
4/5/2012	3:53:22 PM	SiCl4 post valve closed
4/5/2012	3:53:22 PM	Bypass valve closed
4/5/2012	3:53:22 PM	Bubbler valve closed
4/5/2012	3:53:22 PM	Helium valve opened
4/5/2012	3:53:22 PM	Main Vac valve opened
4/5/2012	3:53:22 PM	Helium MFC set to  20.000000
4/5/2012	3:53:22 PM	H2 MFC set to  0.000000
4/5/2012	3:53:22 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:22 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:22 PM	Tube furnace set to 0
4/5/2012	3:53:52 PM	Helium valve closed
4/5/2012	3:53:52 PM	H2 valve closed
4/5/2012	3:53:52 PM	BCl3 valve closed
4/5/2012	3:53:52 PM	PH3 valve closed
4/5/2012	3:53:52 PM	SiCl4 pre valve closed
4/5/2012	3:53:52 PM	SiCl4 post valve closed
4/5/2012	3:53:52 PM	Bypass valve closed
4/5/2012	3:53:52 PM	Bubbler valve closed
4/5/2012	3:53:53 PM	Main Vac valve opened
4/5/2012	3:53:53 PM	Helium MFC set to  0.000000
4/5/2012	3:53:53 PM	H2 MFC set to  0.000000
4/5/2012	3:53:53 PM	BCl3 MFC set to  0.000000
4/5/2012	3:53:53 PM	PH3 MFC set to  0.000000
4/5/2012	3:53:53 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:53:53 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:53:53 PM	Tube furnace set to 200
4/5/2012	3:54:23 PM	H2 valve closed
4/5/2012	3:54:23 PM	BCl3 valve closed
4/5/2012	3:54:23 PM	PH3 valve closed
4/5/2012	3:54:23 PM	SiCl4 pre valve closed
4/5/2012	3:54:23 PM	SiCl4 post valve closed
4/5/2012	3:54:23 PM	Bypass valve closed
4/5/2012	3:54:23 PM	Bubbler valve closed
4/5/2012	3:54:23 PM	Helium valve opened
4/5/2012	3:54:23 PM	Main Vac valve opened
4/5/2012	3:54:23 PM	Helium MFC set to  20.000000
4/5/2012	3:54:23 PM	H2 MFC set to  0.000000
4/5/2012	3:54:23 PM	BCl3 MFC set to  0.000000
4/5/2012	3:54:23 PM	PH3 MFC set to  0.000000
4/5/2012	3:54:23 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:54:23 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:54:23 PM	Tube furnace set to 200
4/5/2012	3:54:53 PM	Helium valve closed
4/5/2012	3:54:53 PM	H2 valve closed
4/5/2012	3:54:53 PM	BCl3 valve closed
4/5/2012	3:54:53 PM	PH3 valve closed
4/5/2012	3:54:53 PM	SiCl4 pre valve closed
4/5/2012	3:54:53 PM	SiCl4 post valve closed
4/5/2012	3:54:53 PM	Bypass valve closed
4/5/2012	3:54:53 PM	Bubbler valve closed
4/5/2012	3:54:53 PM	Main Vac valve opened
4/5/2012	3:54:53 PM	Helium MFC set to  0.000000
4/5/2012	3:54:53 PM	H2 MFC set to  0.000000
4/5/2012	3:54:53 PM	BCl3 MFC set to  0.000000
4/5/2012	3:54:53 PM	PH3 MFC set to  0.000000
4/5/2012	3:54:53 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:54:53 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:54:53 PM	Tube furnace set to 200
4/5/2012	3:55:23 PM	H2 valve closed
4/5/2012	3:55:23 PM	BCl3 valve closed
4/5/2012	3:55:23 PM	PH3 valve closed
4/5/2012	3:55:23 PM	SiCl4 pre valve closed
4/5/2012	3:55:23 PM	SiCl4 post valve closed
4/5/2012	3:55:23 PM	Bypass valve closed
4/5/2012	3:55:23 PM	Bubbler valve closed
4/5/2012	3:55:23 PM	Helium valve opened
4/5/2012	3:55:23 PM	Main Vac valve opened
4/5/2012	3:55:23 PM	Helium MFC set to  20.000000
4/5/2012	3:55:23 PM	H2 MFC set to  0.000000
4/5/2012	3:55:23 PM	BCl3 MFC set to  0.000000
4/5/2012	3:55:23 PM	PH3 MFC set to  0.000000
4/5/2012	3:55:23 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:55:23 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:55:23 PM	Tube furnace set to 200
4/5/2012	3:55:53 PM	Helium valve closed
4/5/2012	3:55:53 PM	H2 valve closed
4/5/2012	3:55:53 PM	BCl3 valve closed
4/5/2012	3:55:53 PM	PH3 valve closed
4/5/2012	3:55:53 PM	SiCl4 pre valve closed
4/5/2012	3:55:53 PM	SiCl4 post valve closed
4/5/2012	3:55:53 PM	Bypass valve closed
4/5/2012	3:55:53 PM	Bubbler valve closed
4/5/2012	3:55:53 PM	Main Vac valve opened
4/5/2012	3:55:53 PM	Helium MFC set to  0.000000
4/5/2012	3:55:53 PM	H2 MFC set to  0.000000
4/5/2012	3:55:53 PM	BCl3 MFC set to  0.000000
4/5/2012	3:55:53 PM	PH3 MFC set to  0.000000
4/5/2012	3:55:53 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:55:53 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:55:54 PM	Tube furnace set to 200
4/5/2012	3:56:10 PM	H2 valve closed
4/5/2012	3:56:10 PM	BCl3 valve closed
4/5/2012	3:56:10 PM	PH3 valve closed
4/5/2012	3:56:10 PM	SiCl4 pre valve closed
4/5/2012	3:56:10 PM	SiCl4 post valve closed
4/5/2012	3:56:10 PM	Bypass valve closed
4/5/2012	3:56:10 PM	Bubbler valve closed
4/5/2012	3:56:10 PM	Helium valve opened
4/5/2012	3:56:10 PM	Main Vac valve opened
4/5/2012	3:56:10 PM	Helium MFC set to  20.000000
4/5/2012	3:56:10 PM	H2 MFC set to  0.000000
4/5/2012	3:56:10 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:10 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:10 PM	Tube furnace set to 200
4/5/2012	3:56:16 PM	Helium valve closed
4/5/2012	3:56:16 PM	H2 valve closed
4/5/2012	3:56:16 PM	BCl3 valve closed
4/5/2012	3:56:16 PM	PH3 valve closed
4/5/2012	3:56:16 PM	SiCl4 pre valve closed
4/5/2012	3:56:16 PM	SiCl4 post valve closed
4/5/2012	3:56:16 PM	Bypass valve closed
4/5/2012	3:56:16 PM	Bubbler valve closed
4/5/2012	3:56:16 PM	Main Vac valve opened
4/5/2012	3:56:16 PM	Helium MFC set to  0.000000
4/5/2012	3:56:16 PM	H2 MFC set to  0.000000
4/5/2012	3:56:16 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:16 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:16 PM	Tube furnace set to 200
4/5/2012	3:56:17 PM	H2 valve closed
4/5/2012	3:56:17 PM	BCl3 valve closed
4/5/2012	3:56:17 PM	PH3 valve closed
4/5/2012	3:56:17 PM	SiCl4 pre valve closed
4/5/2012	3:56:17 PM	SiCl4 post valve closed
4/5/2012	3:56:17 PM	Bypass valve closed
4/5/2012	3:56:17 PM	Bubbler valve closed
4/5/2012	3:56:17 PM	Helium valve opened
4/5/2012	3:56:17 PM	Main Vac valve opened
4/5/2012	3:56:17 PM	Helium MFC set to  20.000000
4/5/2012	3:56:17 PM	H2 MFC set to  0.000000
4/5/2012	3:56:17 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:17 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:17 PM	Tube furnace set to 200
4/5/2012	3:56:17 PM	Helium valve closed
4/5/2012	3:56:17 PM	H2 valve closed
4/5/2012	3:56:17 PM	BCl3 valve closed
4/5/2012	3:56:17 PM	PH3 valve closed
4/5/2012	3:56:17 PM	SiCl4 pre valve closed
4/5/2012	3:56:17 PM	SiCl4 post valve closed
4/5/2012	3:56:17 PM	Bypass valve closed
4/5/2012	3:56:17 PM	Bubbler valve closed
4/5/2012	3:56:17 PM	Main Vac valve opened
4/5/2012	3:56:17 PM	Helium MFC set to  0.000000
4/5/2012	3:56:17 PM	H2 MFC set to  0.000000
4/5/2012	3:56:17 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:17 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:18 PM	Tube furnace set to 200
4/5/2012	3:56:18 PM	H2 valve closed
4/5/2012	3:56:18 PM	BCl3 valve closed
4/5/2012	3:56:18 PM	PH3 valve closed
4/5/2012	3:56:18 PM	SiCl4 pre valve closed
4/5/2012	3:56:18 PM	SiCl4 post valve closed
4/5/2012	3:56:18 PM	Bypass valve closed
4/5/2012	3:56:18 PM	Bubbler valve closed
4/5/2012	3:56:18 PM	Helium valve opened
4/5/2012	3:56:18 PM	Main Vac valve opened
4/5/2012	3:56:18 PM	Helium MFC set to  20.000000
4/5/2012	3:56:18 PM	H2 MFC set to  0.000000
4/5/2012	3:56:18 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:18 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:18 PM	Tube furnace set to 200
4/5/2012	3:56:19 PM	Helium valve closed
4/5/2012	3:56:19 PM	H2 valve closed
4/5/2012	3:56:19 PM	BCl3 valve closed
4/5/2012	3:56:19 PM	PH3 valve closed
4/5/2012	3:56:19 PM	SiCl4 pre valve closed
4/5/2012	3:56:19 PM	SiCl4 post valve closed
4/5/2012	3:56:19 PM	Bypass valve closed
4/5/2012	3:56:19 PM	Bubbler valve closed
4/5/2012	3:56:19 PM	Main Vac valve opened
4/5/2012	3:56:19 PM	Helium MFC set to  0.000000
4/5/2012	3:56:19 PM	H2 MFC set to  0.000000
4/5/2012	3:56:19 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:19 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:19 PM	Tube furnace set to 200
4/5/2012	3:56:19 PM	H2 valve closed
4/5/2012	3:56:19 PM	BCl3 valve closed
4/5/2012	3:56:19 PM	PH3 valve closed
4/5/2012	3:56:19 PM	SiCl4 pre valve closed
4/5/2012	3:56:19 PM	SiCl4 post valve closed
4/5/2012	3:56:19 PM	Bypass valve closed
4/5/2012	3:56:19 PM	Bubbler valve closed
4/5/2012	3:56:19 PM	Helium valve opened
4/5/2012	3:56:19 PM	Main Vac valve opened
4/5/2012	3:56:19 PM	Helium MFC set to  20.000000
4/5/2012	3:56:19 PM	H2 MFC set to  0.000000
4/5/2012	3:56:19 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:19 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:20 PM	Tube furnace set to 200
4/5/2012	3:56:22 PM	Helium valve closed
4/5/2012	3:56:22 PM	H2 valve closed
4/5/2012	3:56:22 PM	BCl3 valve closed
4/5/2012	3:56:22 PM	PH3 valve closed
4/5/2012	3:56:22 PM	SiCl4 pre valve closed
4/5/2012	3:56:22 PM	SiCl4 post valve closed
4/5/2012	3:56:22 PM	Bypass valve closed
4/5/2012	3:56:22 PM	Bubbler valve closed
4/5/2012	3:56:22 PM	Main Vac valve opened
4/5/2012	3:56:22 PM	Helium MFC set to  0.000000
4/5/2012	3:56:22 PM	H2 MFC set to  0.000000
4/5/2012	3:56:22 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:22 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:22 PM	Tube furnace set to 0
4/5/2012	3:56:23 PM	Run finished at 3:56 PM
4/5/2012	3:56:35 PM	Recipe started at 3:56 PM
4/5/2012	3:56:35 PM	Helium valve closed
4/5/2012	3:56:35 PM	H2 valve closed
4/5/2012	3:56:35 PM	BCl3 valve closed
4/5/2012	3:56:35 PM	PH3 valve closed
4/5/2012	3:56:35 PM	SiCl4 pre valve closed
4/5/2012	3:56:35 PM	SiCl4 post valve closed
4/5/2012	3:56:35 PM	Bypass valve closed
4/5/2012	3:56:35 PM	Bubbler valve closed
4/5/2012	3:56:35 PM	Main Vac valve opened
4/5/2012	3:56:35 PM	Helium MFC set to  0.000000
4/5/2012	3:56:35 PM	H2 MFC set to  0.000000
4/5/2012	3:56:35 PM	BCl3 MFC set to  0.000000
4/5/2012	3:56:35 PM	PH3 MFC set to  0.000000
4/5/2012	3:56:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:56:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:56:35 PM	Tube furnace set to 0
4/5/2012	3:57:05 PM	H2 valve closed
4/5/2012	3:57:05 PM	BCl3 valve closed
4/5/2012	3:57:05 PM	PH3 valve closed
4/5/2012	3:57:05 PM	SiCl4 pre valve closed
4/5/2012	3:57:05 PM	SiCl4 post valve closed
4/5/2012	3:57:05 PM	Bypass valve closed
4/5/2012	3:57:05 PM	Bubbler valve closed
4/5/2012	3:57:05 PM	Helium valve opened
4/5/2012	3:57:05 PM	Main Vac valve opened
4/5/2012	3:57:05 PM	Helium MFC set to  20.000000
4/5/2012	3:57:05 PM	H2 MFC set to  0.000000
4/5/2012	3:57:05 PM	BCl3 MFC set to  0.000000
4/5/2012	3:57:05 PM	PH3 MFC set to  0.000000
4/5/2012	3:57:05 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:57:05 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:57:06 PM	Tube furnace set to 0
4/5/2012	3:57:36 PM	Helium valve closed
4/5/2012	3:57:36 PM	H2 valve closed
4/5/2012	3:57:36 PM	BCl3 valve closed
4/5/2012	3:57:36 PM	PH3 valve closed
4/5/2012	3:57:36 PM	SiCl4 pre valve closed
4/5/2012	3:57:36 PM	SiCl4 post valve closed
4/5/2012	3:57:36 PM	Bypass valve closed
4/5/2012	3:57:36 PM	Bubbler valve closed
4/5/2012	3:57:36 PM	Main Vac valve opened
4/5/2012	3:57:36 PM	Helium MFC set to  0.000000
4/5/2012	3:57:36 PM	H2 MFC set to  0.000000
4/5/2012	3:57:36 PM	BCl3 MFC set to  0.000000
4/5/2012	3:57:36 PM	PH3 MFC set to  0.000000
4/5/2012	3:57:36 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:57:36 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:57:36 PM	Tube furnace set to 0
4/5/2012	3:58:06 PM	H2 valve closed
4/5/2012	3:58:06 PM	BCl3 valve closed
4/5/2012	3:58:06 PM	PH3 valve closed
4/5/2012	3:58:06 PM	SiCl4 pre valve closed
4/5/2012	3:58:06 PM	SiCl4 post valve closed
4/5/2012	3:58:06 PM	Bypass valve closed
4/5/2012	3:58:06 PM	Bubbler valve closed
4/5/2012	3:58:06 PM	Helium valve opened
4/5/2012	3:58:06 PM	Main Vac valve opened
4/5/2012	3:58:06 PM	Helium MFC set to  20.000000
4/5/2012	3:58:06 PM	H2 MFC set to  0.000000
4/5/2012	3:58:06 PM	BCl3 MFC set to  0.000000
4/5/2012	3:58:06 PM	PH3 MFC set to  0.000000
4/5/2012	3:58:06 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:58:06 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:58:06 PM	Tube furnace set to 0
4/5/2012	3:58:36 PM	Helium valve closed
4/5/2012	3:58:36 PM	H2 valve closed
4/5/2012	3:58:36 PM	BCl3 valve closed
4/5/2012	3:58:36 PM	PH3 valve closed
4/5/2012	3:58:36 PM	SiCl4 pre valve closed
4/5/2012	3:58:36 PM	SiCl4 post valve closed
4/5/2012	3:58:36 PM	Bypass valve closed
4/5/2012	3:58:36 PM	Bubbler valve closed
4/5/2012	3:58:36 PM	Main Vac valve opened
4/5/2012	3:58:36 PM	Helium MFC set to  0.000000
4/5/2012	3:58:36 PM	H2 MFC set to  0.000000
4/5/2012	3:58:36 PM	BCl3 MFC set to  0.000000
4/5/2012	3:58:36 PM	PH3 MFC set to  0.000000
4/5/2012	3:58:36 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:58:36 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:58:36 PM	Tube furnace set to 0
4/5/2012	3:59:06 PM	H2 valve closed
4/5/2012	3:59:06 PM	BCl3 valve closed
4/5/2012	3:59:06 PM	PH3 valve closed
4/5/2012	3:59:06 PM	SiCl4 pre valve closed
4/5/2012	3:59:06 PM	SiCl4 post valve closed
4/5/2012	3:59:06 PM	Bypass valve closed
4/5/2012	3:59:06 PM	Bubbler valve closed
4/5/2012	3:59:06 PM	Helium valve opened
4/5/2012	3:59:06 PM	Main Vac valve opened
4/5/2012	3:59:06 PM	Helium MFC set to  20.000000
4/5/2012	3:59:06 PM	H2 MFC set to  0.000000
4/5/2012	3:59:06 PM	BCl3 MFC set to  0.000000
4/5/2012	3:59:06 PM	PH3 MFC set to  0.000000
4/5/2012	3:59:06 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:59:06 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:59:07 PM	Tube furnace set to 0
4/5/2012	3:59:37 PM	Helium valve closed
4/5/2012	3:59:37 PM	H2 valve closed
4/5/2012	3:59:37 PM	BCl3 valve closed
4/5/2012	3:59:37 PM	PH3 valve closed
4/5/2012	3:59:37 PM	SiCl4 pre valve closed
4/5/2012	3:59:37 PM	SiCl4 post valve closed
4/5/2012	3:59:37 PM	Bypass valve closed
4/5/2012	3:59:37 PM	Bubbler valve closed
4/5/2012	3:59:37 PM	Main Vac valve opened
4/5/2012	3:59:37 PM	Helium MFC set to  0.000000
4/5/2012	3:59:37 PM	H2 MFC set to  0.000000
4/5/2012	3:59:37 PM	BCl3 MFC set to  0.000000
4/5/2012	3:59:37 PM	PH3 MFC set to  0.000000
4/5/2012	3:59:37 PM	SiCl4 MFC set to  0.000000
4/5/2012	3:59:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	3:59:37 PM	Tube furnace set to 0
4/5/2012	4:00:07 PM	H2 valve closed
4/5/2012	4:00:07 PM	BCl3 valve closed
4/5/2012	4:00:07 PM	PH3 valve closed
4/5/2012	4:00:07 PM	SiCl4 pre valve closed
4/5/2012	4:00:07 PM	SiCl4 post valve closed
4/5/2012	4:00:07 PM	Bypass valve closed
4/5/2012	4:00:07 PM	Bubbler valve closed
4/5/2012	4:00:07 PM	Helium valve opened
4/5/2012	4:00:07 PM	Main Vac valve opened
4/5/2012	4:00:07 PM	Helium MFC set to  20.000000
4/5/2012	4:00:07 PM	H2 MFC set to  0.000000
4/5/2012	4:00:07 PM	BCl3 MFC set to  0.000000
4/5/2012	4:00:07 PM	PH3 MFC set to  0.000000
4/5/2012	4:00:07 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:00:07 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:00:07 PM	Tube furnace set to 0
4/5/2012	4:00:37 PM	Helium valve closed
4/5/2012	4:00:37 PM	H2 valve closed
4/5/2012	4:00:37 PM	BCl3 valve closed
4/5/2012	4:00:37 PM	PH3 valve closed
4/5/2012	4:00:37 PM	SiCl4 pre valve closed
4/5/2012	4:00:37 PM	SiCl4 post valve closed
4/5/2012	4:00:37 PM	Bypass valve closed
4/5/2012	4:00:37 PM	Bubbler valve closed
4/5/2012	4:00:37 PM	Main Vac valve opened
4/5/2012	4:00:37 PM	Helium MFC set to  0.000000
4/5/2012	4:00:37 PM	H2 MFC set to  0.000000
4/5/2012	4:00:37 PM	BCl3 MFC set to  0.000000
4/5/2012	4:00:37 PM	PH3 MFC set to  0.000000
4/5/2012	4:00:37 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:00:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:00:37 PM	Tube furnace set to 0
4/5/2012	4:01:07 PM	H2 valve closed
4/5/2012	4:01:07 PM	BCl3 valve closed
4/5/2012	4:01:07 PM	PH3 valve closed
4/5/2012	4:01:07 PM	SiCl4 pre valve closed
4/5/2012	4:01:07 PM	SiCl4 post valve closed
4/5/2012	4:01:07 PM	Bypass valve closed
4/5/2012	4:01:07 PM	Bubbler valve closed
4/5/2012	4:01:07 PM	Helium valve opened
4/5/2012	4:01:07 PM	Main Vac valve opened
4/5/2012	4:01:07 PM	Helium MFC set to  20.000000
4/5/2012	4:01:07 PM	H2 MFC set to  0.000000
4/5/2012	4:01:07 PM	BCl3 MFC set to  0.000000
4/5/2012	4:01:07 PM	PH3 MFC set to  0.000000
4/5/2012	4:01:07 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:01:07 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:01:08 PM	Tube furnace set to 0
4/5/2012	4:01:38 PM	Helium valve closed
4/5/2012	4:01:38 PM	H2 valve closed
4/5/2012	4:01:38 PM	BCl3 valve closed
4/5/2012	4:01:38 PM	PH3 valve closed
4/5/2012	4:01:38 PM	SiCl4 pre valve closed
4/5/2012	4:01:38 PM	SiCl4 post valve closed
4/5/2012	4:01:38 PM	Bypass valve closed
4/5/2012	4:01:38 PM	Bubbler valve closed
4/5/2012	4:01:38 PM	Main Vac valve opened
4/5/2012	4:01:38 PM	Helium MFC set to  0.000000
4/5/2012	4:01:38 PM	H2 MFC set to  0.000000
4/5/2012	4:01:38 PM	BCl3 MFC set to  0.000000
4/5/2012	4:01:38 PM	PH3 MFC set to  0.000000
4/5/2012	4:01:38 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:01:38 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:01:38 PM	Tube furnace set to 0
4/5/2012	4:02:08 PM	H2 valve closed
4/5/2012	4:02:08 PM	BCl3 valve closed
4/5/2012	4:02:08 PM	PH3 valve closed
4/5/2012	4:02:08 PM	SiCl4 pre valve closed
4/5/2012	4:02:08 PM	SiCl4 post valve closed
4/5/2012	4:02:08 PM	Bypass valve closed
4/5/2012	4:02:08 PM	Bubbler valve closed
4/5/2012	4:02:08 PM	Helium valve opened
4/5/2012	4:02:08 PM	Main Vac valve opened
4/5/2012	4:02:08 PM	Helium MFC set to  20.000000
4/5/2012	4:02:08 PM	H2 MFC set to  0.000000
4/5/2012	4:02:08 PM	BCl3 MFC set to  0.000000
4/5/2012	4:02:08 PM	PH3 MFC set to  0.000000
4/5/2012	4:02:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:02:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:02:08 PM	Tube furnace set to 0
4/5/2012	4:02:38 PM	Helium valve closed
4/5/2012	4:02:38 PM	H2 valve closed
4/5/2012	4:02:38 PM	BCl3 valve closed
4/5/2012	4:02:38 PM	PH3 valve closed
4/5/2012	4:02:38 PM	SiCl4 pre valve closed
4/5/2012	4:02:38 PM	SiCl4 post valve closed
4/5/2012	4:02:38 PM	Bypass valve closed
4/5/2012	4:02:38 PM	Bubbler valve closed
4/5/2012	4:02:38 PM	Main Vac valve opened
4/5/2012	4:02:38 PM	Helium MFC set to  0.000000
4/5/2012	4:02:38 PM	H2 MFC set to  0.000000
4/5/2012	4:02:38 PM	BCl3 MFC set to  0.000000
4/5/2012	4:02:38 PM	PH3 MFC set to  0.000000
4/5/2012	4:02:38 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:02:38 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:02:38 PM	Tube furnace set to 0
4/5/2012	4:03:08 PM	H2 valve closed
4/5/2012	4:03:08 PM	BCl3 valve closed
4/5/2012	4:03:08 PM	PH3 valve closed
4/5/2012	4:03:08 PM	SiCl4 pre valve closed
4/5/2012	4:03:08 PM	SiCl4 post valve closed
4/5/2012	4:03:08 PM	Bypass valve closed
4/5/2012	4:03:08 PM	Bubbler valve closed
4/5/2012	4:03:08 PM	Helium valve opened
4/5/2012	4:03:08 PM	Main Vac valve opened
4/5/2012	4:03:08 PM	Helium MFC set to  20.000000
4/5/2012	4:03:08 PM	H2 MFC set to  0.000000
4/5/2012	4:03:08 PM	BCl3 MFC set to  0.000000
4/5/2012	4:03:08 PM	PH3 MFC set to  0.000000
4/5/2012	4:03:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:03:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:03:08 PM	Tube furnace set to 0
4/5/2012	4:03:38 PM	Helium valve closed
4/5/2012	4:03:38 PM	H2 valve closed
4/5/2012	4:03:38 PM	BCl3 valve closed
4/5/2012	4:03:38 PM	PH3 valve closed
4/5/2012	4:03:38 PM	SiCl4 pre valve closed
4/5/2012	4:03:39 PM	SiCl4 post valve closed
4/5/2012	4:03:39 PM	Bypass valve closed
4/5/2012	4:03:39 PM	Bubbler valve closed
4/5/2012	4:03:39 PM	Main Vac valve opened
4/5/2012	4:03:39 PM	Helium MFC set to  0.000000
4/5/2012	4:03:39 PM	H2 MFC set to  0.000000
4/5/2012	4:03:39 PM	BCl3 MFC set to  0.000000
4/5/2012	4:03:39 PM	PH3 MFC set to  0.000000
4/5/2012	4:03:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:03:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:03:39 PM	Tube furnace set to 0
4/5/2012	4:04:09 PM	H2 valve closed
4/5/2012	4:04:09 PM	BCl3 valve closed
4/5/2012	4:04:09 PM	PH3 valve closed
4/5/2012	4:04:09 PM	SiCl4 pre valve closed
4/5/2012	4:04:09 PM	SiCl4 post valve closed
4/5/2012	4:04:09 PM	Bypass valve closed
4/5/2012	4:04:09 PM	Bubbler valve closed
4/5/2012	4:04:09 PM	Helium valve opened
4/5/2012	4:04:09 PM	Main Vac valve opened
4/5/2012	4:04:09 PM	Helium MFC set to  20.000000
4/5/2012	4:04:09 PM	H2 MFC set to  0.000000
4/5/2012	4:04:09 PM	BCl3 MFC set to  0.000000
4/5/2012	4:04:09 PM	PH3 MFC set to  0.000000
4/5/2012	4:04:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:04:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:04:09 PM	Tube furnace set to 0
4/5/2012	4:04:39 PM	Helium valve closed
4/5/2012	4:04:39 PM	H2 valve closed
4/5/2012	4:04:39 PM	BCl3 valve closed
4/5/2012	4:04:39 PM	PH3 valve closed
4/5/2012	4:04:39 PM	SiCl4 pre valve closed
4/5/2012	4:04:39 PM	SiCl4 post valve closed
4/5/2012	4:04:39 PM	Bypass valve closed
4/5/2012	4:04:39 PM	Bubbler valve closed
4/5/2012	4:04:39 PM	Main Vac valve opened
4/5/2012	4:04:39 PM	Helium MFC set to  0.000000
4/5/2012	4:04:39 PM	H2 MFC set to  0.000000
4/5/2012	4:04:39 PM	BCl3 MFC set to  0.000000
4/5/2012	4:04:39 PM	PH3 MFC set to  0.000000
4/5/2012	4:04:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:04:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:04:39 PM	Tube furnace set to 0
4/5/2012	4:05:09 PM	H2 valve closed
4/5/2012	4:05:09 PM	BCl3 valve closed
4/5/2012	4:05:09 PM	PH3 valve closed
4/5/2012	4:05:09 PM	SiCl4 pre valve closed
4/5/2012	4:05:09 PM	SiCl4 post valve closed
4/5/2012	4:05:09 PM	Bypass valve closed
4/5/2012	4:05:09 PM	Bubbler valve closed
4/5/2012	4:05:09 PM	Helium valve opened
4/5/2012	4:05:09 PM	Main Vac valve opened
4/5/2012	4:05:09 PM	Helium MFC set to  20.000000
4/5/2012	4:05:09 PM	H2 MFC set to  0.000000
4/5/2012	4:05:09 PM	BCl3 MFC set to  0.000000
4/5/2012	4:05:09 PM	PH3 MFC set to  0.000000
4/5/2012	4:05:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:05:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:05:09 PM	Tube furnace set to 0
4/5/2012	4:05:39 PM	Helium valve closed
4/5/2012	4:05:39 PM	H2 valve closed
4/5/2012	4:05:39 PM	BCl3 valve closed
4/5/2012	4:05:39 PM	PH3 valve closed
4/5/2012	4:05:39 PM	SiCl4 pre valve closed
4/5/2012	4:05:39 PM	SiCl4 post valve closed
4/5/2012	4:05:39 PM	Bypass valve closed
4/5/2012	4:05:39 PM	Bubbler valve closed
4/5/2012	4:05:39 PM	Main Vac valve opened
4/5/2012	4:05:39 PM	Helium MFC set to  0.000000
4/5/2012	4:05:39 PM	H2 MFC set to  0.000000
4/5/2012	4:05:39 PM	BCl3 MFC set to  0.000000
4/5/2012	4:05:39 PM	PH3 MFC set to  0.000000
4/5/2012	4:05:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:05:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:05:40 PM	Tube furnace set to 200
4/5/2012	4:06:10 PM	H2 valve closed
4/5/2012	4:06:10 PM	BCl3 valve closed
4/5/2012	4:06:10 PM	PH3 valve closed
4/5/2012	4:06:10 PM	SiCl4 pre valve closed
4/5/2012	4:06:10 PM	SiCl4 post valve closed
4/5/2012	4:06:10 PM	Bypass valve closed
4/5/2012	4:06:10 PM	Bubbler valve closed
4/5/2012	4:06:10 PM	Helium valve opened
4/5/2012	4:06:10 PM	Main Vac valve opened
4/5/2012	4:06:10 PM	Helium MFC set to  20.000000
4/5/2012	4:06:10 PM	H2 MFC set to  0.000000
4/5/2012	4:06:10 PM	BCl3 MFC set to  0.000000
4/5/2012	4:06:10 PM	PH3 MFC set to  0.000000
4/5/2012	4:06:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:06:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:06:10 PM	Tube furnace set to 200
4/5/2012	4:06:40 PM	Helium valve closed
4/5/2012	4:06:40 PM	H2 valve closed
4/5/2012	4:06:40 PM	BCl3 valve closed
4/5/2012	4:06:40 PM	PH3 valve closed
4/5/2012	4:06:40 PM	SiCl4 pre valve closed
4/5/2012	4:06:40 PM	SiCl4 post valve closed
4/5/2012	4:06:40 PM	Bypass valve closed
4/5/2012	4:06:40 PM	Bubbler valve closed
4/5/2012	4:06:40 PM	Main Vac valve opened
4/5/2012	4:06:40 PM	Helium MFC set to  0.000000
4/5/2012	4:06:40 PM	H2 MFC set to  0.000000
4/5/2012	4:06:40 PM	BCl3 MFC set to  0.000000
4/5/2012	4:06:40 PM	PH3 MFC set to  0.000000
4/5/2012	4:06:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:06:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:06:40 PM	Tube furnace set to 200
4/5/2012	4:07:10 PM	H2 valve closed
4/5/2012	4:07:10 PM	BCl3 valve closed
4/5/2012	4:07:10 PM	PH3 valve closed
4/5/2012	4:07:10 PM	SiCl4 pre valve closed
4/5/2012	4:07:10 PM	SiCl4 post valve closed
4/5/2012	4:07:10 PM	Bypass valve closed
4/5/2012	4:07:10 PM	Bubbler valve closed
4/5/2012	4:07:10 PM	Helium valve opened
4/5/2012	4:07:10 PM	Main Vac valve opened
4/5/2012	4:07:10 PM	Helium MFC set to  20.000000
4/5/2012	4:07:10 PM	H2 MFC set to  0.000000
4/5/2012	4:07:10 PM	BCl3 MFC set to  0.000000
4/5/2012	4:07:10 PM	PH3 MFC set to  0.000000
4/5/2012	4:07:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:07:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:07:10 PM	Tube furnace set to 200
4/5/2012	4:07:40 PM	Helium valve closed
4/5/2012	4:07:40 PM	H2 valve closed
4/5/2012	4:07:40 PM	BCl3 valve closed
4/5/2012	4:07:40 PM	PH3 valve closed
4/5/2012	4:07:40 PM	SiCl4 pre valve closed
4/5/2012	4:07:40 PM	SiCl4 post valve closed
4/5/2012	4:07:40 PM	Bypass valve closed
4/5/2012	4:07:40 PM	Bubbler valve closed
4/5/2012	4:07:40 PM	Main Vac valve opened
4/5/2012	4:07:40 PM	Helium MFC set to  0.000000
4/5/2012	4:07:40 PM	H2 MFC set to  0.000000
4/5/2012	4:07:40 PM	BCl3 MFC set to  0.000000
4/5/2012	4:07:40 PM	PH3 MFC set to  0.000000
4/5/2012	4:07:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:07:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:07:41 PM	Tube furnace set to 200
4/5/2012	4:08:11 PM	H2 valve closed
4/5/2012	4:08:11 PM	BCl3 valve closed
4/5/2012	4:08:11 PM	PH3 valve closed
4/5/2012	4:08:11 PM	SiCl4 pre valve closed
4/5/2012	4:08:11 PM	SiCl4 post valve closed
4/5/2012	4:08:11 PM	Bypass valve closed
4/5/2012	4:08:11 PM	Bubbler valve closed
4/5/2012	4:08:11 PM	Helium valve opened
4/5/2012	4:08:11 PM	Main Vac valve opened
4/5/2012	4:08:11 PM	Helium MFC set to  20.000000
4/5/2012	4:08:11 PM	H2 MFC set to  0.000000
4/5/2012	4:08:11 PM	BCl3 MFC set to  0.000000
4/5/2012	4:08:11 PM	PH3 MFC set to  0.000000
4/5/2012	4:08:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:08:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:08:11 PM	Tube furnace set to 200
4/5/2012	4:08:41 PM	Helium valve closed
4/5/2012	4:08:41 PM	H2 valve closed
4/5/2012	4:08:41 PM	BCl3 valve closed
4/5/2012	4:08:41 PM	PH3 valve closed
4/5/2012	4:08:41 PM	SiCl4 pre valve closed
4/5/2012	4:08:41 PM	SiCl4 post valve closed
4/5/2012	4:08:41 PM	Bypass valve closed
4/5/2012	4:08:41 PM	Bubbler valve closed
4/5/2012	4:08:41 PM	Main Vac valve opened
4/5/2012	4:08:41 PM	Helium MFC set to  0.000000
4/5/2012	4:08:41 PM	H2 MFC set to  0.000000
4/5/2012	4:08:41 PM	BCl3 MFC set to  0.000000
4/5/2012	4:08:41 PM	PH3 MFC set to  0.000000
4/5/2012	4:08:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:08:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:08:41 PM	Tube furnace set to 200
4/5/2012	4:09:11 PM	H2 valve closed
4/5/2012	4:09:11 PM	BCl3 valve closed
4/5/2012	4:09:11 PM	PH3 valve closed
4/5/2012	4:09:11 PM	SiCl4 pre valve closed
4/5/2012	4:09:11 PM	SiCl4 post valve closed
4/5/2012	4:09:11 PM	Bypass valve closed
4/5/2012	4:09:11 PM	Bubbler valve closed
4/5/2012	4:09:11 PM	Helium valve opened
4/5/2012	4:09:11 PM	Main Vac valve opened
4/5/2012	4:09:11 PM	Helium MFC set to  20.000000
4/5/2012	4:09:11 PM	H2 MFC set to  0.000000
4/5/2012	4:09:11 PM	BCl3 MFC set to  0.000000
4/5/2012	4:09:11 PM	PH3 MFC set to  0.000000
4/5/2012	4:09:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:09:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:09:11 PM	Tube furnace set to 200
4/5/2012	4:09:41 PM	Helium valve closed
4/5/2012	4:09:41 PM	H2 valve closed
4/5/2012	4:09:41 PM	BCl3 valve closed
4/5/2012	4:09:41 PM	PH3 valve closed
4/5/2012	4:09:41 PM	SiCl4 pre valve closed
4/5/2012	4:09:41 PM	SiCl4 post valve closed
4/5/2012	4:09:41 PM	Bypass valve closed
4/5/2012	4:09:41 PM	Bubbler valve closed
4/5/2012	4:09:41 PM	Main Vac valve opened
4/5/2012	4:09:41 PM	Helium MFC set to  0.000000
4/5/2012	4:09:41 PM	H2 MFC set to  0.000000
4/5/2012	4:09:41 PM	BCl3 MFC set to  0.000000
4/5/2012	4:09:41 PM	PH3 MFC set to  0.000000
4/5/2012	4:09:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:09:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:09:41 PM	Tube furnace set to 200
4/5/2012	4:10:12 PM	H2 valve closed
4/5/2012	4:10:12 PM	BCl3 valve closed
4/5/2012	4:10:12 PM	PH3 valve closed
4/5/2012	4:10:12 PM	SiCl4 pre valve closed
4/5/2012	4:10:12 PM	SiCl4 post valve closed
4/5/2012	4:10:12 PM	Bypass valve closed
4/5/2012	4:10:12 PM	Bubbler valve closed
4/5/2012	4:10:12 PM	Helium valve opened
4/5/2012	4:10:12 PM	Main Vac valve opened
4/5/2012	4:10:12 PM	Helium MFC set to  20.000000
4/5/2012	4:10:12 PM	H2 MFC set to  0.000000
4/5/2012	4:10:12 PM	BCl3 MFC set to  0.000000
4/5/2012	4:10:12 PM	PH3 MFC set to  0.000000
4/5/2012	4:10:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:10:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:10:12 PM	Tube furnace set to 200
4/5/2012	4:10:42 PM	Helium valve closed
4/5/2012	4:10:42 PM	H2 valve closed
4/5/2012	4:10:42 PM	BCl3 valve closed
4/5/2012	4:10:42 PM	PH3 valve closed
4/5/2012	4:10:42 PM	SiCl4 pre valve closed
4/5/2012	4:10:42 PM	SiCl4 post valve closed
4/5/2012	4:10:42 PM	Bypass valve closed
4/5/2012	4:10:42 PM	Bubbler valve closed
4/5/2012	4:10:42 PM	Main Vac valve opened
4/5/2012	4:10:42 PM	Helium MFC set to  0.000000
4/5/2012	4:10:42 PM	H2 MFC set to  0.000000
4/5/2012	4:10:42 PM	BCl3 MFC set to  0.000000
4/5/2012	4:10:42 PM	PH3 MFC set to  0.000000
4/5/2012	4:10:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:10:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:10:42 PM	Tube furnace set to 200
4/5/2012	4:11:12 PM	H2 valve closed
4/5/2012	4:11:12 PM	BCl3 valve closed
4/5/2012	4:11:12 PM	PH3 valve closed
4/5/2012	4:11:12 PM	SiCl4 pre valve closed
4/5/2012	4:11:12 PM	SiCl4 post valve closed
4/5/2012	4:11:12 PM	Bypass valve closed
4/5/2012	4:11:12 PM	Bubbler valve closed
4/5/2012	4:11:12 PM	Helium valve opened
4/5/2012	4:11:12 PM	Main Vac valve opened
4/5/2012	4:11:12 PM	Helium MFC set to  20.000000
4/5/2012	4:11:12 PM	H2 MFC set to  0.000000
4/5/2012	4:11:12 PM	BCl3 MFC set to  0.000000
4/5/2012	4:11:12 PM	PH3 MFC set to  0.000000
4/5/2012	4:11:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:11:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:11:12 PM	Tube furnace set to 200
4/5/2012	4:11:42 PM	Helium valve closed
4/5/2012	4:11:42 PM	H2 valve closed
4/5/2012	4:11:42 PM	BCl3 valve closed
4/5/2012	4:11:42 PM	PH3 valve closed
4/5/2012	4:11:42 PM	SiCl4 pre valve closed
4/5/2012	4:11:42 PM	SiCl4 post valve closed
4/5/2012	4:11:42 PM	Bypass valve closed
4/5/2012	4:11:42 PM	Bubbler valve closed
4/5/2012	4:11:42 PM	Main Vac valve opened
4/5/2012	4:11:42 PM	Helium MFC set to  0.000000
4/5/2012	4:11:42 PM	H2 MFC set to  0.000000
4/5/2012	4:11:42 PM	BCl3 MFC set to  0.000000
4/5/2012	4:11:42 PM	PH3 MFC set to  0.000000
4/5/2012	4:11:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	4:11:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	4:11:42 PM	Tube furnace set to 0
4/5/2012	4:11:43 PM	Run finished at 4:11 PM
4/5/2012	4:57:53 PM	Main Vac valve closed
4/5/2012	4:58:05 PM	Main Vac valve opened
4/5/2012	5:04:34 PM	Recipe started at 5:04 PM
4/5/2012	5:04:34 PM	Helium valve closed
4/5/2012	5:04:34 PM	H2 valve closed
4/5/2012	5:04:34 PM	BCl3 valve closed
4/5/2012	5:04:34 PM	PH3 valve closed
4/5/2012	5:04:34 PM	SiCl4 pre valve closed
4/5/2012	5:04:34 PM	SiCl4 post valve closed
4/5/2012	5:04:34 PM	Main Vac valve closed
4/5/2012	5:04:34 PM	Bypass valve closed
4/5/2012	5:04:34 PM	Bubbler valve closed
4/5/2012	5:04:34 PM	Helium MFC set to  0.000000
4/5/2012	5:04:34 PM	H2 MFC set to  0.000000
4/5/2012	5:04:34 PM	BCl3 MFC set to  0.000000
4/5/2012	5:04:34 PM	PH3 MFC set to  0.000000
4/5/2012	5:04:34 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:04:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:04:34 PM	Tube furnace set to 0
4/5/2012	5:04:37 PM	Helium valve closed
4/5/2012	5:04:37 PM	BCl3 valve closed
4/5/2012	5:04:37 PM	PH3 valve closed
4/5/2012	5:04:37 PM	SiCl4 pre valve closed
4/5/2012	5:04:37 PM	SiCl4 post valve closed
4/5/2012	5:04:37 PM	Main Vac valve closed
4/5/2012	5:04:37 PM	Bypass valve closed
4/5/2012	5:04:37 PM	Bubbler valve closed
4/5/2012	5:04:37 PM	H2 valve opened
4/5/2012	5:04:37 PM	Helium MFC set to  0.000000
4/5/2012	5:04:37 PM	H2 MFC set to  500.000000
4/5/2012	5:04:37 PM	BCl3 MFC set to  0.000000
4/5/2012	5:04:37 PM	PH3 MFC set to  0.000000
4/5/2012	5:04:37 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:04:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:04:37 PM	Tube furnace set to 0
4/5/2012	5:05:43 PM	Helium valve closed
4/5/2012	5:05:43 PM	BCl3 valve closed
4/5/2012	5:05:43 PM	PH3 valve closed
4/5/2012	5:05:43 PM	SiCl4 pre valve closed
4/5/2012	5:05:43 PM	SiCl4 post valve closed
4/5/2012	5:05:43 PM	Main Vac valve closed
4/5/2012	5:05:43 PM	Bypass valve closed
4/5/2012	5:05:43 PM	H2 valve opened
4/5/2012	5:05:43 PM	Bubbler valve opened
4/5/2012	5:05:43 PM	Helium MFC set to  0.000000
4/5/2012	5:05:43 PM	H2 MFC set to  500.000000
4/5/2012	5:05:43 PM	BCl3 MFC set to  0.000000
4/5/2012	5:05:43 PM	PH3 MFC set to  0.000000
4/5/2012	5:05:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:05:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:05:43 PM	Tube furnace set to 0
4/5/2012	5:05:44 PM	Helium valve closed
4/5/2012	5:05:44 PM	BCl3 valve closed
4/5/2012	5:05:44 PM	PH3 valve closed
4/5/2012	5:05:44 PM	SiCl4 pre valve closed
4/5/2012	5:05:44 PM	SiCl4 post valve closed
4/5/2012	5:05:44 PM	Main Vac valve closed
4/5/2012	5:05:44 PM	Bypass valve closed
4/5/2012	5:05:44 PM	H2 valve opened
4/5/2012	5:05:44 PM	Bubbler valve opened
4/5/2012	5:05:44 PM	Helium MFC set to  0.000000
4/5/2012	5:05:44 PM	H2 MFC set to  500.000000
4/5/2012	5:05:44 PM	BCl3 MFC set to  0.000000
4/5/2012	5:05:44 PM	PH3 MFC set to  0.000000
4/5/2012	5:05:44 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:05:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:05:44 PM	Tube furnace set to 1000
4/5/2012	5:25:44 PM	Helium valve closed
4/5/2012	5:25:44 PM	PH3 valve closed
4/5/2012	5:25:44 PM	Main Vac valve closed
4/5/2012	5:25:44 PM	Bypass valve closed
4/5/2012	5:25:44 PM	H2 valve opened
4/5/2012	5:25:44 PM	BCl3 valve opened
4/5/2012	5:25:44 PM	SiCl4 pre valve opened
4/5/2012	5:25:44 PM	SiCl4 post valve opened
4/5/2012	5:25:44 PM	Bubbler valve opened
4/5/2012	5:25:44 PM	Helium MFC set to  0.000000
4/5/2012	5:25:44 PM	H2 MFC set to  450.000000
4/5/2012	5:25:44 PM	BCl3 MFC set to  1.500000
4/5/2012	5:25:44 PM	PH3 MFC set to  0.000000
4/5/2012	5:25:44 PM	SiCl4 MFC set to  50.000000
4/5/2012	5:25:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:25:44 PM	Tube furnace set to 1000
4/5/2012	5:37:44 PM	Helium valve closed
4/5/2012	5:37:44 PM	BCl3 valve closed
4/5/2012	5:37:44 PM	PH3 valve closed
4/5/2012	5:37:45 PM	SiCl4 pre valve closed
4/5/2012	5:37:45 PM	SiCl4 post valve closed
4/5/2012	5:37:45 PM	Main Vac valve closed
4/5/2012	5:37:45 PM	Bypass valve closed
4/5/2012	5:37:45 PM	H2 valve opened
4/5/2012	5:37:45 PM	Bubbler valve opened
4/5/2012	5:37:45 PM	Helium MFC set to  0.000000
4/5/2012	5:37:45 PM	H2 MFC set to  500.000000
4/5/2012	5:37:45 PM	BCl3 MFC set to  0.000000
4/5/2012	5:37:45 PM	PH3 MFC set to  0.000000
4/5/2012	5:37:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:37:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:37:45 PM	Tube furnace set to 950
4/5/2012	5:39:45 PM	Helium valve closed
4/5/2012	5:39:45 PM	BCl3 valve closed
4/5/2012	5:39:45 PM	PH3 valve closed
4/5/2012	5:39:45 PM	SiCl4 pre valve closed
4/5/2012	5:39:45 PM	SiCl4 post valve closed
4/5/2012	5:39:45 PM	Main Vac valve closed
4/5/2012	5:39:45 PM	Bypass valve closed
4/5/2012	5:39:45 PM	H2 valve opened
4/5/2012	5:39:45 PM	Bubbler valve opened
4/5/2012	5:39:45 PM	Helium MFC set to  0.000000
4/5/2012	5:39:45 PM	H2 MFC set to  500.000000
4/5/2012	5:39:45 PM	BCl3 MFC set to  0.000000
4/5/2012	5:39:45 PM	PH3 MFC set to  0.000000
4/5/2012	5:39:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:39:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:39:45 PM	Tube furnace set to 900
4/5/2012	5:41:45 PM	Helium valve closed
4/5/2012	5:41:45 PM	BCl3 valve closed
4/5/2012	5:41:45 PM	PH3 valve closed
4/5/2012	5:41:45 PM	SiCl4 pre valve closed
4/5/2012	5:41:45 PM	SiCl4 post valve closed
4/5/2012	5:41:45 PM	Main Vac valve closed
4/5/2012	5:41:45 PM	Bypass valve closed
4/5/2012	5:41:45 PM	H2 valve opened
4/5/2012	5:41:45 PM	Bubbler valve opened
4/5/2012	5:41:45 PM	Helium MFC set to  0.000000
4/5/2012	5:41:45 PM	H2 MFC set to  500.000000
4/5/2012	5:41:45 PM	BCl3 MFC set to  0.000000
4/5/2012	5:41:45 PM	PH3 MFC set to  0.000000
4/5/2012	5:41:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:41:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:41:45 PM	Tube furnace set to 850
4/5/2012	5:43:45 PM	H2 valve closed
4/5/2012	5:43:45 PM	BCl3 valve closed
4/5/2012	5:43:45 PM	PH3 valve closed
4/5/2012	5:43:45 PM	SiCl4 pre valve closed
4/5/2012	5:43:45 PM	SiCl4 post valve closed
4/5/2012	5:43:45 PM	Main Vac valve closed
4/5/2012	5:43:45 PM	Bypass valve closed
4/5/2012	5:43:45 PM	Helium valve opened
4/5/2012	5:43:45 PM	Bubbler valve opened
4/5/2012	5:43:45 PM	Helium MFC set to  500.000000
4/5/2012	5:43:45 PM	H2 MFC set to  0.000000
4/5/2012	5:43:45 PM	BCl3 MFC set to  0.000000
4/5/2012	5:43:45 PM	PH3 MFC set to  0.000000
4/5/2012	5:43:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:43:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:43:45 PM	Tube furnace set to 800
4/5/2012	5:45:45 PM	H2 valve closed
4/5/2012	5:45:45 PM	BCl3 valve closed
4/5/2012	5:45:45 PM	PH3 valve closed
4/5/2012	5:45:45 PM	SiCl4 pre valve closed
4/5/2012	5:45:45 PM	SiCl4 post valve closed
4/5/2012	5:45:45 PM	Main Vac valve closed
4/5/2012	5:45:45 PM	Bypass valve closed
4/5/2012	5:45:45 PM	Helium valve opened
4/5/2012	5:45:45 PM	Bubbler valve opened
4/5/2012	5:45:45 PM	Helium MFC set to  500.000000
4/5/2012	5:45:45 PM	H2 MFC set to  0.000000
4/5/2012	5:45:45 PM	BCl3 MFC set to  0.000000
4/5/2012	5:45:45 PM	PH3 MFC set to  0.000000
4/5/2012	5:45:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:45:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:45:46 PM	Tube furnace set to 750
4/5/2012	5:47:46 PM	H2 valve closed
4/5/2012	5:47:46 PM	BCl3 valve closed
4/5/2012	5:47:46 PM	PH3 valve closed
4/5/2012	5:47:46 PM	SiCl4 pre valve closed
4/5/2012	5:47:46 PM	SiCl4 post valve closed
4/5/2012	5:47:46 PM	Main Vac valve closed
4/5/2012	5:47:46 PM	Bypass valve closed
4/5/2012	5:47:46 PM	Helium valve opened
4/5/2012	5:47:46 PM	Bubbler valve opened
4/5/2012	5:47:46 PM	Helium MFC set to  500.000000
4/5/2012	5:47:46 PM	H2 MFC set to  0.000000
4/5/2012	5:47:46 PM	BCl3 MFC set to  0.000000
4/5/2012	5:47:46 PM	PH3 MFC set to  0.000000
4/5/2012	5:47:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	5:47:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	5:47:46 PM	Tube furnace set to 0
4/5/2012	6:07:46 PM	Helium valve closed
4/5/2012	6:07:46 PM	H2 valve closed
4/5/2012	6:07:46 PM	BCl3 valve closed
4/5/2012	6:07:46 PM	PH3 valve closed
4/5/2012	6:07:46 PM	SiCl4 pre valve closed
4/5/2012	6:07:46 PM	SiCl4 post valve closed
4/5/2012	6:07:46 PM	Main Vac valve closed
4/5/2012	6:07:46 PM	Bypass valve closed
4/5/2012	6:07:46 PM	Bubbler valve closed
4/5/2012	6:07:46 PM	Helium MFC set to  0.000000
4/5/2012	6:07:46 PM	H2 MFC set to  0.000000
4/5/2012	6:07:46 PM	BCl3 MFC set to  0.000000
4/5/2012	6:07:46 PM	PH3 MFC set to  0.000000
4/5/2012	6:07:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:07:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:07:46 PM	Tube furnace set to 0
4/5/2012	6:07:47 PM	Run finished at 6:07 PM
4/5/2012	6:20:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	6:20:21 PM	Recipe started at 6:20 PM
4/5/2012	6:20:21 PM	Helium valve closed
4/5/2012	6:20:21 PM	H2 valve closed
4/5/2012	6:20:21 PM	BCl3 valve closed
4/5/2012	6:20:21 PM	PH3 valve closed
4/5/2012	6:20:21 PM	SiCl4 pre valve closed
4/5/2012	6:20:21 PM	SiCl4 post valve closed
4/5/2012	6:20:21 PM	Main Vac valve closed
4/5/2012	6:20:21 PM	Bypass valve closed
4/5/2012	6:20:21 PM	Bubbler valve closed
4/5/2012	6:20:21 PM	Helium MFC set to  0.000000
4/5/2012	6:20:21 PM	H2 MFC set to  0.000000
4/5/2012	6:20:21 PM	BCl3 MFC set to  0.000000
4/5/2012	6:20:21 PM	PH3 MFC set to  0.000000
4/5/2012	6:20:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:20:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:20:21 PM	Tube furnace set to 0
4/5/2012	6:20:24 PM	H2 valve closed
4/5/2012	6:20:24 PM	BCl3 valve closed
4/5/2012	6:20:24 PM	PH3 valve closed
4/5/2012	6:20:24 PM	SiCl4 pre valve closed
4/5/2012	6:20:24 PM	SiCl4 post valve closed
4/5/2012	6:20:24 PM	Main Vac valve closed
4/5/2012	6:20:24 PM	Bypass valve closed
4/5/2012	6:20:24 PM	Bubbler valve closed
4/5/2012	6:20:24 PM	Helium valve opened
4/5/2012	6:20:24 PM	Helium MFC set to  500.000000
4/5/2012	6:20:24 PM	H2 MFC set to  0.000000
4/5/2012	6:20:24 PM	BCl3 MFC set to  0.000000
4/5/2012	6:20:24 PM	PH3 MFC set to  0.000000
4/5/2012	6:20:24 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:20:24 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:20:25 PM	Tube furnace set to 0
4/5/2012	6:20:30 PM	Helium valve closed
4/5/2012	6:20:30 PM	H2 valve closed
4/5/2012	6:20:30 PM	BCl3 valve closed
4/5/2012	6:20:30 PM	PH3 valve closed
4/5/2012	6:20:30 PM	SiCl4 pre valve closed
4/5/2012	6:20:30 PM	SiCl4 post valve closed
4/5/2012	6:20:30 PM	Main Vac valve closed
4/5/2012	6:20:30 PM	Bypass valve closed
4/5/2012	6:20:30 PM	Bubbler valve closed
4/5/2012	6:20:30 PM	Helium MFC set to  0.000000
4/5/2012	6:20:30 PM	H2 MFC set to  0.000000
4/5/2012	6:20:30 PM	BCl3 MFC set to  0.000000
4/5/2012	6:20:30 PM	PH3 MFC set to  0.000000
4/5/2012	6:20:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:20:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:20:30 PM	Tube furnace set to 0
4/5/2012	6:20:31 PM	Run finished at 6:20 PM
4/5/2012	6:20:31 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	6:24:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	6:24:10 PM	Recipe started at 6:24 PM
4/5/2012	6:24:10 PM	Helium valve closed
4/5/2012	6:24:10 PM	H2 valve closed
4/5/2012	6:24:10 PM	BCl3 valve closed
4/5/2012	6:24:10 PM	PH3 valve closed
4/5/2012	6:24:10 PM	SiCl4 pre valve closed
4/5/2012	6:24:10 PM	SiCl4 post valve closed
4/5/2012	6:24:10 PM	Main Vac valve closed
4/5/2012	6:24:10 PM	Bubbler valve closed
4/5/2012	6:24:10 PM	Bypass valve opened
4/5/2012	6:24:10 PM	Helium MFC set to  0.000000
4/5/2012	6:24:10 PM	H2 MFC set to  0.000000
4/5/2012	6:24:10 PM	BCl3 MFC set to  0.000000
4/5/2012	6:24:10 PM	PH3 MFC set to  0.000000
4/5/2012	6:24:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:24:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:24:11 PM	Tube furnace set to 0
4/5/2012	6:25:11 PM	Helium valve closed
4/5/2012	6:25:11 PM	H2 valve closed
4/5/2012	6:25:11 PM	BCl3 valve closed
4/5/2012	6:25:11 PM	PH3 valve closed
4/5/2012	6:25:11 PM	SiCl4 pre valve closed
4/5/2012	6:25:11 PM	SiCl4 post valve closed
4/5/2012	6:25:11 PM	Main Vac valve closed
4/5/2012	6:25:11 PM	Bubbler valve closed
4/5/2012	6:25:11 PM	Bypass valve opened
4/5/2012	6:25:11 PM	Helium MFC set to  0.000000
4/5/2012	6:25:11 PM	H2 MFC set to  0.000000
4/5/2012	6:25:11 PM	BCl3 MFC set to  0.000000
4/5/2012	6:25:11 PM	PH3 MFC set to  0.000000
4/5/2012	6:25:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:25:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:25:12 PM	Tube furnace set to 0
4/5/2012	6:26:12 PM	Helium valve closed
4/5/2012	6:26:12 PM	H2 valve closed
4/5/2012	6:26:12 PM	BCl3 valve closed
4/5/2012	6:26:12 PM	PH3 valve closed
4/5/2012	6:26:12 PM	SiCl4 pre valve closed
4/5/2012	6:26:12 PM	SiCl4 post valve closed
4/5/2012	6:26:12 PM	Bypass valve closed
4/5/2012	6:26:12 PM	Bubbler valve closed
4/5/2012	6:26:12 PM	Main Vac valve opened
4/5/2012	6:26:12 PM	Helium MFC set to  0.000000
4/5/2012	6:26:12 PM	H2 MFC set to  0.000000
4/5/2012	6:26:12 PM	BCl3 MFC set to  0.000000
4/5/2012	6:26:12 PM	PH3 MFC set to  0.000000
4/5/2012	6:26:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	6:26:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	6:26:12 PM	Tube furnace set to 0
4/5/2012	6:26:13 PM	Run finished at 6:26 PM
4/5/2012	6:26:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	7:18:00 PM	Recipe started at 7:17 PM
4/5/2012	7:18:00 PM	Helium valve closed
4/5/2012	7:18:00 PM	H2 valve closed
4/5/2012	7:18:00 PM	BCl3 valve closed
4/5/2012	7:18:00 PM	PH3 valve closed
4/5/2012	7:18:00 PM	SiCl4 pre valve closed
4/5/2012	7:18:00 PM	SiCl4 post valve closed
4/5/2012	7:18:00 PM	Bypass valve closed
4/5/2012	7:18:00 PM	Bubbler valve closed
4/5/2012	7:18:00 PM	Main Vac valve opened
4/5/2012	7:18:00 PM	Helium MFC set to  0.000000
4/5/2012	7:18:00 PM	H2 MFC set to  0.000000
4/5/2012	7:18:00 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:00 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:00 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:00 PM	Tube furnace set to 0
4/5/2012	7:18:06 PM	H2 valve closed
4/5/2012	7:18:06 PM	BCl3 valve closed
4/5/2012	7:18:06 PM	PH3 valve closed
4/5/2012	7:18:06 PM	SiCl4 pre valve closed
4/5/2012	7:18:06 PM	SiCl4 post valve closed
4/5/2012	7:18:06 PM	Bypass valve closed
4/5/2012	7:18:06 PM	Bubbler valve closed
4/5/2012	7:18:06 PM	Helium valve opened
4/5/2012	7:18:06 PM	Main Vac valve opened
4/5/2012	7:18:06 PM	Helium MFC set to  20.000000
4/5/2012	7:18:06 PM	H2 MFC set to  0.000000
4/5/2012	7:18:06 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:06 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:06 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:06 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:06 PM	Tube furnace set to 0
4/5/2012	7:18:08 PM	Helium valve closed
4/5/2012	7:18:08 PM	H2 valve closed
4/5/2012	7:18:08 PM	BCl3 valve closed
4/5/2012	7:18:08 PM	PH3 valve closed
4/5/2012	7:18:08 PM	SiCl4 pre valve closed
4/5/2012	7:18:08 PM	SiCl4 post valve closed
4/5/2012	7:18:08 PM	Bypass valve closed
4/5/2012	7:18:08 PM	Bubbler valve closed
4/5/2012	7:18:08 PM	Main Vac valve opened
4/5/2012	7:18:08 PM	Helium MFC set to  0.000000
4/5/2012	7:18:08 PM	H2 MFC set to  0.000000
4/5/2012	7:18:08 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:08 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:08 PM	Tube furnace set to 0
4/5/2012	7:18:08 PM	H2 valve closed
4/5/2012	7:18:08 PM	BCl3 valve closed
4/5/2012	7:18:08 PM	PH3 valve closed
4/5/2012	7:18:08 PM	SiCl4 pre valve closed
4/5/2012	7:18:08 PM	SiCl4 post valve closed
4/5/2012	7:18:08 PM	Bypass valve closed
4/5/2012	7:18:08 PM	Bubbler valve closed
4/5/2012	7:18:08 PM	Helium valve opened
4/5/2012	7:18:08 PM	Main Vac valve opened
4/5/2012	7:18:08 PM	Helium MFC set to  20.000000
4/5/2012	7:18:08 PM	H2 MFC set to  0.000000
4/5/2012	7:18:08 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:08 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:09 PM	Tube furnace set to 0
4/5/2012	7:18:09 PM	Helium valve closed
4/5/2012	7:18:09 PM	H2 valve closed
4/5/2012	7:18:09 PM	BCl3 valve closed
4/5/2012	7:18:09 PM	PH3 valve closed
4/5/2012	7:18:09 PM	SiCl4 pre valve closed
4/5/2012	7:18:09 PM	SiCl4 post valve closed
4/5/2012	7:18:09 PM	Bypass valve closed
4/5/2012	7:18:09 PM	Bubbler valve closed
4/5/2012	7:18:09 PM	Main Vac valve opened
4/5/2012	7:18:09 PM	Helium MFC set to  0.000000
4/5/2012	7:18:09 PM	H2 MFC set to  0.000000
4/5/2012	7:18:09 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:09 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:09 PM	Tube furnace set to 0
4/5/2012	7:18:10 PM	H2 valve closed
4/5/2012	7:18:10 PM	BCl3 valve closed
4/5/2012	7:18:10 PM	PH3 valve closed
4/5/2012	7:18:10 PM	SiCl4 pre valve closed
4/5/2012	7:18:10 PM	SiCl4 post valve closed
4/5/2012	7:18:10 PM	Bypass valve closed
4/5/2012	7:18:10 PM	Bubbler valve closed
4/5/2012	7:18:10 PM	Helium valve opened
4/5/2012	7:18:10 PM	Main Vac valve opened
4/5/2012	7:18:10 PM	Helium MFC set to  20.000000
4/5/2012	7:18:10 PM	H2 MFC set to  0.000000
4/5/2012	7:18:10 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:10 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:10 PM	Tube furnace set to 0
4/5/2012	7:18:11 PM	Helium valve closed
4/5/2012	7:18:11 PM	H2 valve closed
4/5/2012	7:18:11 PM	BCl3 valve closed
4/5/2012	7:18:11 PM	PH3 valve closed
4/5/2012	7:18:11 PM	SiCl4 pre valve closed
4/5/2012	7:18:11 PM	SiCl4 post valve closed
4/5/2012	7:18:11 PM	Bypass valve closed
4/5/2012	7:18:11 PM	Bubbler valve closed
4/5/2012	7:18:11 PM	Main Vac valve opened
4/5/2012	7:18:11 PM	Helium MFC set to  0.000000
4/5/2012	7:18:11 PM	H2 MFC set to  0.000000
4/5/2012	7:18:11 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:11 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:11 PM	Tube furnace set to 0
4/5/2012	7:18:12 PM	H2 valve closed
4/5/2012	7:18:12 PM	BCl3 valve closed
4/5/2012	7:18:12 PM	PH3 valve closed
4/5/2012	7:18:12 PM	SiCl4 pre valve closed
4/5/2012	7:18:12 PM	SiCl4 post valve closed
4/5/2012	7:18:12 PM	Bypass valve closed
4/5/2012	7:18:12 PM	Bubbler valve closed
4/5/2012	7:18:12 PM	Helium valve opened
4/5/2012	7:18:12 PM	Main Vac valve opened
4/5/2012	7:18:12 PM	Helium MFC set to  20.000000
4/5/2012	7:18:12 PM	H2 MFC set to  0.000000
4/5/2012	7:18:12 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:12 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:12 PM	Tube furnace set to 0
4/5/2012	7:18:12 PM	Helium valve closed
4/5/2012	7:18:12 PM	H2 valve closed
4/5/2012	7:18:12 PM	BCl3 valve closed
4/5/2012	7:18:12 PM	PH3 valve closed
4/5/2012	7:18:12 PM	SiCl4 pre valve closed
4/5/2012	7:18:12 PM	SiCl4 post valve closed
4/5/2012	7:18:12 PM	Bypass valve closed
4/5/2012	7:18:12 PM	Bubbler valve closed
4/5/2012	7:18:12 PM	Main Vac valve opened
4/5/2012	7:18:12 PM	Helium MFC set to  0.000000
4/5/2012	7:18:12 PM	H2 MFC set to  0.000000
4/5/2012	7:18:12 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:12 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:12 PM	Tube furnace set to 0
4/5/2012	7:18:13 PM	H2 valve closed
4/5/2012	7:18:13 PM	BCl3 valve closed
4/5/2012	7:18:13 PM	PH3 valve closed
4/5/2012	7:18:13 PM	SiCl4 pre valve closed
4/5/2012	7:18:13 PM	SiCl4 post valve closed
4/5/2012	7:18:13 PM	Bypass valve closed
4/5/2012	7:18:13 PM	Bubbler valve closed
4/5/2012	7:18:13 PM	Helium valve opened
4/5/2012	7:18:13 PM	Main Vac valve opened
4/5/2012	7:18:13 PM	Helium MFC set to  20.000000
4/5/2012	7:18:13 PM	H2 MFC set to  0.000000
4/5/2012	7:18:13 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:13 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:13 PM	Tube furnace set to 0
4/5/2012	7:18:14 PM	Helium valve closed
4/5/2012	7:18:14 PM	H2 valve closed
4/5/2012	7:18:14 PM	BCl3 valve closed
4/5/2012	7:18:14 PM	PH3 valve closed
4/5/2012	7:18:14 PM	SiCl4 pre valve closed
4/5/2012	7:18:14 PM	SiCl4 post valve closed
4/5/2012	7:18:14 PM	Bypass valve closed
4/5/2012	7:18:14 PM	Bubbler valve closed
4/5/2012	7:18:14 PM	Main Vac valve opened
4/5/2012	7:18:14 PM	Helium MFC set to  0.000000
4/5/2012	7:18:14 PM	H2 MFC set to  0.000000
4/5/2012	7:18:14 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:14 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:14 PM	Tube furnace set to 0
4/5/2012	7:18:14 PM	H2 valve closed
4/5/2012	7:18:14 PM	BCl3 valve closed
4/5/2012	7:18:14 PM	PH3 valve closed
4/5/2012	7:18:14 PM	SiCl4 pre valve closed
4/5/2012	7:18:14 PM	SiCl4 post valve closed
4/5/2012	7:18:14 PM	Bypass valve closed
4/5/2012	7:18:14 PM	Bubbler valve closed
4/5/2012	7:18:14 PM	Helium valve opened
4/5/2012	7:18:14 PM	Main Vac valve opened
4/5/2012	7:18:15 PM	Helium MFC set to  20.000000
4/5/2012	7:18:15 PM	H2 MFC set to  0.000000
4/5/2012	7:18:15 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:15 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:15 PM	Tube furnace set to 0
4/5/2012	7:18:45 PM	Helium valve closed
4/5/2012	7:18:45 PM	H2 valve closed
4/5/2012	7:18:45 PM	BCl3 valve closed
4/5/2012	7:18:45 PM	PH3 valve closed
4/5/2012	7:18:45 PM	SiCl4 pre valve closed
4/5/2012	7:18:45 PM	SiCl4 post valve closed
4/5/2012	7:18:45 PM	Bypass valve closed
4/5/2012	7:18:45 PM	Bubbler valve closed
4/5/2012	7:18:45 PM	Main Vac valve opened
4/5/2012	7:18:45 PM	Helium MFC set to  0.000000
4/5/2012	7:18:45 PM	H2 MFC set to  0.000000
4/5/2012	7:18:45 PM	BCl3 MFC set to  0.000000
4/5/2012	7:18:45 PM	PH3 MFC set to  0.000000
4/5/2012	7:18:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:18:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:18:45 PM	Tube furnace set to 0
4/5/2012	7:19:15 PM	H2 valve closed
4/5/2012	7:19:15 PM	BCl3 valve closed
4/5/2012	7:19:15 PM	PH3 valve closed
4/5/2012	7:19:15 PM	SiCl4 pre valve closed
4/5/2012	7:19:15 PM	SiCl4 post valve closed
4/5/2012	7:19:15 PM	Bypass valve closed
4/5/2012	7:19:15 PM	Bubbler valve closed
4/5/2012	7:19:15 PM	Helium valve opened
4/5/2012	7:19:15 PM	Main Vac valve opened
4/5/2012	7:19:15 PM	Helium MFC set to  20.000000
4/5/2012	7:19:15 PM	H2 MFC set to  0.000000
4/5/2012	7:19:15 PM	BCl3 MFC set to  0.000000
4/5/2012	7:19:15 PM	PH3 MFC set to  0.000000
4/5/2012	7:19:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:19:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:19:15 PM	Tube furnace set to 0
4/5/2012	7:19:45 PM	Helium valve closed
4/5/2012	7:19:45 PM	H2 valve closed
4/5/2012	7:19:45 PM	BCl3 valve closed
4/5/2012	7:19:45 PM	PH3 valve closed
4/5/2012	7:19:45 PM	SiCl4 pre valve closed
4/5/2012	7:19:45 PM	SiCl4 post valve closed
4/5/2012	7:19:45 PM	Bypass valve closed
4/5/2012	7:19:45 PM	Bubbler valve closed
4/5/2012	7:19:45 PM	Main Vac valve opened
4/5/2012	7:19:45 PM	Helium MFC set to  0.000000
4/5/2012	7:19:45 PM	H2 MFC set to  0.000000
4/5/2012	7:19:45 PM	BCl3 MFC set to  0.000000
4/5/2012	7:19:45 PM	PH3 MFC set to  0.000000
4/5/2012	7:19:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:19:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:19:45 PM	Tube furnace set to 0
4/5/2012	7:20:15 PM	H2 valve closed
4/5/2012	7:20:15 PM	BCl3 valve closed
4/5/2012	7:20:15 PM	PH3 valve closed
4/5/2012	7:20:15 PM	SiCl4 pre valve closed
4/5/2012	7:20:15 PM	SiCl4 post valve closed
4/5/2012	7:20:15 PM	Bypass valve closed
4/5/2012	7:20:15 PM	Bubbler valve closed
4/5/2012	7:20:15 PM	Helium valve opened
4/5/2012	7:20:15 PM	Main Vac valve opened
4/5/2012	7:20:15 PM	Helium MFC set to  20.000000
4/5/2012	7:20:15 PM	H2 MFC set to  0.000000
4/5/2012	7:20:15 PM	BCl3 MFC set to  0.000000
4/5/2012	7:20:15 PM	PH3 MFC set to  0.000000
4/5/2012	7:20:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:20:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:20:16 PM	Tube furnace set to 0
4/5/2012	7:20:46 PM	Helium valve closed
4/5/2012	7:20:46 PM	H2 valve closed
4/5/2012	7:20:46 PM	BCl3 valve closed
4/5/2012	7:20:46 PM	PH3 valve closed
4/5/2012	7:20:46 PM	SiCl4 pre valve closed
4/5/2012	7:20:46 PM	SiCl4 post valve closed
4/5/2012	7:20:46 PM	Bypass valve closed
4/5/2012	7:20:46 PM	Bubbler valve closed
4/5/2012	7:20:46 PM	Main Vac valve opened
4/5/2012	7:20:46 PM	Helium MFC set to  0.000000
4/5/2012	7:20:46 PM	H2 MFC set to  0.000000
4/5/2012	7:20:46 PM	BCl3 MFC set to  0.000000
4/5/2012	7:20:46 PM	PH3 MFC set to  0.000000
4/5/2012	7:20:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:20:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:20:46 PM	Tube furnace set to 0
4/5/2012	7:20:56 PM	H2 valve closed
4/5/2012	7:20:56 PM	BCl3 valve closed
4/5/2012	7:20:56 PM	PH3 valve closed
4/5/2012	7:20:56 PM	SiCl4 pre valve closed
4/5/2012	7:20:56 PM	SiCl4 post valve closed
4/5/2012	7:20:56 PM	Bypass valve closed
4/5/2012	7:20:56 PM	Bubbler valve closed
4/5/2012	7:20:56 PM	Helium valve opened
4/5/2012	7:20:56 PM	Main Vac valve opened
4/5/2012	7:20:56 PM	Helium MFC set to  20.000000
4/5/2012	7:20:56 PM	H2 MFC set to  0.000000
4/5/2012	7:20:56 PM	BCl3 MFC set to  0.000000
4/5/2012	7:20:56 PM	PH3 MFC set to  0.000000
4/5/2012	7:20:56 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:20:56 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:20:56 PM	Tube furnace set to 0
4/5/2012	7:20:56 PM	Helium valve closed
4/5/2012	7:20:56 PM	H2 valve closed
4/5/2012	7:20:56 PM	BCl3 valve closed
4/5/2012	7:20:56 PM	PH3 valve closed
4/5/2012	7:20:56 PM	SiCl4 pre valve closed
4/5/2012	7:20:56 PM	SiCl4 post valve closed
4/5/2012	7:20:56 PM	Bypass valve closed
4/5/2012	7:20:56 PM	Bubbler valve closed
4/5/2012	7:20:56 PM	Main Vac valve opened
4/5/2012	7:20:56 PM	Helium MFC set to  0.000000
4/5/2012	7:20:56 PM	H2 MFC set to  0.000000
4/5/2012	7:20:56 PM	BCl3 MFC set to  0.000000
4/5/2012	7:20:56 PM	PH3 MFC set to  0.000000
4/5/2012	7:20:56 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:20:56 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:20:56 PM	Tube furnace set to 200
4/5/2012	7:20:57 PM	H2 valve closed
4/5/2012	7:20:57 PM	BCl3 valve closed
4/5/2012	7:20:57 PM	PH3 valve closed
4/5/2012	7:20:57 PM	SiCl4 pre valve closed
4/5/2012	7:20:57 PM	SiCl4 post valve closed
4/5/2012	7:20:57 PM	Bypass valve closed
4/5/2012	7:20:57 PM	Bubbler valve closed
4/5/2012	7:20:57 PM	Helium valve opened
4/5/2012	7:20:57 PM	Main Vac valve opened
4/5/2012	7:20:57 PM	Helium MFC set to  20.000000
4/5/2012	7:20:57 PM	H2 MFC set to  0.000000
4/5/2012	7:20:57 PM	BCl3 MFC set to  0.000000
4/5/2012	7:20:57 PM	PH3 MFC set to  0.000000
4/5/2012	7:20:57 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:20:57 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:20:57 PM	Tube furnace set to 200
4/5/2012	7:21:27 PM	Helium valve closed
4/5/2012	7:21:27 PM	H2 valve closed
4/5/2012	7:21:27 PM	BCl3 valve closed
4/5/2012	7:21:27 PM	PH3 valve closed
4/5/2012	7:21:27 PM	SiCl4 pre valve closed
4/5/2012	7:21:27 PM	SiCl4 post valve closed
4/5/2012	7:21:27 PM	Bypass valve closed
4/5/2012	7:21:27 PM	Bubbler valve closed
4/5/2012	7:21:27 PM	Main Vac valve opened
4/5/2012	7:21:27 PM	Helium MFC set to  0.000000
4/5/2012	7:21:27 PM	H2 MFC set to  0.000000
4/5/2012	7:21:27 PM	BCl3 MFC set to  0.000000
4/5/2012	7:21:27 PM	PH3 MFC set to  0.000000
4/5/2012	7:21:27 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:21:27 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:21:27 PM	Tube furnace set to 200
4/5/2012	7:21:57 PM	H2 valve closed
4/5/2012	7:21:57 PM	BCl3 valve closed
4/5/2012	7:21:57 PM	PH3 valve closed
4/5/2012	7:21:57 PM	SiCl4 pre valve closed
4/5/2012	7:21:57 PM	SiCl4 post valve closed
4/5/2012	7:21:57 PM	Bypass valve closed
4/5/2012	7:21:57 PM	Bubbler valve closed
4/5/2012	7:21:57 PM	Helium valve opened
4/5/2012	7:21:57 PM	Main Vac valve opened
4/5/2012	7:21:57 PM	Helium MFC set to  20.000000
4/5/2012	7:21:57 PM	H2 MFC set to  0.000000
4/5/2012	7:21:57 PM	BCl3 MFC set to  0.000000
4/5/2012	7:21:57 PM	PH3 MFC set to  0.000000
4/5/2012	7:21:57 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:21:57 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:21:58 PM	Tube furnace set to 200
4/5/2012	7:22:28 PM	Helium valve closed
4/5/2012	7:22:28 PM	H2 valve closed
4/5/2012	7:22:28 PM	BCl3 valve closed
4/5/2012	7:22:28 PM	PH3 valve closed
4/5/2012	7:22:28 PM	SiCl4 pre valve closed
4/5/2012	7:22:28 PM	SiCl4 post valve closed
4/5/2012	7:22:28 PM	Bypass valve closed
4/5/2012	7:22:28 PM	Bubbler valve closed
4/5/2012	7:22:28 PM	Main Vac valve opened
4/5/2012	7:22:28 PM	Helium MFC set to  0.000000
4/5/2012	7:22:28 PM	H2 MFC set to  0.000000
4/5/2012	7:22:28 PM	BCl3 MFC set to  0.000000
4/5/2012	7:22:28 PM	PH3 MFC set to  0.000000
4/5/2012	7:22:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:22:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:22:28 PM	Tube furnace set to 200
4/5/2012	7:22:58 PM	H2 valve closed
4/5/2012	7:22:58 PM	BCl3 valve closed
4/5/2012	7:22:58 PM	PH3 valve closed
4/5/2012	7:22:58 PM	SiCl4 pre valve closed
4/5/2012	7:22:58 PM	SiCl4 post valve closed
4/5/2012	7:22:58 PM	Bypass valve closed
4/5/2012	7:22:58 PM	Bubbler valve closed
4/5/2012	7:22:58 PM	Helium valve opened
4/5/2012	7:22:58 PM	Main Vac valve opened
4/5/2012	7:22:58 PM	Helium MFC set to  20.000000
4/5/2012	7:22:58 PM	H2 MFC set to  0.000000
4/5/2012	7:22:58 PM	BCl3 MFC set to  0.000000
4/5/2012	7:22:58 PM	PH3 MFC set to  0.000000
4/5/2012	7:22:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:22:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:22:58 PM	Tube furnace set to 200
4/5/2012	7:23:28 PM	Helium valve closed
4/5/2012	7:23:28 PM	H2 valve closed
4/5/2012	7:23:28 PM	BCl3 valve closed
4/5/2012	7:23:28 PM	PH3 valve closed
4/5/2012	7:23:28 PM	SiCl4 pre valve closed
4/5/2012	7:23:28 PM	SiCl4 post valve closed
4/5/2012	7:23:28 PM	Bypass valve closed
4/5/2012	7:23:28 PM	Bubbler valve closed
4/5/2012	7:23:28 PM	Main Vac valve opened
4/5/2012	7:23:28 PM	Helium MFC set to  0.000000
4/5/2012	7:23:28 PM	H2 MFC set to  0.000000
4/5/2012	7:23:28 PM	BCl3 MFC set to  0.000000
4/5/2012	7:23:28 PM	PH3 MFC set to  0.000000
4/5/2012	7:23:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:23:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:23:28 PM	Tube furnace set to 200
4/5/2012	7:23:58 PM	H2 valve closed
4/5/2012	7:23:58 PM	BCl3 valve closed
4/5/2012	7:23:58 PM	PH3 valve closed
4/5/2012	7:23:58 PM	SiCl4 pre valve closed
4/5/2012	7:23:58 PM	SiCl4 post valve closed
4/5/2012	7:23:58 PM	Bypass valve closed
4/5/2012	7:23:58 PM	Bubbler valve closed
4/5/2012	7:23:58 PM	Helium valve opened
4/5/2012	7:23:58 PM	Main Vac valve opened
4/5/2012	7:23:58 PM	Helium MFC set to  20.000000
4/5/2012	7:23:58 PM	H2 MFC set to  0.000000
4/5/2012	7:23:58 PM	BCl3 MFC set to  0.000000
4/5/2012	7:23:58 PM	PH3 MFC set to  0.000000
4/5/2012	7:23:58 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:23:58 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:23:58 PM	Tube furnace set to 200
4/5/2012	7:24:28 PM	Helium valve closed
4/5/2012	7:24:29 PM	H2 valve closed
4/5/2012	7:24:29 PM	BCl3 valve closed
4/5/2012	7:24:29 PM	PH3 valve closed
4/5/2012	7:24:29 PM	SiCl4 pre valve closed
4/5/2012	7:24:29 PM	SiCl4 post valve closed
4/5/2012	7:24:29 PM	Bypass valve closed
4/5/2012	7:24:29 PM	Bubbler valve closed
4/5/2012	7:24:29 PM	Main Vac valve opened
4/5/2012	7:24:29 PM	Helium MFC set to  0.000000
4/5/2012	7:24:29 PM	H2 MFC set to  0.000000
4/5/2012	7:24:29 PM	BCl3 MFC set to  0.000000
4/5/2012	7:24:29 PM	PH3 MFC set to  0.000000
4/5/2012	7:24:29 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:24:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:24:29 PM	Tube furnace set to 200
4/5/2012	7:24:43 PM	H2 valve closed
4/5/2012	7:24:43 PM	BCl3 valve closed
4/5/2012	7:24:43 PM	PH3 valve closed
4/5/2012	7:24:43 PM	SiCl4 pre valve closed
4/5/2012	7:24:43 PM	SiCl4 post valve closed
4/5/2012	7:24:43 PM	Bypass valve closed
4/5/2012	7:24:43 PM	Bubbler valve closed
4/5/2012	7:24:43 PM	Helium valve opened
4/5/2012	7:24:43 PM	Main Vac valve opened
4/5/2012	7:24:43 PM	Helium MFC set to  20.000000
4/5/2012	7:24:43 PM	H2 MFC set to  0.000000
4/5/2012	7:24:43 PM	BCl3 MFC set to  0.000000
4/5/2012	7:24:43 PM	PH3 MFC set to  0.000000
4/5/2012	7:24:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:24:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:24:43 PM	Tube furnace set to 200
4/5/2012	7:24:44 PM	Helium valve closed
4/5/2012	7:24:44 PM	H2 valve closed
4/5/2012	7:24:44 PM	BCl3 valve closed
4/5/2012	7:24:44 PM	PH3 valve closed
4/5/2012	7:24:44 PM	SiCl4 pre valve closed
4/5/2012	7:24:44 PM	SiCl4 post valve closed
4/5/2012	7:24:44 PM	Bypass valve closed
4/5/2012	7:24:44 PM	Bubbler valve closed
4/5/2012	7:24:44 PM	Main Vac valve opened
4/5/2012	7:24:44 PM	Helium MFC set to  0.000000
4/5/2012	7:24:44 PM	H2 MFC set to  0.000000
4/5/2012	7:24:44 PM	BCl3 MFC set to  0.000000
4/5/2012	7:24:44 PM	PH3 MFC set to  0.000000
4/5/2012	7:24:44 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:24:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:24:44 PM	Tube furnace set to 200
4/5/2012	7:25:14 PM	H2 valve closed
4/5/2012	7:25:14 PM	BCl3 valve closed
4/5/2012	7:25:14 PM	PH3 valve closed
4/5/2012	7:25:14 PM	SiCl4 pre valve closed
4/5/2012	7:25:14 PM	SiCl4 post valve closed
4/5/2012	7:25:14 PM	Bypass valve closed
4/5/2012	7:25:14 PM	Bubbler valve closed
4/5/2012	7:25:14 PM	Helium valve opened
4/5/2012	7:25:14 PM	Main Vac valve opened
4/5/2012	7:25:14 PM	Helium MFC set to  20.000000
4/5/2012	7:25:14 PM	H2 MFC set to  0.000000
4/5/2012	7:25:14 PM	BCl3 MFC set to  0.000000
4/5/2012	7:25:14 PM	PH3 MFC set to  0.000000
4/5/2012	7:25:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:25:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:25:14 PM	Tube furnace set to 200
4/5/2012	7:25:44 PM	Helium valve closed
4/5/2012	7:25:44 PM	H2 valve closed
4/5/2012	7:25:44 PM	BCl3 valve closed
4/5/2012	7:25:44 PM	PH3 valve closed
4/5/2012	7:25:44 PM	SiCl4 pre valve closed
4/5/2012	7:25:44 PM	SiCl4 post valve closed
4/5/2012	7:25:44 PM	Bypass valve closed
4/5/2012	7:25:44 PM	Bubbler valve closed
4/5/2012	7:25:44 PM	Main Vac valve opened
4/5/2012	7:25:44 PM	Helium MFC set to  0.000000
4/5/2012	7:25:44 PM	H2 MFC set to  0.000000
4/5/2012	7:25:44 PM	BCl3 MFC set to  0.000000
4/5/2012	7:25:44 PM	PH3 MFC set to  0.000000
4/5/2012	7:25:44 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:25:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:25:44 PM	Tube furnace set to 0
4/5/2012	7:25:45 PM	Run finished at 7:25 PM
4/5/2012	7:27:05 PM	Main Vac valve closed
4/5/2012	7:27:13 PM	Main Vac valve opened
4/5/2012	7:27:21 PM	Recipe started at 7:27 PM
4/5/2012	7:27:21 PM	Helium valve closed
4/5/2012	7:27:21 PM	H2 valve closed
4/5/2012	7:27:21 PM	BCl3 valve closed
4/5/2012	7:27:21 PM	PH3 valve closed
4/5/2012	7:27:21 PM	SiCl4 pre valve closed
4/5/2012	7:27:21 PM	SiCl4 post valve closed
4/5/2012	7:27:21 PM	Main Vac valve closed
4/5/2012	7:27:21 PM	Bypass valve closed
4/5/2012	7:27:21 PM	Bubbler valve closed
4/5/2012	7:27:21 PM	Helium MFC set to  0.000000
4/5/2012	7:27:21 PM	H2 MFC set to  0.000000
4/5/2012	7:27:21 PM	BCl3 MFC set to  0.000000
4/5/2012	7:27:21 PM	PH3 MFC set to  0.000000
4/5/2012	7:27:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:27:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:27:21 PM	Tube furnace set to 0
4/5/2012	7:27:24 PM	Helium valve closed
4/5/2012	7:27:24 PM	BCl3 valve closed
4/5/2012	7:27:24 PM	PH3 valve closed
4/5/2012	7:27:24 PM	SiCl4 pre valve closed
4/5/2012	7:27:24 PM	SiCl4 post valve closed
4/5/2012	7:27:24 PM	Main Vac valve closed
4/5/2012	7:27:24 PM	Bypass valve closed
4/5/2012	7:27:24 PM	Bubbler valve closed
4/5/2012	7:27:24 PM	H2 valve opened
4/5/2012	7:27:24 PM	Helium MFC set to  0.000000
4/5/2012	7:27:24 PM	H2 MFC set to  500.000000
4/5/2012	7:27:24 PM	BCl3 MFC set to  0.000000
4/5/2012	7:27:24 PM	PH3 MFC set to  0.000000
4/5/2012	7:27:24 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:27:24 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:27:24 PM	Tube furnace set to 0
4/5/2012	7:28:28 PM	Helium valve closed
4/5/2012	7:28:28 PM	BCl3 valve closed
4/5/2012	7:28:28 PM	PH3 valve closed
4/5/2012	7:28:28 PM	SiCl4 pre valve closed
4/5/2012	7:28:28 PM	SiCl4 post valve closed
4/5/2012	7:28:28 PM	Main Vac valve closed
4/5/2012	7:28:28 PM	Bypass valve closed
4/5/2012	7:28:28 PM	H2 valve opened
4/5/2012	7:28:28 PM	Bubbler valve opened
4/5/2012	7:28:28 PM	Helium MFC set to  0.000000
4/5/2012	7:28:28 PM	H2 MFC set to  500.000000
4/5/2012	7:28:28 PM	BCl3 MFC set to  0.000000
4/5/2012	7:28:28 PM	PH3 MFC set to  0.000000
4/5/2012	7:28:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:28:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:28:28 PM	Tube furnace set to 0
4/5/2012	7:28:29 PM	Helium valve closed
4/5/2012	7:28:29 PM	BCl3 valve closed
4/5/2012	7:28:29 PM	PH3 valve closed
4/5/2012	7:28:29 PM	SiCl4 pre valve closed
4/5/2012	7:28:29 PM	SiCl4 post valve closed
4/5/2012	7:28:29 PM	Main Vac valve closed
4/5/2012	7:28:29 PM	Bypass valve closed
4/5/2012	7:28:29 PM	H2 valve opened
4/5/2012	7:28:29 PM	Bubbler valve opened
4/5/2012	7:28:29 PM	Helium MFC set to  0.000000
4/5/2012	7:28:29 PM	H2 MFC set to  500.000000
4/5/2012	7:28:29 PM	BCl3 MFC set to  0.000000
4/5/2012	7:28:29 PM	PH3 MFC set to  0.000000
4/5/2012	7:28:29 PM	SiCl4 MFC set to  0.000000
4/5/2012	7:28:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:28:29 PM	Tube furnace set to 1000
4/5/2012	7:48:29 PM	Helium valve closed
4/5/2012	7:48:29 PM	PH3 valve closed
4/5/2012	7:48:29 PM	Main Vac valve closed
4/5/2012	7:48:29 PM	Bypass valve closed
4/5/2012	7:48:29 PM	H2 valve opened
4/5/2012	7:48:29 PM	BCl3 valve opened
4/5/2012	7:48:29 PM	SiCl4 pre valve opened
4/5/2012	7:48:29 PM	SiCl4 post valve opened
4/5/2012	7:48:29 PM	Bubbler valve opened
4/5/2012	7:48:29 PM	Helium MFC set to  0.000000
4/5/2012	7:48:29 PM	H2 MFC set to  450.000000
4/5/2012	7:48:29 PM	BCl3 MFC set to  1.500000
4/5/2012	7:48:29 PM	PH3 MFC set to  0.000000
4/5/2012	7:48:29 PM	SiCl4 MFC set to  50.000000
4/5/2012	7:48:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	7:48:29 PM	Tube furnace set to 1000
4/5/2012	8:00:29 PM	Helium valve closed
4/5/2012	8:00:29 PM	BCl3 valve closed
4/5/2012	8:00:29 PM	PH3 valve closed
4/5/2012	8:00:29 PM	SiCl4 pre valve closed
4/5/2012	8:00:29 PM	SiCl4 post valve closed
4/5/2012	8:00:29 PM	Main Vac valve closed
4/5/2012	8:00:29 PM	Bypass valve closed
4/5/2012	8:00:29 PM	H2 valve opened
4/5/2012	8:00:29 PM	Bubbler valve opened
4/5/2012	8:00:29 PM	Helium MFC set to  0.000000
4/5/2012	8:00:29 PM	H2 MFC set to  500.000000
4/5/2012	8:00:29 PM	BCl3 MFC set to  0.000000
4/5/2012	8:00:29 PM	PH3 MFC set to  0.000000
4/5/2012	8:00:29 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:00:29 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:00:30 PM	Tube furnace set to 950
4/5/2012	8:02:30 PM	Helium valve closed
4/5/2012	8:02:30 PM	BCl3 valve closed
4/5/2012	8:02:30 PM	PH3 valve closed
4/5/2012	8:02:30 PM	SiCl4 pre valve closed
4/5/2012	8:02:30 PM	SiCl4 post valve closed
4/5/2012	8:02:30 PM	Main Vac valve closed
4/5/2012	8:02:30 PM	Bypass valve closed
4/5/2012	8:02:30 PM	H2 valve opened
4/5/2012	8:02:30 PM	Bubbler valve opened
4/5/2012	8:02:30 PM	Helium MFC set to  0.000000
4/5/2012	8:02:30 PM	H2 MFC set to  500.000000
4/5/2012	8:02:30 PM	BCl3 MFC set to  0.000000
4/5/2012	8:02:30 PM	PH3 MFC set to  0.000000
4/5/2012	8:02:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:02:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:02:30 PM	Tube furnace set to 900
4/5/2012	8:04:30 PM	Helium valve closed
4/5/2012	8:04:30 PM	BCl3 valve closed
4/5/2012	8:04:30 PM	PH3 valve closed
4/5/2012	8:04:30 PM	SiCl4 pre valve closed
4/5/2012	8:04:30 PM	SiCl4 post valve closed
4/5/2012	8:04:30 PM	Main Vac valve closed
4/5/2012	8:04:30 PM	Bypass valve closed
4/5/2012	8:04:30 PM	H2 valve opened
4/5/2012	8:04:30 PM	Bubbler valve opened
4/5/2012	8:04:30 PM	Helium MFC set to  0.000000
4/5/2012	8:04:30 PM	H2 MFC set to  500.000000
4/5/2012	8:04:30 PM	BCl3 MFC set to  0.000000
4/5/2012	8:04:30 PM	PH3 MFC set to  0.000000
4/5/2012	8:04:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:04:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:04:30 PM	Tube furnace set to 850
4/5/2012	8:06:30 PM	H2 valve closed
4/5/2012	8:06:30 PM	BCl3 valve closed
4/5/2012	8:06:30 PM	PH3 valve closed
4/5/2012	8:06:30 PM	SiCl4 pre valve closed
4/5/2012	8:06:30 PM	SiCl4 post valve closed
4/5/2012	8:06:30 PM	Main Vac valve closed
4/5/2012	8:06:30 PM	Bypass valve closed
4/5/2012	8:06:30 PM	Helium valve opened
4/5/2012	8:06:30 PM	Bubbler valve opened
4/5/2012	8:06:30 PM	Helium MFC set to  500.000000
4/5/2012	8:06:30 PM	H2 MFC set to  0.000000
4/5/2012	8:06:30 PM	BCl3 MFC set to  0.000000
4/5/2012	8:06:30 PM	PH3 MFC set to  0.000000
4/5/2012	8:06:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:06:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:06:30 PM	Tube furnace set to 800
4/5/2012	8:08:30 PM	H2 valve closed
4/5/2012	8:08:30 PM	BCl3 valve closed
4/5/2012	8:08:30 PM	PH3 valve closed
4/5/2012	8:08:30 PM	SiCl4 pre valve closed
4/5/2012	8:08:30 PM	SiCl4 post valve closed
4/5/2012	8:08:30 PM	Main Vac valve closed
4/5/2012	8:08:30 PM	Bypass valve closed
4/5/2012	8:08:30 PM	Helium valve opened
4/5/2012	8:08:30 PM	Bubbler valve opened
4/5/2012	8:08:30 PM	Helium MFC set to  500.000000
4/5/2012	8:08:30 PM	H2 MFC set to  0.000000
4/5/2012	8:08:30 PM	BCl3 MFC set to  0.000000
4/5/2012	8:08:30 PM	PH3 MFC set to  0.000000
4/5/2012	8:08:30 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:08:30 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:08:31 PM	Tube furnace set to 750
4/5/2012	8:10:31 PM	H2 valve closed
4/5/2012	8:10:31 PM	BCl3 valve closed
4/5/2012	8:10:31 PM	PH3 valve closed
4/5/2012	8:10:31 PM	SiCl4 pre valve closed
4/5/2012	8:10:31 PM	SiCl4 post valve closed
4/5/2012	8:10:31 PM	Main Vac valve closed
4/5/2012	8:10:31 PM	Bypass valve closed
4/5/2012	8:10:31 PM	Helium valve opened
4/5/2012	8:10:31 PM	Bubbler valve opened
4/5/2012	8:10:31 PM	Helium MFC set to  500.000000
4/5/2012	8:10:31 PM	H2 MFC set to  0.000000
4/5/2012	8:10:31 PM	BCl3 MFC set to  0.000000
4/5/2012	8:10:31 PM	PH3 MFC set to  0.000000
4/5/2012	8:10:31 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:10:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:10:31 PM	Tube furnace set to 0
4/5/2012	8:30:31 PM	Helium valve closed
4/5/2012	8:30:31 PM	H2 valve closed
4/5/2012	8:30:31 PM	BCl3 valve closed
4/5/2012	8:30:31 PM	PH3 valve closed
4/5/2012	8:30:31 PM	SiCl4 pre valve closed
4/5/2012	8:30:31 PM	SiCl4 post valve closed
4/5/2012	8:30:31 PM	Main Vac valve closed
4/5/2012	8:30:31 PM	Bypass valve closed
4/5/2012	8:30:31 PM	Bubbler valve closed
4/5/2012	8:30:31 PM	Helium MFC set to  0.000000
4/5/2012	8:30:31 PM	H2 MFC set to  0.000000
4/5/2012	8:30:31 PM	BCl3 MFC set to  0.000000
4/5/2012	8:30:31 PM	PH3 MFC set to  0.000000
4/5/2012	8:30:31 PM	SiCl4 MFC set to  0.000000
4/5/2012	8:30:31 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	8:30:31 PM	Tube furnace set to 0
4/5/2012	8:30:32 PM	Run finished at 8:30 PM
4/5/2012	9:11:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	9:11:39 PM	Recipe started at 9:11 PM
4/5/2012	9:11:39 PM	Helium valve closed
4/5/2012	9:11:39 PM	H2 valve closed
4/5/2012	9:11:39 PM	BCl3 valve closed
4/5/2012	9:11:39 PM	PH3 valve closed
4/5/2012	9:11:39 PM	SiCl4 pre valve closed
4/5/2012	9:11:39 PM	SiCl4 post valve closed
4/5/2012	9:11:39 PM	Main Vac valve closed
4/5/2012	9:11:39 PM	Bypass valve closed
4/5/2012	9:11:39 PM	Bubbler valve closed
4/5/2012	9:11:39 PM	Helium MFC set to  0.000000
4/5/2012	9:11:39 PM	H2 MFC set to  0.000000
4/5/2012	9:11:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:11:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:11:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:11:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:11:40 PM	Tube furnace set to 0
4/5/2012	9:11:43 PM	H2 valve closed
4/5/2012	9:11:43 PM	BCl3 valve closed
4/5/2012	9:11:43 PM	PH3 valve closed
4/5/2012	9:11:43 PM	SiCl4 pre valve closed
4/5/2012	9:11:43 PM	SiCl4 post valve closed
4/5/2012	9:11:43 PM	Main Vac valve closed
4/5/2012	9:11:43 PM	Bypass valve closed
4/5/2012	9:11:43 PM	Bubbler valve closed
4/5/2012	9:11:43 PM	Helium valve opened
4/5/2012	9:11:43 PM	Helium MFC set to  500.000000
4/5/2012	9:11:43 PM	H2 MFC set to  0.000000
4/5/2012	9:11:43 PM	BCl3 MFC set to  0.000000
4/5/2012	9:11:43 PM	PH3 MFC set to  0.000000
4/5/2012	9:11:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:11:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:11:43 PM	Tube furnace set to 0
4/5/2012	9:11:49 PM	Helium valve closed
4/5/2012	9:11:49 PM	H2 valve closed
4/5/2012	9:11:49 PM	BCl3 valve closed
4/5/2012	9:11:49 PM	PH3 valve closed
4/5/2012	9:11:49 PM	SiCl4 pre valve closed
4/5/2012	9:11:49 PM	SiCl4 post valve closed
4/5/2012	9:11:49 PM	Main Vac valve closed
4/5/2012	9:11:49 PM	Bypass valve closed
4/5/2012	9:11:49 PM	Bubbler valve closed
4/5/2012	9:11:49 PM	Helium MFC set to  0.000000
4/5/2012	9:11:49 PM	H2 MFC set to  0.000000
4/5/2012	9:11:49 PM	BCl3 MFC set to  0.000000
4/5/2012	9:11:49 PM	PH3 MFC set to  0.000000
4/5/2012	9:11:49 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:11:49 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:11:50 PM	Tube furnace set to 0
4/5/2012	9:11:51 PM	Run finished at 9:11 PM
4/5/2012	9:11:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	9:13:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	9:13:48 PM	Recipe started at 9:13 PM
4/5/2012	9:13:48 PM	Helium valve closed
4/5/2012	9:13:48 PM	H2 valve closed
4/5/2012	9:13:48 PM	BCl3 valve closed
4/5/2012	9:13:48 PM	PH3 valve closed
4/5/2012	9:13:48 PM	SiCl4 pre valve closed
4/5/2012	9:13:48 PM	SiCl4 post valve closed
4/5/2012	9:13:48 PM	Main Vac valve closed
4/5/2012	9:13:48 PM	Bubbler valve closed
4/5/2012	9:13:48 PM	Bypass valve opened
4/5/2012	9:13:48 PM	Helium MFC set to  0.000000
4/5/2012	9:13:48 PM	H2 MFC set to  0.000000
4/5/2012	9:13:48 PM	BCl3 MFC set to  0.000000
4/5/2012	9:13:48 PM	PH3 MFC set to  0.000000
4/5/2012	9:13:48 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:13:48 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:13:48 PM	Tube furnace set to 0
4/5/2012	9:14:46 PM	Helium valve closed
4/5/2012	9:14:46 PM	H2 valve closed
4/5/2012	9:14:46 PM	BCl3 valve closed
4/5/2012	9:14:46 PM	PH3 valve closed
4/5/2012	9:14:46 PM	SiCl4 pre valve closed
4/5/2012	9:14:46 PM	SiCl4 post valve closed
4/5/2012	9:14:46 PM	Main Vac valve closed
4/5/2012	9:14:46 PM	Bubbler valve closed
4/5/2012	9:14:46 PM	Bypass valve opened
4/5/2012	9:14:46 PM	Helium MFC set to  0.000000
4/5/2012	9:14:46 PM	H2 MFC set to  0.000000
4/5/2012	9:14:46 PM	BCl3 MFC set to  0.000000
4/5/2012	9:14:46 PM	PH3 MFC set to  0.000000
4/5/2012	9:14:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:14:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:14:46 PM	Tube furnace set to 0
4/5/2012	9:15:46 PM	Helium valve closed
4/5/2012	9:15:46 PM	H2 valve closed
4/5/2012	9:15:46 PM	BCl3 valve closed
4/5/2012	9:15:46 PM	PH3 valve closed
4/5/2012	9:15:46 PM	SiCl4 pre valve closed
4/5/2012	9:15:46 PM	SiCl4 post valve closed
4/5/2012	9:15:46 PM	Bypass valve closed
4/5/2012	9:15:46 PM	Bubbler valve closed
4/5/2012	9:15:46 PM	Main Vac valve opened
4/5/2012	9:15:46 PM	Helium MFC set to  0.000000
4/5/2012	9:15:46 PM	H2 MFC set to  0.000000
4/5/2012	9:15:47 PM	BCl3 MFC set to  0.000000
4/5/2012	9:15:47 PM	PH3 MFC set to  0.000000
4/5/2012	9:15:47 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:15:47 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:15:47 PM	Tube furnace set to 0
4/5/2012	9:15:48 PM	Run finished at 9:15 PM
4/5/2012	9:15:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	9:18:36 PM	Recipe started at 9:18 PM
4/5/2012	9:18:36 PM	Helium valve closed
4/5/2012	9:18:36 PM	H2 valve closed
4/5/2012	9:18:36 PM	BCl3 valve closed
4/5/2012	9:18:36 PM	PH3 valve closed
4/5/2012	9:18:36 PM	SiCl4 pre valve closed
4/5/2012	9:18:36 PM	SiCl4 post valve closed
4/5/2012	9:18:36 PM	Bypass valve closed
4/5/2012	9:18:36 PM	Bubbler valve closed
4/5/2012	9:18:36 PM	Main Vac valve opened
4/5/2012	9:18:36 PM	Helium MFC set to  0.000000
4/5/2012	9:18:36 PM	H2 MFC set to  0.000000
4/5/2012	9:18:36 PM	BCl3 MFC set to  0.000000
4/5/2012	9:18:36 PM	PH3 MFC set to  0.000000
4/5/2012	9:18:36 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:18:36 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:18:36 PM	Tube furnace set to 0
4/5/2012	9:19:06 PM	H2 valve closed
4/5/2012	9:19:06 PM	BCl3 valve closed
4/5/2012	9:19:06 PM	PH3 valve closed
4/5/2012	9:19:06 PM	SiCl4 pre valve closed
4/5/2012	9:19:06 PM	SiCl4 post valve closed
4/5/2012	9:19:06 PM	Bypass valve closed
4/5/2012	9:19:06 PM	Bubbler valve closed
4/5/2012	9:19:06 PM	Helium valve opened
4/5/2012	9:19:06 PM	Main Vac valve opened
4/5/2012	9:19:06 PM	Helium MFC set to  20.000000
4/5/2012	9:19:06 PM	H2 MFC set to  0.000000
4/5/2012	9:19:06 PM	BCl3 MFC set to  0.000000
4/5/2012	9:19:06 PM	PH3 MFC set to  0.000000
4/5/2012	9:19:06 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:19:06 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:19:07 PM	Tube furnace set to 0
4/5/2012	9:19:37 PM	Helium valve closed
4/5/2012	9:19:37 PM	H2 valve closed
4/5/2012	9:19:37 PM	BCl3 valve closed
4/5/2012	9:19:37 PM	PH3 valve closed
4/5/2012	9:19:37 PM	SiCl4 pre valve closed
4/5/2012	9:19:37 PM	SiCl4 post valve closed
4/5/2012	9:19:37 PM	Bypass valve closed
4/5/2012	9:19:37 PM	Bubbler valve closed
4/5/2012	9:19:37 PM	Main Vac valve opened
4/5/2012	9:19:37 PM	Helium MFC set to  0.000000
4/5/2012	9:19:37 PM	H2 MFC set to  0.000000
4/5/2012	9:19:37 PM	BCl3 MFC set to  0.000000
4/5/2012	9:19:37 PM	PH3 MFC set to  0.000000
4/5/2012	9:19:37 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:19:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:19:37 PM	Tube furnace set to 0
4/5/2012	9:20:07 PM	H2 valve closed
4/5/2012	9:20:07 PM	BCl3 valve closed
4/5/2012	9:20:07 PM	PH3 valve closed
4/5/2012	9:20:07 PM	SiCl4 pre valve closed
4/5/2012	9:20:07 PM	SiCl4 post valve closed
4/5/2012	9:20:07 PM	Bypass valve closed
4/5/2012	9:20:07 PM	Bubbler valve closed
4/5/2012	9:20:07 PM	Helium valve opened
4/5/2012	9:20:07 PM	Main Vac valve opened
4/5/2012	9:20:07 PM	Helium MFC set to  20.000000
4/5/2012	9:20:07 PM	H2 MFC set to  0.000000
4/5/2012	9:20:07 PM	BCl3 MFC set to  0.000000
4/5/2012	9:20:07 PM	PH3 MFC set to  0.000000
4/5/2012	9:20:07 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:20:07 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:20:07 PM	Tube furnace set to 0
4/5/2012	9:20:37 PM	Helium valve closed
4/5/2012	9:20:37 PM	H2 valve closed
4/5/2012	9:20:37 PM	BCl3 valve closed
4/5/2012	9:20:37 PM	PH3 valve closed
4/5/2012	9:20:37 PM	SiCl4 pre valve closed
4/5/2012	9:20:37 PM	SiCl4 post valve closed
4/5/2012	9:20:37 PM	Bypass valve closed
4/5/2012	9:20:37 PM	Bubbler valve closed
4/5/2012	9:20:37 PM	Main Vac valve opened
4/5/2012	9:20:37 PM	Helium MFC set to  0.000000
4/5/2012	9:20:37 PM	H2 MFC set to  0.000000
4/5/2012	9:20:37 PM	BCl3 MFC set to  0.000000
4/5/2012	9:20:37 PM	PH3 MFC set to  0.000000
4/5/2012	9:20:37 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:20:37 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:20:37 PM	Tube furnace set to 0
4/5/2012	9:21:07 PM	H2 valve closed
4/5/2012	9:21:07 PM	BCl3 valve closed
4/5/2012	9:21:07 PM	PH3 valve closed
4/5/2012	9:21:07 PM	SiCl4 pre valve closed
4/5/2012	9:21:07 PM	SiCl4 post valve closed
4/5/2012	9:21:07 PM	Bypass valve closed
4/5/2012	9:21:07 PM	Bubbler valve closed
4/5/2012	9:21:07 PM	Helium valve opened
4/5/2012	9:21:07 PM	Main Vac valve opened
4/5/2012	9:21:07 PM	Helium MFC set to  20.000000
4/5/2012	9:21:07 PM	H2 MFC set to  0.000000
4/5/2012	9:21:07 PM	BCl3 MFC set to  0.000000
4/5/2012	9:21:07 PM	PH3 MFC set to  0.000000
4/5/2012	9:21:07 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:21:07 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:21:08 PM	Tube furnace set to 0
4/5/2012	9:21:38 PM	Helium valve closed
4/5/2012	9:21:38 PM	H2 valve closed
4/5/2012	9:21:38 PM	BCl3 valve closed
4/5/2012	9:21:38 PM	PH3 valve closed
4/5/2012	9:21:38 PM	SiCl4 pre valve closed
4/5/2012	9:21:38 PM	SiCl4 post valve closed
4/5/2012	9:21:38 PM	Bypass valve closed
4/5/2012	9:21:38 PM	Bubbler valve closed
4/5/2012	9:21:38 PM	Main Vac valve opened
4/5/2012	9:21:38 PM	Helium MFC set to  0.000000
4/5/2012	9:21:38 PM	H2 MFC set to  0.000000
4/5/2012	9:21:38 PM	BCl3 MFC set to  0.000000
4/5/2012	9:21:38 PM	PH3 MFC set to  0.000000
4/5/2012	9:21:38 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:21:38 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:21:38 PM	Tube furnace set to 0
4/5/2012	9:22:08 PM	H2 valve closed
4/5/2012	9:22:08 PM	BCl3 valve closed
4/5/2012	9:22:08 PM	PH3 valve closed
4/5/2012	9:22:08 PM	SiCl4 pre valve closed
4/5/2012	9:22:08 PM	SiCl4 post valve closed
4/5/2012	9:22:08 PM	Bypass valve closed
4/5/2012	9:22:08 PM	Bubbler valve closed
4/5/2012	9:22:08 PM	Helium valve opened
4/5/2012	9:22:08 PM	Main Vac valve opened
4/5/2012	9:22:08 PM	Helium MFC set to  20.000000
4/5/2012	9:22:08 PM	H2 MFC set to  0.000000
4/5/2012	9:22:08 PM	BCl3 MFC set to  0.000000
4/5/2012	9:22:08 PM	PH3 MFC set to  0.000000
4/5/2012	9:22:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:22:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:22:08 PM	Tube furnace set to 0
4/5/2012	9:22:38 PM	Helium valve closed
4/5/2012	9:22:38 PM	H2 valve closed
4/5/2012	9:22:38 PM	BCl3 valve closed
4/5/2012	9:22:38 PM	PH3 valve closed
4/5/2012	9:22:38 PM	SiCl4 pre valve closed
4/5/2012	9:22:38 PM	SiCl4 post valve closed
4/5/2012	9:22:38 PM	Bypass valve closed
4/5/2012	9:22:38 PM	Bubbler valve closed
4/5/2012	9:22:38 PM	Main Vac valve opened
4/5/2012	9:22:38 PM	Helium MFC set to  0.000000
4/5/2012	9:22:38 PM	H2 MFC set to  0.000000
4/5/2012	9:22:38 PM	BCl3 MFC set to  0.000000
4/5/2012	9:22:38 PM	PH3 MFC set to  0.000000
4/5/2012	9:22:38 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:22:38 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:22:38 PM	Tube furnace set to 0
4/5/2012	9:23:08 PM	H2 valve closed
4/5/2012	9:23:08 PM	BCl3 valve closed
4/5/2012	9:23:08 PM	PH3 valve closed
4/5/2012	9:23:08 PM	SiCl4 pre valve closed
4/5/2012	9:23:08 PM	SiCl4 post valve closed
4/5/2012	9:23:08 PM	Bypass valve closed
4/5/2012	9:23:08 PM	Bubbler valve closed
4/5/2012	9:23:08 PM	Helium valve opened
4/5/2012	9:23:08 PM	Main Vac valve opened
4/5/2012	9:23:08 PM	Helium MFC set to  20.000000
4/5/2012	9:23:08 PM	H2 MFC set to  0.000000
4/5/2012	9:23:08 PM	BCl3 MFC set to  0.000000
4/5/2012	9:23:08 PM	PH3 MFC set to  0.000000
4/5/2012	9:23:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:23:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:23:08 PM	Tube furnace set to 0
4/5/2012	9:23:38 PM	Helium valve closed
4/5/2012	9:23:38 PM	H2 valve closed
4/5/2012	9:23:38 PM	BCl3 valve closed
4/5/2012	9:23:38 PM	PH3 valve closed
4/5/2012	9:23:38 PM	SiCl4 pre valve closed
4/5/2012	9:23:38 PM	SiCl4 post valve closed
4/5/2012	9:23:38 PM	Bypass valve closed
4/5/2012	9:23:38 PM	Bubbler valve closed
4/5/2012	9:23:39 PM	Main Vac valve opened
4/5/2012	9:23:39 PM	Helium MFC set to  0.000000
4/5/2012	9:23:39 PM	H2 MFC set to  0.000000
4/5/2012	9:23:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:23:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:23:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:23:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:23:39 PM	Tube furnace set to 0
4/5/2012	9:24:09 PM	H2 valve closed
4/5/2012	9:24:09 PM	BCl3 valve closed
4/5/2012	9:24:09 PM	PH3 valve closed
4/5/2012	9:24:09 PM	SiCl4 pre valve closed
4/5/2012	9:24:09 PM	SiCl4 post valve closed
4/5/2012	9:24:09 PM	Bypass valve closed
4/5/2012	9:24:09 PM	Bubbler valve closed
4/5/2012	9:24:09 PM	Helium valve opened
4/5/2012	9:24:09 PM	Main Vac valve opened
4/5/2012	9:24:09 PM	Helium MFC set to  20.000000
4/5/2012	9:24:09 PM	H2 MFC set to  0.000000
4/5/2012	9:24:09 PM	BCl3 MFC set to  0.000000
4/5/2012	9:24:09 PM	PH3 MFC set to  0.000000
4/5/2012	9:24:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:24:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:24:09 PM	Tube furnace set to 0
4/5/2012	9:24:39 PM	Helium valve closed
4/5/2012	9:24:39 PM	H2 valve closed
4/5/2012	9:24:39 PM	BCl3 valve closed
4/5/2012	9:24:39 PM	PH3 valve closed
4/5/2012	9:24:39 PM	SiCl4 pre valve closed
4/5/2012	9:24:39 PM	SiCl4 post valve closed
4/5/2012	9:24:39 PM	Bypass valve closed
4/5/2012	9:24:39 PM	Bubbler valve closed
4/5/2012	9:24:39 PM	Main Vac valve opened
4/5/2012	9:24:39 PM	Helium MFC set to  0.000000
4/5/2012	9:24:39 PM	H2 MFC set to  0.000000
4/5/2012	9:24:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:24:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:24:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:24:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:24:39 PM	Tube furnace set to 0
4/5/2012	9:25:09 PM	H2 valve closed
4/5/2012	9:25:09 PM	BCl3 valve closed
4/5/2012	9:25:09 PM	PH3 valve closed
4/5/2012	9:25:09 PM	SiCl4 pre valve closed
4/5/2012	9:25:09 PM	SiCl4 post valve closed
4/5/2012	9:25:09 PM	Bypass valve closed
4/5/2012	9:25:09 PM	Bubbler valve closed
4/5/2012	9:25:09 PM	Helium valve opened
4/5/2012	9:25:09 PM	Main Vac valve opened
4/5/2012	9:25:09 PM	Helium MFC set to  20.000000
4/5/2012	9:25:09 PM	H2 MFC set to  0.000000
4/5/2012	9:25:09 PM	BCl3 MFC set to  0.000000
4/5/2012	9:25:09 PM	PH3 MFC set to  0.000000
4/5/2012	9:25:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:25:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:25:09 PM	Tube furnace set to 0
4/5/2012	9:25:39 PM	Helium valve closed
4/5/2012	9:25:39 PM	H2 valve closed
4/5/2012	9:25:39 PM	BCl3 valve closed
4/5/2012	9:25:39 PM	PH3 valve closed
4/5/2012	9:25:39 PM	SiCl4 pre valve closed
4/5/2012	9:25:39 PM	SiCl4 post valve closed
4/5/2012	9:25:39 PM	Bypass valve closed
4/5/2012	9:25:39 PM	Bubbler valve closed
4/5/2012	9:25:39 PM	Main Vac valve opened
4/5/2012	9:25:39 PM	Helium MFC set to  0.000000
4/5/2012	9:25:39 PM	H2 MFC set to  0.000000
4/5/2012	9:25:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:25:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:25:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:25:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:25:40 PM	Tube furnace set to 0
4/5/2012	9:26:10 PM	H2 valve closed
4/5/2012	9:26:10 PM	BCl3 valve closed
4/5/2012	9:26:10 PM	PH3 valve closed
4/5/2012	9:26:10 PM	SiCl4 pre valve closed
4/5/2012	9:26:10 PM	SiCl4 post valve closed
4/5/2012	9:26:10 PM	Bypass valve closed
4/5/2012	9:26:10 PM	Bubbler valve closed
4/5/2012	9:26:10 PM	Helium valve opened
4/5/2012	9:26:10 PM	Main Vac valve opened
4/5/2012	9:26:10 PM	Helium MFC set to  20.000000
4/5/2012	9:26:10 PM	H2 MFC set to  0.000000
4/5/2012	9:26:10 PM	BCl3 MFC set to  0.000000
4/5/2012	9:26:10 PM	PH3 MFC set to  0.000000
4/5/2012	9:26:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:26:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:26:10 PM	Tube furnace set to 0
4/5/2012	9:26:40 PM	Helium valve closed
4/5/2012	9:26:40 PM	H2 valve closed
4/5/2012	9:26:40 PM	BCl3 valve closed
4/5/2012	9:26:40 PM	PH3 valve closed
4/5/2012	9:26:40 PM	SiCl4 pre valve closed
4/5/2012	9:26:40 PM	SiCl4 post valve closed
4/5/2012	9:26:40 PM	Bypass valve closed
4/5/2012	9:26:40 PM	Bubbler valve closed
4/5/2012	9:26:40 PM	Main Vac valve opened
4/5/2012	9:26:40 PM	Helium MFC set to  0.000000
4/5/2012	9:26:40 PM	H2 MFC set to  0.000000
4/5/2012	9:26:40 PM	BCl3 MFC set to  0.000000
4/5/2012	9:26:40 PM	PH3 MFC set to  0.000000
4/5/2012	9:26:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:26:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:26:40 PM	Tube furnace set to 0
4/5/2012	9:27:10 PM	H2 valve closed
4/5/2012	9:27:10 PM	BCl3 valve closed
4/5/2012	9:27:10 PM	PH3 valve closed
4/5/2012	9:27:10 PM	SiCl4 pre valve closed
4/5/2012	9:27:10 PM	SiCl4 post valve closed
4/5/2012	9:27:10 PM	Bypass valve closed
4/5/2012	9:27:10 PM	Bubbler valve closed
4/5/2012	9:27:10 PM	Helium valve opened
4/5/2012	9:27:10 PM	Main Vac valve opened
4/5/2012	9:27:10 PM	Helium MFC set to  20.000000
4/5/2012	9:27:10 PM	H2 MFC set to  0.000000
4/5/2012	9:27:10 PM	BCl3 MFC set to  0.000000
4/5/2012	9:27:10 PM	PH3 MFC set to  0.000000
4/5/2012	9:27:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:27:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:27:10 PM	Tube furnace set to 0
4/5/2012	9:27:40 PM	Helium valve closed
4/5/2012	9:27:40 PM	H2 valve closed
4/5/2012	9:27:40 PM	BCl3 valve closed
4/5/2012	9:27:40 PM	PH3 valve closed
4/5/2012	9:27:40 PM	SiCl4 pre valve closed
4/5/2012	9:27:40 PM	SiCl4 post valve closed
4/5/2012	9:27:40 PM	Bypass valve closed
4/5/2012	9:27:40 PM	Bubbler valve closed
4/5/2012	9:27:40 PM	Main Vac valve opened
4/5/2012	9:27:40 PM	Helium MFC set to  0.000000
4/5/2012	9:27:40 PM	H2 MFC set to  0.000000
4/5/2012	9:27:40 PM	BCl3 MFC set to  0.000000
4/5/2012	9:27:40 PM	PH3 MFC set to  0.000000
4/5/2012	9:27:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:27:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:27:41 PM	Tube furnace set to 200
4/5/2012	9:28:11 PM	H2 valve closed
4/5/2012	9:28:11 PM	BCl3 valve closed
4/5/2012	9:28:11 PM	PH3 valve closed
4/5/2012	9:28:11 PM	SiCl4 pre valve closed
4/5/2012	9:28:11 PM	SiCl4 post valve closed
4/5/2012	9:28:11 PM	Bypass valve closed
4/5/2012	9:28:11 PM	Bubbler valve closed
4/5/2012	9:28:11 PM	Helium valve opened
4/5/2012	9:28:11 PM	Main Vac valve opened
4/5/2012	9:28:11 PM	Helium MFC set to  20.000000
4/5/2012	9:28:11 PM	H2 MFC set to  0.000000
4/5/2012	9:28:11 PM	BCl3 MFC set to  0.000000
4/5/2012	9:28:11 PM	PH3 MFC set to  0.000000
4/5/2012	9:28:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:28:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:28:11 PM	Tube furnace set to 200
4/5/2012	9:28:41 PM	Helium valve closed
4/5/2012	9:28:41 PM	H2 valve closed
4/5/2012	9:28:41 PM	BCl3 valve closed
4/5/2012	9:28:41 PM	PH3 valve closed
4/5/2012	9:28:41 PM	SiCl4 pre valve closed
4/5/2012	9:28:41 PM	SiCl4 post valve closed
4/5/2012	9:28:41 PM	Bypass valve closed
4/5/2012	9:28:41 PM	Bubbler valve closed
4/5/2012	9:28:41 PM	Main Vac valve opened
4/5/2012	9:28:41 PM	Helium MFC set to  0.000000
4/5/2012	9:28:41 PM	H2 MFC set to  0.000000
4/5/2012	9:28:41 PM	BCl3 MFC set to  0.000000
4/5/2012	9:28:41 PM	PH3 MFC set to  0.000000
4/5/2012	9:28:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:28:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:28:41 PM	Tube furnace set to 200
4/5/2012	9:29:11 PM	H2 valve closed
4/5/2012	9:29:11 PM	BCl3 valve closed
4/5/2012	9:29:11 PM	PH3 valve closed
4/5/2012	9:29:11 PM	SiCl4 pre valve closed
4/5/2012	9:29:11 PM	SiCl4 post valve closed
4/5/2012	9:29:11 PM	Bypass valve closed
4/5/2012	9:29:11 PM	Bubbler valve closed
4/5/2012	9:29:11 PM	Helium valve opened
4/5/2012	9:29:11 PM	Main Vac valve opened
4/5/2012	9:29:11 PM	Helium MFC set to  20.000000
4/5/2012	9:29:11 PM	H2 MFC set to  0.000000
4/5/2012	9:29:11 PM	BCl3 MFC set to  0.000000
4/5/2012	9:29:11 PM	PH3 MFC set to  0.000000
4/5/2012	9:29:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:29:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:29:11 PM	Tube furnace set to 200
4/5/2012	9:29:41 PM	Helium valve closed
4/5/2012	9:29:41 PM	H2 valve closed
4/5/2012	9:29:41 PM	BCl3 valve closed
4/5/2012	9:29:41 PM	PH3 valve closed
4/5/2012	9:29:41 PM	SiCl4 pre valve closed
4/5/2012	9:29:41 PM	SiCl4 post valve closed
4/5/2012	9:29:41 PM	Bypass valve closed
4/5/2012	9:29:41 PM	Bubbler valve closed
4/5/2012	9:29:41 PM	Main Vac valve opened
4/5/2012	9:29:41 PM	Helium MFC set to  0.000000
4/5/2012	9:29:41 PM	H2 MFC set to  0.000000
4/5/2012	9:29:41 PM	BCl3 MFC set to  0.000000
4/5/2012	9:29:41 PM	PH3 MFC set to  0.000000
4/5/2012	9:29:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:29:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:29:41 PM	Tube furnace set to 200
4/5/2012	9:30:12 PM	H2 valve closed
4/5/2012	9:30:12 PM	BCl3 valve closed
4/5/2012	9:30:12 PM	PH3 valve closed
4/5/2012	9:30:12 PM	SiCl4 pre valve closed
4/5/2012	9:30:12 PM	SiCl4 post valve closed
4/5/2012	9:30:12 PM	Bypass valve closed
4/5/2012	9:30:12 PM	Bubbler valve closed
4/5/2012	9:30:12 PM	Helium valve opened
4/5/2012	9:30:12 PM	Main Vac valve opened
4/5/2012	9:30:12 PM	Helium MFC set to  20.000000
4/5/2012	9:30:12 PM	H2 MFC set to  0.000000
4/5/2012	9:30:12 PM	BCl3 MFC set to  0.000000
4/5/2012	9:30:12 PM	PH3 MFC set to  0.000000
4/5/2012	9:30:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:30:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:30:12 PM	Tube furnace set to 200
4/5/2012	9:30:42 PM	Helium valve closed
4/5/2012	9:30:42 PM	H2 valve closed
4/5/2012	9:30:42 PM	BCl3 valve closed
4/5/2012	9:30:42 PM	PH3 valve closed
4/5/2012	9:30:42 PM	SiCl4 pre valve closed
4/5/2012	9:30:42 PM	SiCl4 post valve closed
4/5/2012	9:30:42 PM	Bypass valve closed
4/5/2012	9:30:42 PM	Bubbler valve closed
4/5/2012	9:30:42 PM	Main Vac valve opened
4/5/2012	9:30:42 PM	Helium MFC set to  0.000000
4/5/2012	9:30:42 PM	H2 MFC set to  0.000000
4/5/2012	9:30:42 PM	BCl3 MFC set to  0.000000
4/5/2012	9:30:42 PM	PH3 MFC set to  0.000000
4/5/2012	9:30:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:30:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:30:42 PM	Tube furnace set to 200
4/5/2012	9:31:12 PM	H2 valve closed
4/5/2012	9:31:12 PM	BCl3 valve closed
4/5/2012	9:31:12 PM	PH3 valve closed
4/5/2012	9:31:12 PM	SiCl4 pre valve closed
4/5/2012	9:31:12 PM	SiCl4 post valve closed
4/5/2012	9:31:12 PM	Bypass valve closed
4/5/2012	9:31:12 PM	Bubbler valve closed
4/5/2012	9:31:12 PM	Helium valve opened
4/5/2012	9:31:12 PM	Main Vac valve opened
4/5/2012	9:31:12 PM	Helium MFC set to  20.000000
4/5/2012	9:31:12 PM	H2 MFC set to  0.000000
4/5/2012	9:31:12 PM	BCl3 MFC set to  0.000000
4/5/2012	9:31:12 PM	PH3 MFC set to  0.000000
4/5/2012	9:31:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:31:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:31:12 PM	Tube furnace set to 200
4/5/2012	9:31:42 PM	Helium valve closed
4/5/2012	9:31:42 PM	H2 valve closed
4/5/2012	9:31:42 PM	BCl3 valve closed
4/5/2012	9:31:42 PM	PH3 valve closed
4/5/2012	9:31:42 PM	SiCl4 pre valve closed
4/5/2012	9:31:42 PM	SiCl4 post valve closed
4/5/2012	9:31:42 PM	Bypass valve closed
4/5/2012	9:31:42 PM	Bubbler valve closed
4/5/2012	9:31:42 PM	Main Vac valve opened
4/5/2012	9:31:42 PM	Helium MFC set to  0.000000
4/5/2012	9:31:42 PM	H2 MFC set to  0.000000
4/5/2012	9:31:42 PM	BCl3 MFC set to  0.000000
4/5/2012	9:31:42 PM	PH3 MFC set to  0.000000
4/5/2012	9:31:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:31:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:31:42 PM	Tube furnace set to 200
4/5/2012	9:32:12 PM	H2 valve closed
4/5/2012	9:32:12 PM	BCl3 valve closed
4/5/2012	9:32:12 PM	PH3 valve closed
4/5/2012	9:32:12 PM	SiCl4 pre valve closed
4/5/2012	9:32:12 PM	SiCl4 post valve closed
4/5/2012	9:32:12 PM	Bypass valve closed
4/5/2012	9:32:12 PM	Bubbler valve closed
4/5/2012	9:32:12 PM	Helium valve opened
4/5/2012	9:32:13 PM	Main Vac valve opened
4/5/2012	9:32:13 PM	Helium MFC set to  20.000000
4/5/2012	9:32:13 PM	H2 MFC set to  0.000000
4/5/2012	9:32:13 PM	BCl3 MFC set to  0.000000
4/5/2012	9:32:13 PM	PH3 MFC set to  0.000000
4/5/2012	9:32:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:32:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:32:13 PM	Tube furnace set to 200
4/5/2012	9:32:43 PM	Helium valve closed
4/5/2012	9:32:43 PM	H2 valve closed
4/5/2012	9:32:43 PM	BCl3 valve closed
4/5/2012	9:32:43 PM	PH3 valve closed
4/5/2012	9:32:43 PM	SiCl4 pre valve closed
4/5/2012	9:32:43 PM	SiCl4 post valve closed
4/5/2012	9:32:43 PM	Bypass valve closed
4/5/2012	9:32:43 PM	Bubbler valve closed
4/5/2012	9:32:43 PM	Main Vac valve opened
4/5/2012	9:32:43 PM	Helium MFC set to  0.000000
4/5/2012	9:32:43 PM	H2 MFC set to  0.000000
4/5/2012	9:32:43 PM	BCl3 MFC set to  0.000000
4/5/2012	9:32:43 PM	PH3 MFC set to  0.000000
4/5/2012	9:32:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:32:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:32:43 PM	Tube furnace set to 200
4/5/2012	9:33:13 PM	H2 valve closed
4/5/2012	9:33:13 PM	BCl3 valve closed
4/5/2012	9:33:13 PM	PH3 valve closed
4/5/2012	9:33:13 PM	SiCl4 pre valve closed
4/5/2012	9:33:13 PM	SiCl4 post valve closed
4/5/2012	9:33:13 PM	Bypass valve closed
4/5/2012	9:33:13 PM	Bubbler valve closed
4/5/2012	9:33:13 PM	Helium valve opened
4/5/2012	9:33:13 PM	Main Vac valve opened
4/5/2012	9:33:13 PM	Helium MFC set to  20.000000
4/5/2012	9:33:13 PM	H2 MFC set to  0.000000
4/5/2012	9:33:13 PM	BCl3 MFC set to  0.000000
4/5/2012	9:33:13 PM	PH3 MFC set to  0.000000
4/5/2012	9:33:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:33:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:33:13 PM	Tube furnace set to 200
4/5/2012	9:33:43 PM	Helium valve closed
4/5/2012	9:33:43 PM	H2 valve closed
4/5/2012	9:33:43 PM	BCl3 valve closed
4/5/2012	9:33:43 PM	PH3 valve closed
4/5/2012	9:33:43 PM	SiCl4 pre valve closed
4/5/2012	9:33:43 PM	SiCl4 post valve closed
4/5/2012	9:33:43 PM	Bypass valve closed
4/5/2012	9:33:43 PM	Bubbler valve closed
4/5/2012	9:33:43 PM	Main Vac valve opened
4/5/2012	9:33:43 PM	Helium MFC set to  0.000000
4/5/2012	9:33:43 PM	H2 MFC set to  0.000000
4/5/2012	9:33:43 PM	BCl3 MFC set to  0.000000
4/5/2012	9:33:43 PM	PH3 MFC set to  0.000000
4/5/2012	9:33:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:33:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:33:43 PM	Tube furnace set to 0
4/5/2012	9:33:44 PM	Run finished at 9:33 PM
4/5/2012	9:39:38 PM	Recipe started at 9:39 PM
4/5/2012	9:39:38 PM	Helium valve closed
4/5/2012	9:39:38 PM	H2 valve closed
4/5/2012	9:39:38 PM	BCl3 valve closed
4/5/2012	9:39:38 PM	PH3 valve closed
4/5/2012	9:39:38 PM	SiCl4 pre valve closed
4/5/2012	9:39:38 PM	SiCl4 post valve closed
4/5/2012	9:39:38 PM	Bypass valve closed
4/5/2012	9:39:38 PM	Bubbler valve closed
4/5/2012	9:39:38 PM	Main Vac valve opened
4/5/2012	9:39:38 PM	Helium MFC set to  0.000000
4/5/2012	9:39:38 PM	H2 MFC set to  0.000000
4/5/2012	9:39:38 PM	BCl3 MFC set to  0.000000
4/5/2012	9:39:38 PM	PH3 MFC set to  0.000000
4/5/2012	9:39:38 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:39:38 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:39:38 PM	Tube furnace set to 0
4/5/2012	9:40:08 PM	H2 valve closed
4/5/2012	9:40:08 PM	BCl3 valve closed
4/5/2012	9:40:08 PM	PH3 valve closed
4/5/2012	9:40:08 PM	SiCl4 pre valve closed
4/5/2012	9:40:08 PM	SiCl4 post valve closed
4/5/2012	9:40:08 PM	Bypass valve closed
4/5/2012	9:40:08 PM	Bubbler valve closed
4/5/2012	9:40:08 PM	Helium valve opened
4/5/2012	9:40:08 PM	Main Vac valve opened
4/5/2012	9:40:08 PM	Helium MFC set to  20.000000
4/5/2012	9:40:08 PM	H2 MFC set to  0.000000
4/5/2012	9:40:08 PM	BCl3 MFC set to  0.000000
4/5/2012	9:40:08 PM	PH3 MFC set to  0.000000
4/5/2012	9:40:08 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:40:08 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:40:08 PM	Tube furnace set to 0
4/5/2012	9:40:39 PM	Helium valve closed
4/5/2012	9:40:39 PM	H2 valve closed
4/5/2012	9:40:39 PM	BCl3 valve closed
4/5/2012	9:40:39 PM	PH3 valve closed
4/5/2012	9:40:39 PM	SiCl4 pre valve closed
4/5/2012	9:40:39 PM	SiCl4 post valve closed
4/5/2012	9:40:39 PM	Bypass valve closed
4/5/2012	9:40:39 PM	Bubbler valve closed
4/5/2012	9:40:39 PM	Main Vac valve opened
4/5/2012	9:40:39 PM	Helium MFC set to  0.000000
4/5/2012	9:40:39 PM	H2 MFC set to  0.000000
4/5/2012	9:40:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:40:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:40:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:40:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:40:39 PM	Tube furnace set to 0
4/5/2012	9:41:09 PM	H2 valve closed
4/5/2012	9:41:09 PM	BCl3 valve closed
4/5/2012	9:41:09 PM	PH3 valve closed
4/5/2012	9:41:09 PM	SiCl4 pre valve closed
4/5/2012	9:41:09 PM	SiCl4 post valve closed
4/5/2012	9:41:09 PM	Bypass valve closed
4/5/2012	9:41:09 PM	Bubbler valve closed
4/5/2012	9:41:09 PM	Helium valve opened
4/5/2012	9:41:09 PM	Main Vac valve opened
4/5/2012	9:41:09 PM	Helium MFC set to  20.000000
4/5/2012	9:41:09 PM	H2 MFC set to  0.000000
4/5/2012	9:41:09 PM	BCl3 MFC set to  0.000000
4/5/2012	9:41:09 PM	PH3 MFC set to  0.000000
4/5/2012	9:41:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:41:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:41:09 PM	Tube furnace set to 0
4/5/2012	9:41:39 PM	Helium valve closed
4/5/2012	9:41:39 PM	H2 valve closed
4/5/2012	9:41:39 PM	BCl3 valve closed
4/5/2012	9:41:39 PM	PH3 valve closed
4/5/2012	9:41:39 PM	SiCl4 pre valve closed
4/5/2012	9:41:39 PM	SiCl4 post valve closed
4/5/2012	9:41:39 PM	Bypass valve closed
4/5/2012	9:41:39 PM	Bubbler valve closed
4/5/2012	9:41:39 PM	Main Vac valve opened
4/5/2012	9:41:39 PM	Helium MFC set to  0.000000
4/5/2012	9:41:39 PM	H2 MFC set to  0.000000
4/5/2012	9:41:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:41:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:41:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:41:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:41:39 PM	Tube furnace set to 0
4/5/2012	9:42:09 PM	H2 valve closed
4/5/2012	9:42:09 PM	BCl3 valve closed
4/5/2012	9:42:09 PM	PH3 valve closed
4/5/2012	9:42:09 PM	SiCl4 pre valve closed
4/5/2012	9:42:09 PM	SiCl4 post valve closed
4/5/2012	9:42:09 PM	Bypass valve closed
4/5/2012	9:42:09 PM	Bubbler valve closed
4/5/2012	9:42:09 PM	Helium valve opened
4/5/2012	9:42:09 PM	Main Vac valve opened
4/5/2012	9:42:09 PM	Helium MFC set to  20.000000
4/5/2012	9:42:09 PM	H2 MFC set to  0.000000
4/5/2012	9:42:09 PM	BCl3 MFC set to  0.000000
4/5/2012	9:42:09 PM	PH3 MFC set to  0.000000
4/5/2012	9:42:09 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:42:09 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:42:09 PM	Tube furnace set to 0
4/5/2012	9:42:39 PM	Helium valve closed
4/5/2012	9:42:39 PM	H2 valve closed
4/5/2012	9:42:39 PM	BCl3 valve closed
4/5/2012	9:42:39 PM	PH3 valve closed
4/5/2012	9:42:39 PM	SiCl4 pre valve closed
4/5/2012	9:42:39 PM	SiCl4 post valve closed
4/5/2012	9:42:39 PM	Bypass valve closed
4/5/2012	9:42:39 PM	Bubbler valve closed
4/5/2012	9:42:39 PM	Main Vac valve opened
4/5/2012	9:42:39 PM	Helium MFC set to  0.000000
4/5/2012	9:42:39 PM	H2 MFC set to  0.000000
4/5/2012	9:42:39 PM	BCl3 MFC set to  0.000000
4/5/2012	9:42:39 PM	PH3 MFC set to  0.000000
4/5/2012	9:42:39 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:42:39 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:42:40 PM	Tube furnace set to 0
4/5/2012	9:43:10 PM	H2 valve closed
4/5/2012	9:43:10 PM	BCl3 valve closed
4/5/2012	9:43:10 PM	PH3 valve closed
4/5/2012	9:43:10 PM	SiCl4 pre valve closed
4/5/2012	9:43:10 PM	SiCl4 post valve closed
4/5/2012	9:43:10 PM	Bypass valve closed
4/5/2012	9:43:10 PM	Bubbler valve closed
4/5/2012	9:43:10 PM	Helium valve opened
4/5/2012	9:43:10 PM	Main Vac valve opened
4/5/2012	9:43:10 PM	Helium MFC set to  20.000000
4/5/2012	9:43:10 PM	H2 MFC set to  0.000000
4/5/2012	9:43:10 PM	BCl3 MFC set to  0.000000
4/5/2012	9:43:10 PM	PH3 MFC set to  0.000000
4/5/2012	9:43:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:43:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:43:10 PM	Tube furnace set to 0
4/5/2012	9:43:40 PM	Helium valve closed
4/5/2012	9:43:40 PM	H2 valve closed
4/5/2012	9:43:40 PM	BCl3 valve closed
4/5/2012	9:43:40 PM	PH3 valve closed
4/5/2012	9:43:40 PM	SiCl4 pre valve closed
4/5/2012	9:43:40 PM	SiCl4 post valve closed
4/5/2012	9:43:40 PM	Bypass valve closed
4/5/2012	9:43:40 PM	Bubbler valve closed
4/5/2012	9:43:40 PM	Main Vac valve opened
4/5/2012	9:43:40 PM	Helium MFC set to  0.000000
4/5/2012	9:43:40 PM	H2 MFC set to  0.000000
4/5/2012	9:43:40 PM	BCl3 MFC set to  0.000000
4/5/2012	9:43:40 PM	PH3 MFC set to  0.000000
4/5/2012	9:43:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:43:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:43:40 PM	Tube furnace set to 0
4/5/2012	9:44:10 PM	H2 valve closed
4/5/2012	9:44:10 PM	BCl3 valve closed
4/5/2012	9:44:10 PM	PH3 valve closed
4/5/2012	9:44:10 PM	SiCl4 pre valve closed
4/5/2012	9:44:10 PM	SiCl4 post valve closed
4/5/2012	9:44:10 PM	Bypass valve closed
4/5/2012	9:44:10 PM	Bubbler valve closed
4/5/2012	9:44:10 PM	Helium valve opened
4/5/2012	9:44:10 PM	Main Vac valve opened
4/5/2012	9:44:10 PM	Helium MFC set to  20.000000
4/5/2012	9:44:10 PM	H2 MFC set to  0.000000
4/5/2012	9:44:10 PM	BCl3 MFC set to  0.000000
4/5/2012	9:44:10 PM	PH3 MFC set to  0.000000
4/5/2012	9:44:10 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:44:10 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:44:10 PM	Tube furnace set to 0
4/5/2012	9:44:40 PM	Helium valve closed
4/5/2012	9:44:40 PM	H2 valve closed
4/5/2012	9:44:40 PM	BCl3 valve closed
4/5/2012	9:44:40 PM	PH3 valve closed
4/5/2012	9:44:40 PM	SiCl4 pre valve closed
4/5/2012	9:44:40 PM	SiCl4 post valve closed
4/5/2012	9:44:40 PM	Bypass valve closed
4/5/2012	9:44:40 PM	Bubbler valve closed
4/5/2012	9:44:40 PM	Main Vac valve opened
4/5/2012	9:44:40 PM	Helium MFC set to  0.000000
4/5/2012	9:44:40 PM	H2 MFC set to  0.000000
4/5/2012	9:44:40 PM	BCl3 MFC set to  0.000000
4/5/2012	9:44:40 PM	PH3 MFC set to  0.000000
4/5/2012	9:44:40 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:44:40 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:44:41 PM	Tube furnace set to 0
4/5/2012	9:45:11 PM	H2 valve closed
4/5/2012	9:45:11 PM	BCl3 valve closed
4/5/2012	9:45:11 PM	PH3 valve closed
4/5/2012	9:45:11 PM	SiCl4 pre valve closed
4/5/2012	9:45:11 PM	SiCl4 post valve closed
4/5/2012	9:45:11 PM	Bypass valve closed
4/5/2012	9:45:11 PM	Bubbler valve closed
4/5/2012	9:45:11 PM	Helium valve opened
4/5/2012	9:45:11 PM	Main Vac valve opened
4/5/2012	9:45:11 PM	Helium MFC set to  20.000000
4/5/2012	9:45:11 PM	H2 MFC set to  0.000000
4/5/2012	9:45:11 PM	BCl3 MFC set to  0.000000
4/5/2012	9:45:11 PM	PH3 MFC set to  0.000000
4/5/2012	9:45:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:45:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:45:11 PM	Tube furnace set to 0
4/5/2012	9:45:41 PM	Helium valve closed
4/5/2012	9:45:41 PM	H2 valve closed
4/5/2012	9:45:41 PM	BCl3 valve closed
4/5/2012	9:45:41 PM	PH3 valve closed
4/5/2012	9:45:41 PM	SiCl4 pre valve closed
4/5/2012	9:45:41 PM	SiCl4 post valve closed
4/5/2012	9:45:41 PM	Bypass valve closed
4/5/2012	9:45:41 PM	Bubbler valve closed
4/5/2012	9:45:41 PM	Main Vac valve opened
4/5/2012	9:45:41 PM	Helium MFC set to  0.000000
4/5/2012	9:45:41 PM	H2 MFC set to  0.000000
4/5/2012	9:45:41 PM	BCl3 MFC set to  0.000000
4/5/2012	9:45:41 PM	PH3 MFC set to  0.000000
4/5/2012	9:45:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:45:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:45:41 PM	Tube furnace set to 0
4/5/2012	9:46:11 PM	H2 valve closed
4/5/2012	9:46:11 PM	BCl3 valve closed
4/5/2012	9:46:11 PM	PH3 valve closed
4/5/2012	9:46:11 PM	SiCl4 pre valve closed
4/5/2012	9:46:11 PM	SiCl4 post valve closed
4/5/2012	9:46:11 PM	Bypass valve closed
4/5/2012	9:46:11 PM	Bubbler valve closed
4/5/2012	9:46:11 PM	Helium valve opened
4/5/2012	9:46:11 PM	Main Vac valve opened
4/5/2012	9:46:11 PM	Helium MFC set to  20.000000
4/5/2012	9:46:11 PM	H2 MFC set to  0.000000
4/5/2012	9:46:11 PM	BCl3 MFC set to  0.000000
4/5/2012	9:46:11 PM	PH3 MFC set to  0.000000
4/5/2012	9:46:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:46:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:46:11 PM	Tube furnace set to 0
4/5/2012	9:46:41 PM	Helium valve closed
4/5/2012	9:46:41 PM	H2 valve closed
4/5/2012	9:46:41 PM	BCl3 valve closed
4/5/2012	9:46:41 PM	PH3 valve closed
4/5/2012	9:46:41 PM	SiCl4 pre valve closed
4/5/2012	9:46:41 PM	SiCl4 post valve closed
4/5/2012	9:46:41 PM	Bypass valve closed
4/5/2012	9:46:41 PM	Bubbler valve closed
4/5/2012	9:46:41 PM	Main Vac valve opened
4/5/2012	9:46:41 PM	Helium MFC set to  0.000000
4/5/2012	9:46:41 PM	H2 MFC set to  0.000000
4/5/2012	9:46:41 PM	BCl3 MFC set to  0.000000
4/5/2012	9:46:41 PM	PH3 MFC set to  0.000000
4/5/2012	9:46:41 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:46:41 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:46:42 PM	Tube furnace set to 0
4/5/2012	9:47:12 PM	H2 valve closed
4/5/2012	9:47:12 PM	BCl3 valve closed
4/5/2012	9:47:12 PM	PH3 valve closed
4/5/2012	9:47:12 PM	SiCl4 pre valve closed
4/5/2012	9:47:12 PM	SiCl4 post valve closed
4/5/2012	9:47:12 PM	Bypass valve closed
4/5/2012	9:47:12 PM	Bubbler valve closed
4/5/2012	9:47:12 PM	Helium valve opened
4/5/2012	9:47:12 PM	Main Vac valve opened
4/5/2012	9:47:12 PM	Helium MFC set to  20.000000
4/5/2012	9:47:12 PM	H2 MFC set to  0.000000
4/5/2012	9:47:12 PM	BCl3 MFC set to  0.000000
4/5/2012	9:47:12 PM	PH3 MFC set to  0.000000
4/5/2012	9:47:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:47:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:47:12 PM	Tube furnace set to 0
4/5/2012	9:47:42 PM	Helium valve closed
4/5/2012	9:47:42 PM	H2 valve closed
4/5/2012	9:47:42 PM	BCl3 valve closed
4/5/2012	9:47:42 PM	PH3 valve closed
4/5/2012	9:47:42 PM	SiCl4 pre valve closed
4/5/2012	9:47:42 PM	SiCl4 post valve closed
4/5/2012	9:47:42 PM	Bypass valve closed
4/5/2012	9:47:42 PM	Bubbler valve closed
4/5/2012	9:47:42 PM	Main Vac valve opened
4/5/2012	9:47:42 PM	Helium MFC set to  0.000000
4/5/2012	9:47:42 PM	H2 MFC set to  0.000000
4/5/2012	9:47:42 PM	BCl3 MFC set to  0.000000
4/5/2012	9:47:42 PM	PH3 MFC set to  0.000000
4/5/2012	9:47:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:47:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:47:42 PM	Tube furnace set to 0
4/5/2012	9:48:12 PM	H2 valve closed
4/5/2012	9:48:12 PM	BCl3 valve closed
4/5/2012	9:48:12 PM	PH3 valve closed
4/5/2012	9:48:12 PM	SiCl4 pre valve closed
4/5/2012	9:48:12 PM	SiCl4 post valve closed
4/5/2012	9:48:12 PM	Bypass valve closed
4/5/2012	9:48:12 PM	Bubbler valve closed
4/5/2012	9:48:12 PM	Helium valve opened
4/5/2012	9:48:12 PM	Main Vac valve opened
4/5/2012	9:48:12 PM	Helium MFC set to  20.000000
4/5/2012	9:48:12 PM	H2 MFC set to  0.000000
4/5/2012	9:48:12 PM	BCl3 MFC set to  0.000000
4/5/2012	9:48:12 PM	PH3 MFC set to  0.000000
4/5/2012	9:48:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:48:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:48:12 PM	Tube furnace set to 0
4/5/2012	9:48:42 PM	Helium valve closed
4/5/2012	9:48:42 PM	H2 valve closed
4/5/2012	9:48:42 PM	BCl3 valve closed
4/5/2012	9:48:42 PM	PH3 valve closed
4/5/2012	9:48:42 PM	SiCl4 pre valve closed
4/5/2012	9:48:42 PM	SiCl4 post valve closed
4/5/2012	9:48:42 PM	Bypass valve closed
4/5/2012	9:48:42 PM	Bubbler valve closed
4/5/2012	9:48:42 PM	Main Vac valve opened
4/5/2012	9:48:42 PM	Helium MFC set to  0.000000
4/5/2012	9:48:42 PM	H2 MFC set to  0.000000
4/5/2012	9:48:42 PM	BCl3 MFC set to  0.000000
4/5/2012	9:48:42 PM	PH3 MFC set to  0.000000
4/5/2012	9:48:42 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:48:42 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:48:42 PM	Tube furnace set to 200
4/5/2012	9:49:13 PM	H2 valve closed
4/5/2012	9:49:13 PM	BCl3 valve closed
4/5/2012	9:49:13 PM	PH3 valve closed
4/5/2012	9:49:13 PM	SiCl4 pre valve closed
4/5/2012	9:49:13 PM	SiCl4 post valve closed
4/5/2012	9:49:13 PM	Bypass valve closed
4/5/2012	9:49:13 PM	Bubbler valve closed
4/5/2012	9:49:13 PM	Helium valve opened
4/5/2012	9:49:13 PM	Main Vac valve opened
4/5/2012	9:49:13 PM	Helium MFC set to  20.000000
4/5/2012	9:49:13 PM	H2 MFC set to  0.000000
4/5/2012	9:49:13 PM	BCl3 MFC set to  0.000000
4/5/2012	9:49:13 PM	PH3 MFC set to  0.000000
4/5/2012	9:49:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:49:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:49:13 PM	Tube furnace set to 200
4/5/2012	9:49:43 PM	Helium valve closed
4/5/2012	9:49:43 PM	H2 valve closed
4/5/2012	9:49:43 PM	BCl3 valve closed
4/5/2012	9:49:43 PM	PH3 valve closed
4/5/2012	9:49:43 PM	SiCl4 pre valve closed
4/5/2012	9:49:43 PM	SiCl4 post valve closed
4/5/2012	9:49:43 PM	Bypass valve closed
4/5/2012	9:49:43 PM	Bubbler valve closed
4/5/2012	9:49:43 PM	Main Vac valve opened
4/5/2012	9:49:43 PM	Helium MFC set to  0.000000
4/5/2012	9:49:43 PM	H2 MFC set to  0.000000
4/5/2012	9:49:43 PM	BCl3 MFC set to  0.000000
4/5/2012	9:49:43 PM	PH3 MFC set to  0.000000
4/5/2012	9:49:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:49:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:49:43 PM	Tube furnace set to 200
4/5/2012	9:50:13 PM	H2 valve closed
4/5/2012	9:50:13 PM	BCl3 valve closed
4/5/2012	9:50:13 PM	PH3 valve closed
4/5/2012	9:50:13 PM	SiCl4 pre valve closed
4/5/2012	9:50:13 PM	SiCl4 post valve closed
4/5/2012	9:50:13 PM	Bypass valve closed
4/5/2012	9:50:13 PM	Bubbler valve closed
4/5/2012	9:50:13 PM	Helium valve opened
4/5/2012	9:50:13 PM	Main Vac valve opened
4/5/2012	9:50:13 PM	Helium MFC set to  20.000000
4/5/2012	9:50:13 PM	H2 MFC set to  0.000000
4/5/2012	9:50:13 PM	BCl3 MFC set to  0.000000
4/5/2012	9:50:13 PM	PH3 MFC set to  0.000000
4/5/2012	9:50:13 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:50:13 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:50:13 PM	Tube furnace set to 200
4/5/2012	9:50:43 PM	Helium valve closed
4/5/2012	9:50:43 PM	H2 valve closed
4/5/2012	9:50:43 PM	BCl3 valve closed
4/5/2012	9:50:43 PM	PH3 valve closed
4/5/2012	9:50:43 PM	SiCl4 pre valve closed
4/5/2012	9:50:43 PM	SiCl4 post valve closed
4/5/2012	9:50:43 PM	Bypass valve closed
4/5/2012	9:50:43 PM	Bubbler valve closed
4/5/2012	9:50:43 PM	Main Vac valve opened
4/5/2012	9:50:43 PM	Helium MFC set to  0.000000
4/5/2012	9:50:43 PM	H2 MFC set to  0.000000
4/5/2012	9:50:43 PM	BCl3 MFC set to  0.000000
4/5/2012	9:50:43 PM	PH3 MFC set to  0.000000
4/5/2012	9:50:43 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:50:43 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:50:43 PM	Tube furnace set to 200
4/5/2012	9:51:13 PM	H2 valve closed
4/5/2012	9:51:13 PM	BCl3 valve closed
4/5/2012	9:51:13 PM	PH3 valve closed
4/5/2012	9:51:13 PM	SiCl4 pre valve closed
4/5/2012	9:51:13 PM	SiCl4 post valve closed
4/5/2012	9:51:13 PM	Bypass valve closed
4/5/2012	9:51:13 PM	Bubbler valve closed
4/5/2012	9:51:13 PM	Helium valve opened
4/5/2012	9:51:13 PM	Main Vac valve opened
4/5/2012	9:51:13 PM	Helium MFC set to  20.000000
4/5/2012	9:51:14 PM	H2 MFC set to  0.000000
4/5/2012	9:51:14 PM	BCl3 MFC set to  0.000000
4/5/2012	9:51:14 PM	PH3 MFC set to  0.000000
4/5/2012	9:51:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:51:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:51:14 PM	Tube furnace set to 200
4/5/2012	9:51:44 PM	Helium valve closed
4/5/2012	9:51:44 PM	H2 valve closed
4/5/2012	9:51:44 PM	BCl3 valve closed
4/5/2012	9:51:44 PM	PH3 valve closed
4/5/2012	9:51:44 PM	SiCl4 pre valve closed
4/5/2012	9:51:44 PM	SiCl4 post valve closed
4/5/2012	9:51:44 PM	Bypass valve closed
4/5/2012	9:51:44 PM	Bubbler valve closed
4/5/2012	9:51:44 PM	Main Vac valve opened
4/5/2012	9:51:44 PM	Helium MFC set to  0.000000
4/5/2012	9:51:44 PM	H2 MFC set to  0.000000
4/5/2012	9:51:44 PM	BCl3 MFC set to  0.000000
4/5/2012	9:51:44 PM	PH3 MFC set to  0.000000
4/5/2012	9:51:44 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:51:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:51:44 PM	Tube furnace set to 200
4/5/2012	9:52:14 PM	H2 valve closed
4/5/2012	9:52:14 PM	BCl3 valve closed
4/5/2012	9:52:14 PM	PH3 valve closed
4/5/2012	9:52:14 PM	SiCl4 pre valve closed
4/5/2012	9:52:14 PM	SiCl4 post valve closed
4/5/2012	9:52:14 PM	Bypass valve closed
4/5/2012	9:52:14 PM	Bubbler valve closed
4/5/2012	9:52:14 PM	Helium valve opened
4/5/2012	9:52:14 PM	Main Vac valve opened
4/5/2012	9:52:14 PM	Helium MFC set to  20.000000
4/5/2012	9:52:14 PM	H2 MFC set to  0.000000
4/5/2012	9:52:14 PM	BCl3 MFC set to  0.000000
4/5/2012	9:52:14 PM	PH3 MFC set to  0.000000
4/5/2012	9:52:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:52:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:52:14 PM	Tube furnace set to 200
4/5/2012	9:52:44 PM	Helium valve closed
4/5/2012	9:52:44 PM	H2 valve closed
4/5/2012	9:52:44 PM	BCl3 valve closed
4/5/2012	9:52:44 PM	PH3 valve closed
4/5/2012	9:52:44 PM	SiCl4 pre valve closed
4/5/2012	9:52:44 PM	SiCl4 post valve closed
4/5/2012	9:52:44 PM	Bypass valve closed
4/5/2012	9:52:44 PM	Bubbler valve closed
4/5/2012	9:52:44 PM	Main Vac valve opened
4/5/2012	9:52:44 PM	Helium MFC set to  0.000000
4/5/2012	9:52:44 PM	H2 MFC set to  0.000000
4/5/2012	9:52:44 PM	BCl3 MFC set to  0.000000
4/5/2012	9:52:44 PM	PH3 MFC set to  0.000000
4/5/2012	9:52:44 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:52:44 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:52:44 PM	Tube furnace set to 200
4/5/2012	9:53:14 PM	H2 valve closed
4/5/2012	9:53:14 PM	BCl3 valve closed
4/5/2012	9:53:14 PM	PH3 valve closed
4/5/2012	9:53:14 PM	SiCl4 pre valve closed
4/5/2012	9:53:14 PM	SiCl4 post valve closed
4/5/2012	9:53:14 PM	Bypass valve closed
4/5/2012	9:53:14 PM	Bubbler valve closed
4/5/2012	9:53:14 PM	Helium valve opened
4/5/2012	9:53:14 PM	Main Vac valve opened
4/5/2012	9:53:14 PM	Helium MFC set to  20.000000
4/5/2012	9:53:14 PM	H2 MFC set to  0.000000
4/5/2012	9:53:14 PM	BCl3 MFC set to  0.000000
4/5/2012	9:53:14 PM	PH3 MFC set to  0.000000
4/5/2012	9:53:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:53:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:53:15 PM	Tube furnace set to 200
4/5/2012	9:53:45 PM	Helium valve closed
4/5/2012	9:53:45 PM	H2 valve closed
4/5/2012	9:53:45 PM	BCl3 valve closed
4/5/2012	9:53:45 PM	PH3 valve closed
4/5/2012	9:53:45 PM	SiCl4 pre valve closed
4/5/2012	9:53:45 PM	SiCl4 post valve closed
4/5/2012	9:53:45 PM	Bypass valve closed
4/5/2012	9:53:45 PM	Bubbler valve closed
4/5/2012	9:53:45 PM	Main Vac valve opened
4/5/2012	9:53:45 PM	Helium MFC set to  0.000000
4/5/2012	9:53:45 PM	H2 MFC set to  0.000000
4/5/2012	9:53:45 PM	BCl3 MFC set to  0.000000
4/5/2012	9:53:45 PM	PH3 MFC set to  0.000000
4/5/2012	9:53:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:53:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:53:45 PM	Tube furnace set to 200
4/5/2012	9:54:15 PM	H2 valve closed
4/5/2012	9:54:15 PM	BCl3 valve closed
4/5/2012	9:54:15 PM	PH3 valve closed
4/5/2012	9:54:15 PM	SiCl4 pre valve closed
4/5/2012	9:54:15 PM	SiCl4 post valve closed
4/5/2012	9:54:15 PM	Bypass valve closed
4/5/2012	9:54:15 PM	Bubbler valve closed
4/5/2012	9:54:15 PM	Helium valve opened
4/5/2012	9:54:15 PM	Main Vac valve opened
4/5/2012	9:54:15 PM	Helium MFC set to  20.000000
4/5/2012	9:54:15 PM	H2 MFC set to  0.000000
4/5/2012	9:54:15 PM	BCl3 MFC set to  0.000000
4/5/2012	9:54:15 PM	PH3 MFC set to  0.000000
4/5/2012	9:54:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:54:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:54:15 PM	Tube furnace set to 200
4/5/2012	9:54:45 PM	Helium valve closed
4/5/2012	9:54:45 PM	H2 valve closed
4/5/2012	9:54:45 PM	BCl3 valve closed
4/5/2012	9:54:45 PM	PH3 valve closed
4/5/2012	9:54:45 PM	SiCl4 pre valve closed
4/5/2012	9:54:45 PM	SiCl4 post valve closed
4/5/2012	9:54:45 PM	Bypass valve closed
4/5/2012	9:54:45 PM	Bubbler valve closed
4/5/2012	9:54:45 PM	Main Vac valve opened
4/5/2012	9:54:45 PM	Helium MFC set to  0.000000
4/5/2012	9:54:45 PM	H2 MFC set to  0.000000
4/5/2012	9:54:45 PM	BCl3 MFC set to  0.000000
4/5/2012	9:54:45 PM	PH3 MFC set to  0.000000
4/5/2012	9:54:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	9:54:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	9:54:45 PM	Tube furnace set to 0
4/5/2012	9:54:46 PM	Run finished at 9:54 PM
4/5/2012	10:04:17 PM	Main Vac valve closed
4/5/2012	10:04:27 PM	Main Vac valve opened
4/5/2012	10:06:25 PM	Recipe started at 10:06 PM
4/5/2012	10:06:25 PM	Helium valve closed
4/5/2012	10:06:25 PM	H2 valve closed
4/5/2012	10:06:25 PM	BCl3 valve closed
4/5/2012	10:06:25 PM	PH3 valve closed
4/5/2012	10:06:25 PM	SiCl4 pre valve closed
4/5/2012	10:06:25 PM	SiCl4 post valve closed
4/5/2012	10:06:25 PM	Main Vac valve closed
4/5/2012	10:06:25 PM	Bypass valve closed
4/5/2012	10:06:25 PM	Bubbler valve closed
4/5/2012	10:06:25 PM	Helium MFC set to  0.000000
4/5/2012	10:06:25 PM	H2 MFC set to  0.000000
4/5/2012	10:06:25 PM	BCl3 MFC set to  0.000000
4/5/2012	10:06:25 PM	PH3 MFC set to  0.000000
4/5/2012	10:06:25 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:06:25 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:06:25 PM	Tube furnace set to 0
4/5/2012	10:06:28 PM	Helium valve closed
4/5/2012	10:06:28 PM	BCl3 valve closed
4/5/2012	10:06:28 PM	PH3 valve closed
4/5/2012	10:06:28 PM	SiCl4 pre valve closed
4/5/2012	10:06:28 PM	SiCl4 post valve closed
4/5/2012	10:06:28 PM	Main Vac valve closed
4/5/2012	10:06:28 PM	Bypass valve closed
4/5/2012	10:06:28 PM	Bubbler valve closed
4/5/2012	10:06:28 PM	H2 valve opened
4/5/2012	10:06:28 PM	Helium MFC set to  0.000000
4/5/2012	10:06:28 PM	H2 MFC set to  500.000000
4/5/2012	10:06:28 PM	BCl3 MFC set to  0.000000
4/5/2012	10:06:28 PM	PH3 MFC set to  0.000000
4/5/2012	10:06:28 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:06:28 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:06:29 PM	Tube furnace set to 0
4/5/2012	10:07:33 PM	Helium valve closed
4/5/2012	10:07:33 PM	BCl3 valve closed
4/5/2012	10:07:33 PM	PH3 valve closed
4/5/2012	10:07:33 PM	SiCl4 pre valve closed
4/5/2012	10:07:33 PM	SiCl4 post valve closed
4/5/2012	10:07:33 PM	Main Vac valve closed
4/5/2012	10:07:33 PM	Bypass valve closed
4/5/2012	10:07:33 PM	H2 valve opened
4/5/2012	10:07:33 PM	Bubbler valve opened
4/5/2012	10:07:33 PM	Helium MFC set to  0.000000
4/5/2012	10:07:33 PM	H2 MFC set to  500.000000
4/5/2012	10:07:33 PM	BCl3 MFC set to  0.000000
4/5/2012	10:07:33 PM	PH3 MFC set to  0.000000
4/5/2012	10:07:33 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:07:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:07:33 PM	Tube furnace set to 0
4/5/2012	10:07:34 PM	Helium valve closed
4/5/2012	10:07:34 PM	BCl3 valve closed
4/5/2012	10:07:34 PM	PH3 valve closed
4/5/2012	10:07:34 PM	SiCl4 pre valve closed
4/5/2012	10:07:34 PM	SiCl4 post valve closed
4/5/2012	10:07:34 PM	Main Vac valve closed
4/5/2012	10:07:34 PM	Bypass valve closed
4/5/2012	10:07:34 PM	H2 valve opened
4/5/2012	10:07:34 PM	Bubbler valve opened
4/5/2012	10:07:34 PM	Helium MFC set to  0.000000
4/5/2012	10:07:34 PM	H2 MFC set to  500.000000
4/5/2012	10:07:34 PM	BCl3 MFC set to  0.000000
4/5/2012	10:07:34 PM	PH3 MFC set to  0.000000
4/5/2012	10:07:34 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:07:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:07:34 PM	Tube furnace set to 1000
4/5/2012	10:27:34 PM	Helium valve closed
4/5/2012	10:27:34 PM	PH3 valve closed
4/5/2012	10:27:34 PM	Main Vac valve closed
4/5/2012	10:27:34 PM	Bypass valve closed
4/5/2012	10:27:34 PM	H2 valve opened
4/5/2012	10:27:34 PM	BCl3 valve opened
4/5/2012	10:27:34 PM	SiCl4 pre valve opened
4/5/2012	10:27:34 PM	SiCl4 post valve opened
4/5/2012	10:27:34 PM	Bubbler valve opened
4/5/2012	10:27:34 PM	Helium MFC set to  0.000000
4/5/2012	10:27:34 PM	H2 MFC set to  450.000000
4/5/2012	10:27:34 PM	BCl3 MFC set to  1.500000
4/5/2012	10:27:34 PM	PH3 MFC set to  0.000000
4/5/2012	10:27:34 PM	SiCl4 MFC set to  50.000000
4/5/2012	10:27:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:27:34 PM	Tube furnace set to 1000
4/5/2012	10:39:34 PM	Helium valve closed
4/5/2012	10:39:34 PM	BCl3 valve closed
4/5/2012	10:39:34 PM	PH3 valve closed
4/5/2012	10:39:34 PM	SiCl4 pre valve closed
4/5/2012	10:39:34 PM	SiCl4 post valve closed
4/5/2012	10:39:34 PM	Main Vac valve closed
4/5/2012	10:39:34 PM	Bypass valve closed
4/5/2012	10:39:34 PM	H2 valve opened
4/5/2012	10:39:34 PM	Bubbler valve opened
4/5/2012	10:39:34 PM	Helium MFC set to  0.000000
4/5/2012	10:39:34 PM	H2 MFC set to  500.000000
4/5/2012	10:39:34 PM	BCl3 MFC set to  0.000000
4/5/2012	10:39:34 PM	PH3 MFC set to  0.000000
4/5/2012	10:39:34 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:39:34 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:39:34 PM	Tube furnace set to 950
4/5/2012	10:41:35 PM	Helium valve closed
4/5/2012	10:41:35 PM	BCl3 valve closed
4/5/2012	10:41:35 PM	PH3 valve closed
4/5/2012	10:41:35 PM	SiCl4 pre valve closed
4/5/2012	10:41:35 PM	SiCl4 post valve closed
4/5/2012	10:41:35 PM	Main Vac valve closed
4/5/2012	10:41:35 PM	Bypass valve closed
4/5/2012	10:41:35 PM	H2 valve opened
4/5/2012	10:41:35 PM	Bubbler valve opened
4/5/2012	10:41:35 PM	Helium MFC set to  0.000000
4/5/2012	10:41:35 PM	H2 MFC set to  500.000000
4/5/2012	10:41:35 PM	BCl3 MFC set to  0.000000
4/5/2012	10:41:35 PM	PH3 MFC set to  0.000000
4/5/2012	10:41:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:41:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:41:35 PM	Tube furnace set to 900
4/5/2012	10:43:35 PM	Helium valve closed
4/5/2012	10:43:35 PM	BCl3 valve closed
4/5/2012	10:43:35 PM	PH3 valve closed
4/5/2012	10:43:35 PM	SiCl4 pre valve closed
4/5/2012	10:43:35 PM	SiCl4 post valve closed
4/5/2012	10:43:35 PM	Main Vac valve closed
4/5/2012	10:43:35 PM	Bypass valve closed
4/5/2012	10:43:35 PM	H2 valve opened
4/5/2012	10:43:35 PM	Bubbler valve opened
4/5/2012	10:43:35 PM	Helium MFC set to  0.000000
4/5/2012	10:43:35 PM	H2 MFC set to  500.000000
4/5/2012	10:43:35 PM	BCl3 MFC set to  0.000000
4/5/2012	10:43:35 PM	PH3 MFC set to  0.000000
4/5/2012	10:43:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:43:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:43:35 PM	Tube furnace set to 850
4/5/2012	10:45:35 PM	H2 valve closed
4/5/2012	10:45:35 PM	BCl3 valve closed
4/5/2012	10:45:35 PM	PH3 valve closed
4/5/2012	10:45:35 PM	SiCl4 pre valve closed
4/5/2012	10:45:35 PM	SiCl4 post valve closed
4/5/2012	10:45:35 PM	Main Vac valve closed
4/5/2012	10:45:35 PM	Bypass valve closed
4/5/2012	10:45:35 PM	Helium valve opened
4/5/2012	10:45:35 PM	Bubbler valve opened
4/5/2012	10:45:35 PM	Helium MFC set to  500.000000
4/5/2012	10:45:35 PM	H2 MFC set to  0.000000
4/5/2012	10:45:35 PM	BCl3 MFC set to  0.000000
4/5/2012	10:45:35 PM	PH3 MFC set to  0.000000
4/5/2012	10:45:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:45:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:45:35 PM	Tube furnace set to 800
4/5/2012	10:47:35 PM	H2 valve closed
4/5/2012	10:47:35 PM	BCl3 valve closed
4/5/2012	10:47:35 PM	PH3 valve closed
4/5/2012	10:47:35 PM	SiCl4 pre valve closed
4/5/2012	10:47:35 PM	SiCl4 post valve closed
4/5/2012	10:47:35 PM	Main Vac valve closed
4/5/2012	10:47:35 PM	Bypass valve closed
4/5/2012	10:47:35 PM	Helium valve opened
4/5/2012	10:47:35 PM	Bubbler valve opened
4/5/2012	10:47:35 PM	Helium MFC set to  500.000000
4/5/2012	10:47:35 PM	H2 MFC set to  0.000000
4/5/2012	10:47:35 PM	BCl3 MFC set to  0.000000
4/5/2012	10:47:35 PM	PH3 MFC set to  0.000000
4/5/2012	10:47:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:47:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:47:35 PM	Tube furnace set to 750
4/5/2012	10:49:35 PM	H2 valve closed
4/5/2012	10:49:35 PM	BCl3 valve closed
4/5/2012	10:49:35 PM	PH3 valve closed
4/5/2012	10:49:35 PM	SiCl4 pre valve closed
4/5/2012	10:49:35 PM	SiCl4 post valve closed
4/5/2012	10:49:35 PM	Main Vac valve closed
4/5/2012	10:49:35 PM	Bypass valve closed
4/5/2012	10:49:35 PM	Helium valve opened
4/5/2012	10:49:35 PM	Bubbler valve opened
4/5/2012	10:49:35 PM	Helium MFC set to  500.000000
4/5/2012	10:49:35 PM	H2 MFC set to  0.000000
4/5/2012	10:49:35 PM	BCl3 MFC set to  0.000000
4/5/2012	10:49:35 PM	PH3 MFC set to  0.000000
4/5/2012	10:49:35 PM	SiCl4 MFC set to  0.000000
4/5/2012	10:49:35 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	10:49:36 PM	Tube furnace set to 0
4/5/2012	11:09:36 PM	Helium valve closed
4/5/2012	11:09:36 PM	H2 valve closed
4/5/2012	11:09:36 PM	BCl3 valve closed
4/5/2012	11:09:36 PM	PH3 valve closed
4/5/2012	11:09:36 PM	SiCl4 pre valve closed
4/5/2012	11:09:36 PM	SiCl4 post valve closed
4/5/2012	11:09:36 PM	Main Vac valve closed
4/5/2012	11:09:36 PM	Bypass valve closed
4/5/2012	11:09:36 PM	Bubbler valve closed
4/5/2012	11:09:36 PM	Helium MFC set to  0.000000
4/5/2012	11:09:36 PM	H2 MFC set to  0.000000
4/5/2012	11:09:36 PM	BCl3 MFC set to  0.000000
4/5/2012	11:09:36 PM	PH3 MFC set to  0.000000
4/5/2012	11:09:36 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:09:36 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:09:36 PM	Tube furnace set to 0
4/5/2012	11:09:37 PM	Run finished at 11:09 PM
4/5/2012	11:22:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	11:22:52 PM	Recipe started at 11:22 PM
4/5/2012	11:22:52 PM	Helium valve closed
4/5/2012	11:22:52 PM	H2 valve closed
4/5/2012	11:22:52 PM	BCl3 valve closed
4/5/2012	11:22:52 PM	PH3 valve closed
4/5/2012	11:22:52 PM	SiCl4 pre valve closed
4/5/2012	11:22:52 PM	SiCl4 post valve closed
4/5/2012	11:22:52 PM	Main Vac valve closed
4/5/2012	11:22:52 PM	Bypass valve closed
4/5/2012	11:22:52 PM	Bubbler valve closed
4/5/2012	11:22:52 PM	Helium MFC set to  0.000000
4/5/2012	11:22:52 PM	H2 MFC set to  0.000000
4/5/2012	11:22:52 PM	BCl3 MFC set to  0.000000
4/5/2012	11:22:52 PM	PH3 MFC set to  0.000000
4/5/2012	11:22:52 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:22:52 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:22:53 PM	Tube furnace set to 0
4/5/2012	11:22:56 PM	H2 valve closed
4/5/2012	11:22:56 PM	BCl3 valve closed
4/5/2012	11:22:56 PM	PH3 valve closed
4/5/2012	11:22:56 PM	SiCl4 pre valve closed
4/5/2012	11:22:56 PM	SiCl4 post valve closed
4/5/2012	11:22:56 PM	Main Vac valve closed
4/5/2012	11:22:56 PM	Bypass valve closed
4/5/2012	11:22:56 PM	Bubbler valve closed
4/5/2012	11:22:56 PM	Helium valve opened
4/5/2012	11:22:56 PM	Helium MFC set to  500.000000
4/5/2012	11:22:56 PM	H2 MFC set to  0.000000
4/5/2012	11:22:56 PM	BCl3 MFC set to  0.000000
4/5/2012	11:22:56 PM	PH3 MFC set to  0.000000
4/5/2012	11:22:56 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:22:56 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:22:56 PM	Tube furnace set to 0
4/5/2012	11:23:00 PM	Helium valve closed
4/5/2012	11:23:00 PM	H2 valve closed
4/5/2012	11:23:00 PM	BCl3 valve closed
4/5/2012	11:23:00 PM	PH3 valve closed
4/5/2012	11:23:00 PM	SiCl4 pre valve closed
4/5/2012	11:23:00 PM	SiCl4 post valve closed
4/5/2012	11:23:00 PM	Main Vac valve closed
4/5/2012	11:23:00 PM	Bypass valve closed
4/5/2012	11:23:00 PM	Bubbler valve closed
4/5/2012	11:23:00 PM	Helium MFC set to  0.000000
4/5/2012	11:23:00 PM	H2 MFC set to  0.000000
4/5/2012	11:23:00 PM	BCl3 MFC set to  0.000000
4/5/2012	11:23:00 PM	PH3 MFC set to  0.000000
4/5/2012	11:23:00 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:23:00 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:23:00 PM	Tube furnace set to 0
4/5/2012	11:23:01 PM	Run finished at 11:23 PM
4/5/2012	11:23:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
4/5/2012	11:24:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	11:24:46 PM	Recipe started at 11:24 PM
4/5/2012	11:24:46 PM	Helium valve closed
4/5/2012	11:24:46 PM	H2 valve closed
4/5/2012	11:24:46 PM	BCl3 valve closed
4/5/2012	11:24:46 PM	PH3 valve closed
4/5/2012	11:24:46 PM	SiCl4 pre valve closed
4/5/2012	11:24:46 PM	SiCl4 post valve closed
4/5/2012	11:24:46 PM	Main Vac valve closed
4/5/2012	11:24:46 PM	Bubbler valve closed
4/5/2012	11:24:46 PM	Bypass valve opened
4/5/2012	11:24:46 PM	Helium MFC set to  0.000000
4/5/2012	11:24:46 PM	H2 MFC set to  0.000000
4/5/2012	11:24:46 PM	BCl3 MFC set to  0.000000
4/5/2012	11:24:46 PM	PH3 MFC set to  0.000000
4/5/2012	11:24:46 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:24:46 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:24:46 PM	Tube furnace set to 0
4/5/2012	11:25:45 PM	Helium valve closed
4/5/2012	11:25:45 PM	H2 valve closed
4/5/2012	11:25:45 PM	BCl3 valve closed
4/5/2012	11:25:45 PM	PH3 valve closed
4/5/2012	11:25:45 PM	SiCl4 pre valve closed
4/5/2012	11:25:45 PM	SiCl4 post valve closed
4/5/2012	11:25:45 PM	Main Vac valve closed
4/5/2012	11:25:45 PM	Bubbler valve closed
4/5/2012	11:25:45 PM	Bypass valve opened
4/5/2012	11:25:45 PM	Helium MFC set to  0.000000
4/5/2012	11:25:45 PM	H2 MFC set to  0.000000
4/5/2012	11:25:45 PM	BCl3 MFC set to  0.000000
4/5/2012	11:25:45 PM	PH3 MFC set to  0.000000
4/5/2012	11:25:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:25:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:25:45 PM	Tube furnace set to 0
4/5/2012	11:26:45 PM	Helium valve closed
4/5/2012	11:26:45 PM	H2 valve closed
4/5/2012	11:26:45 PM	BCl3 valve closed
4/5/2012	11:26:45 PM	PH3 valve closed
4/5/2012	11:26:45 PM	SiCl4 pre valve closed
4/5/2012	11:26:45 PM	SiCl4 post valve closed
4/5/2012	11:26:45 PM	Bypass valve closed
4/5/2012	11:26:45 PM	Bubbler valve closed
4/5/2012	11:26:45 PM	Main Vac valve opened
4/5/2012	11:26:45 PM	Helium MFC set to  0.000000
4/5/2012	11:26:45 PM	H2 MFC set to  0.000000
4/5/2012	11:26:45 PM	BCl3 MFC set to  0.000000
4/5/2012	11:26:45 PM	PH3 MFC set to  0.000000
4/5/2012	11:26:45 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:26:45 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:26:45 PM	Tube furnace set to 0
4/5/2012	11:26:46 PM	Run finished at 11:26 PM
4/5/2012	11:26:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
4/5/2012	11:34:32 PM	Recipe started at 11:34 PM
4/5/2012	11:34:32 PM	Helium valve closed
4/5/2012	11:34:32 PM	H2 valve closed
4/5/2012	11:34:32 PM	BCl3 valve closed
4/5/2012	11:34:32 PM	PH3 valve closed
4/5/2012	11:34:32 PM	SiCl4 pre valve closed
4/5/2012	11:34:32 PM	SiCl4 post valve closed
4/5/2012	11:34:32 PM	Bypass valve closed
4/5/2012	11:34:32 PM	Bubbler valve closed
4/5/2012	11:34:32 PM	Main Vac valve opened
4/5/2012	11:34:32 PM	Helium MFC set to  0.000000
4/5/2012	11:34:32 PM	H2 MFC set to  0.000000
4/5/2012	11:34:32 PM	BCl3 MFC set to  0.000000
4/5/2012	11:34:32 PM	PH3 MFC set to  0.000000
4/5/2012	11:34:32 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:34:32 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:34:32 PM	Tube furnace set to 0
4/5/2012	11:35:02 PM	H2 valve closed
4/5/2012	11:35:02 PM	BCl3 valve closed
4/5/2012	11:35:02 PM	PH3 valve closed
4/5/2012	11:35:02 PM	SiCl4 pre valve closed
4/5/2012	11:35:02 PM	SiCl4 post valve closed
4/5/2012	11:35:02 PM	Bypass valve closed
4/5/2012	11:35:02 PM	Bubbler valve closed
4/5/2012	11:35:02 PM	Helium valve opened
4/5/2012	11:35:02 PM	Main Vac valve opened
4/5/2012	11:35:02 PM	Helium MFC set to  20.000000
4/5/2012	11:35:02 PM	H2 MFC set to  0.000000
4/5/2012	11:35:02 PM	BCl3 MFC set to  0.000000
4/5/2012	11:35:02 PM	PH3 MFC set to  0.000000
4/5/2012	11:35:02 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:35:02 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:35:02 PM	Tube furnace set to 0
4/5/2012	11:35:32 PM	Helium valve closed
4/5/2012	11:35:32 PM	H2 valve closed
4/5/2012	11:35:32 PM	BCl3 valve closed
4/5/2012	11:35:32 PM	PH3 valve closed
4/5/2012	11:35:32 PM	SiCl4 pre valve closed
4/5/2012	11:35:32 PM	SiCl4 post valve closed
4/5/2012	11:35:32 PM	Bypass valve closed
4/5/2012	11:35:32 PM	Bubbler valve closed
4/5/2012	11:35:32 PM	Main Vac valve opened
4/5/2012	11:35:32 PM	Helium MFC set to  0.000000
4/5/2012	11:35:32 PM	H2 MFC set to  0.000000
4/5/2012	11:35:32 PM	BCl3 MFC set to  0.000000
4/5/2012	11:35:32 PM	PH3 MFC set to  0.000000
4/5/2012	11:35:32 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:35:32 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:35:32 PM	Tube furnace set to 0
4/5/2012	11:36:02 PM	H2 valve closed
4/5/2012	11:36:02 PM	BCl3 valve closed
4/5/2012	11:36:02 PM	PH3 valve closed
4/5/2012	11:36:02 PM	SiCl4 pre valve closed
4/5/2012	11:36:02 PM	SiCl4 post valve closed
4/5/2012	11:36:02 PM	Bypass valve closed
4/5/2012	11:36:02 PM	Bubbler valve closed
4/5/2012	11:36:02 PM	Helium valve opened
4/5/2012	11:36:02 PM	Main Vac valve opened
4/5/2012	11:36:02 PM	Helium MFC set to  20.000000
4/5/2012	11:36:02 PM	H2 MFC set to  0.000000
4/5/2012	11:36:02 PM	BCl3 MFC set to  0.000000
4/5/2012	11:36:02 PM	PH3 MFC set to  0.000000
4/5/2012	11:36:02 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:36:03 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:36:03 PM	Tube furnace set to 0
4/5/2012	11:36:33 PM	Helium valve closed
4/5/2012	11:36:33 PM	H2 valve closed
4/5/2012	11:36:33 PM	BCl3 valve closed
4/5/2012	11:36:33 PM	PH3 valve closed
4/5/2012	11:36:33 PM	SiCl4 pre valve closed
4/5/2012	11:36:33 PM	SiCl4 post valve closed
4/5/2012	11:36:33 PM	Bypass valve closed
4/5/2012	11:36:33 PM	Bubbler valve closed
4/5/2012	11:36:33 PM	Main Vac valve opened
4/5/2012	11:36:33 PM	Helium MFC set to  0.000000
4/5/2012	11:36:33 PM	H2 MFC set to  0.000000
4/5/2012	11:36:33 PM	BCl3 MFC set to  0.000000
4/5/2012	11:36:33 PM	PH3 MFC set to  0.000000
4/5/2012	11:36:33 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:36:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:36:33 PM	Tube furnace set to 0
4/5/2012	11:37:03 PM	H2 valve closed
4/5/2012	11:37:03 PM	BCl3 valve closed
4/5/2012	11:37:03 PM	PH3 valve closed
4/5/2012	11:37:03 PM	SiCl4 pre valve closed
4/5/2012	11:37:03 PM	SiCl4 post valve closed
4/5/2012	11:37:03 PM	Bypass valve closed
4/5/2012	11:37:03 PM	Bubbler valve closed
4/5/2012	11:37:03 PM	Helium valve opened
4/5/2012	11:37:03 PM	Main Vac valve opened
4/5/2012	11:37:03 PM	Helium MFC set to  20.000000
4/5/2012	11:37:03 PM	H2 MFC set to  0.000000
4/5/2012	11:37:03 PM	BCl3 MFC set to  0.000000
4/5/2012	11:37:03 PM	PH3 MFC set to  0.000000
4/5/2012	11:37:03 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:37:03 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:37:03 PM	Tube furnace set to 0
4/5/2012	11:37:33 PM	Helium valve closed
4/5/2012	11:37:33 PM	H2 valve closed
4/5/2012	11:37:33 PM	BCl3 valve closed
4/5/2012	11:37:33 PM	PH3 valve closed
4/5/2012	11:37:33 PM	SiCl4 pre valve closed
4/5/2012	11:37:33 PM	SiCl4 post valve closed
4/5/2012	11:37:33 PM	Bypass valve closed
4/5/2012	11:37:33 PM	Bubbler valve closed
4/5/2012	11:37:33 PM	Main Vac valve opened
4/5/2012	11:37:33 PM	Helium MFC set to  0.000000
4/5/2012	11:37:33 PM	H2 MFC set to  0.000000
4/5/2012	11:37:33 PM	BCl3 MFC set to  0.000000
4/5/2012	11:37:33 PM	PH3 MFC set to  0.000000
4/5/2012	11:37:33 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:37:33 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:37:33 PM	Tube furnace set to 0
4/5/2012	11:38:03 PM	H2 valve closed
4/5/2012	11:38:03 PM	BCl3 valve closed
4/5/2012	11:38:03 PM	PH3 valve closed
4/5/2012	11:38:03 PM	SiCl4 pre valve closed
4/5/2012	11:38:03 PM	SiCl4 post valve closed
4/5/2012	11:38:03 PM	Bypass valve closed
4/5/2012	11:38:03 PM	Bubbler valve closed
4/5/2012	11:38:03 PM	Helium valve opened
4/5/2012	11:38:03 PM	Main Vac valve opened
4/5/2012	11:38:03 PM	Helium MFC set to  20.000000
4/5/2012	11:38:03 PM	H2 MFC set to  0.000000
4/5/2012	11:38:03 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:03 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:03 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:03 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:04 PM	Tube furnace set to 0
4/5/2012	11:38:19 PM	Helium valve closed
4/5/2012	11:38:19 PM	H2 valve closed
4/5/2012	11:38:19 PM	BCl3 valve closed
4/5/2012	11:38:19 PM	PH3 valve closed
4/5/2012	11:38:19 PM	SiCl4 pre valve closed
4/5/2012	11:38:19 PM	SiCl4 post valve closed
4/5/2012	11:38:19 PM	Bypass valve closed
4/5/2012	11:38:19 PM	Bubbler valve closed
4/5/2012	11:38:19 PM	Main Vac valve opened
4/5/2012	11:38:19 PM	Helium MFC set to  0.000000
4/5/2012	11:38:19 PM	H2 MFC set to  0.000000
4/5/2012	11:38:19 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:19 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:19 PM	Tube furnace set to 0
4/5/2012	11:38:20 PM	H2 valve closed
4/5/2012	11:38:20 PM	BCl3 valve closed
4/5/2012	11:38:20 PM	PH3 valve closed
4/5/2012	11:38:20 PM	SiCl4 pre valve closed
4/5/2012	11:38:20 PM	SiCl4 post valve closed
4/5/2012	11:38:20 PM	Bypass valve closed
4/5/2012	11:38:20 PM	Bubbler valve closed
4/5/2012	11:38:20 PM	Helium valve opened
4/5/2012	11:38:20 PM	Main Vac valve opened
4/5/2012	11:38:20 PM	Helium MFC set to  20.000000
4/5/2012	11:38:20 PM	H2 MFC set to  0.000000
4/5/2012	11:38:20 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:20 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:20 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:20 PM	Tube furnace set to 0
4/5/2012	11:38:20 PM	Helium valve closed
4/5/2012	11:38:20 PM	H2 valve closed
4/5/2012	11:38:20 PM	BCl3 valve closed
4/5/2012	11:38:20 PM	PH3 valve closed
4/5/2012	11:38:20 PM	SiCl4 pre valve closed
4/5/2012	11:38:20 PM	SiCl4 post valve closed
4/5/2012	11:38:20 PM	Bypass valve closed
4/5/2012	11:38:20 PM	Bubbler valve closed
4/5/2012	11:38:20 PM	Main Vac valve opened
4/5/2012	11:38:20 PM	Helium MFC set to  0.000000
4/5/2012	11:38:20 PM	H2 MFC set to  0.000000
4/5/2012	11:38:20 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:20 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:20 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:20 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:21 PM	Tube furnace set to 0
4/5/2012	11:38:21 PM	H2 valve closed
4/5/2012	11:38:21 PM	BCl3 valve closed
4/5/2012	11:38:21 PM	PH3 valve closed
4/5/2012	11:38:21 PM	SiCl4 pre valve closed
4/5/2012	11:38:21 PM	SiCl4 post valve closed
4/5/2012	11:38:21 PM	Bypass valve closed
4/5/2012	11:38:21 PM	Bubbler valve closed
4/5/2012	11:38:21 PM	Helium valve opened
4/5/2012	11:38:21 PM	Main Vac valve opened
4/5/2012	11:38:21 PM	Helium MFC set to  20.000000
4/5/2012	11:38:21 PM	H2 MFC set to  0.000000
4/5/2012	11:38:21 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:21 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:21 PM	Tube furnace set to 0
4/5/2012	11:38:22 PM	Helium valve closed
4/5/2012	11:38:22 PM	H2 valve closed
4/5/2012	11:38:22 PM	BCl3 valve closed
4/5/2012	11:38:22 PM	PH3 valve closed
4/5/2012	11:38:22 PM	SiCl4 pre valve closed
4/5/2012	11:38:22 PM	SiCl4 post valve closed
4/5/2012	11:38:22 PM	Bypass valve closed
4/5/2012	11:38:22 PM	Bubbler valve closed
4/5/2012	11:38:22 PM	Main Vac valve opened
4/5/2012	11:38:22 PM	Helium MFC set to  0.000000
4/5/2012	11:38:22 PM	H2 MFC set to  0.000000
4/5/2012	11:38:22 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:22 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:22 PM	Tube furnace set to 0
4/5/2012	11:38:22 PM	H2 valve closed
4/5/2012	11:38:22 PM	BCl3 valve closed
4/5/2012	11:38:22 PM	PH3 valve closed
4/5/2012	11:38:22 PM	SiCl4 pre valve closed
4/5/2012	11:38:22 PM	SiCl4 post valve closed
4/5/2012	11:38:22 PM	Bypass valve closed
4/5/2012	11:38:22 PM	Bubbler valve closed
4/5/2012	11:38:22 PM	Helium valve opened
4/5/2012	11:38:22 PM	Main Vac valve opened
4/5/2012	11:38:22 PM	Helium MFC set to  20.000000
4/5/2012	11:38:22 PM	H2 MFC set to  0.000000
4/5/2012	11:38:22 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:22 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:22 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:22 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:22 PM	Tube furnace set to 0
4/5/2012	11:38:23 PM	Helium valve closed
4/5/2012	11:38:23 PM	H2 valve closed
4/5/2012	11:38:23 PM	BCl3 valve closed
4/5/2012	11:38:23 PM	PH3 valve closed
4/5/2012	11:38:23 PM	SiCl4 pre valve closed
4/5/2012	11:38:23 PM	SiCl4 post valve closed
4/5/2012	11:38:23 PM	Bypass valve closed
4/5/2012	11:38:23 PM	Bubbler valve closed
4/5/2012	11:38:23 PM	Main Vac valve opened
4/5/2012	11:38:23 PM	Helium MFC set to  0.000000
4/5/2012	11:38:23 PM	H2 MFC set to  0.000000
4/5/2012	11:38:23 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:23 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:23 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:23 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:23 PM	Tube furnace set to 0
4/5/2012	11:38:23 PM	H2 valve closed
4/5/2012	11:38:23 PM	BCl3 valve closed
4/5/2012	11:38:23 PM	PH3 valve closed
4/5/2012	11:38:23 PM	SiCl4 pre valve closed
4/5/2012	11:38:23 PM	SiCl4 post valve closed
4/5/2012	11:38:23 PM	Bypass valve closed
4/5/2012	11:38:23 PM	Bubbler valve closed
4/5/2012	11:38:23 PM	Helium valve opened
4/5/2012	11:38:23 PM	Main Vac valve opened
4/5/2012	11:38:23 PM	Helium MFC set to  20.000000
4/5/2012	11:38:23 PM	H2 MFC set to  0.000000
4/5/2012	11:38:23 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:23 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:23 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:23 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:23 PM	Tube furnace set to 0
4/5/2012	11:38:54 PM	Helium valve closed
4/5/2012	11:38:54 PM	H2 valve closed
4/5/2012	11:38:54 PM	BCl3 valve closed
4/5/2012	11:38:54 PM	PH3 valve closed
4/5/2012	11:38:54 PM	SiCl4 pre valve closed
4/5/2012	11:38:54 PM	SiCl4 post valve closed
4/5/2012	11:38:54 PM	Bypass valve closed
4/5/2012	11:38:54 PM	Bubbler valve closed
4/5/2012	11:38:54 PM	Main Vac valve opened
4/5/2012	11:38:54 PM	Helium MFC set to  0.000000
4/5/2012	11:38:54 PM	H2 MFC set to  0.000000
4/5/2012	11:38:54 PM	BCl3 MFC set to  0.000000
4/5/2012	11:38:54 PM	PH3 MFC set to  0.000000
4/5/2012	11:38:54 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:38:54 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:38:54 PM	Tube furnace set to 0
4/5/2012	11:39:11 PM	H2 valve closed
4/5/2012	11:39:11 PM	BCl3 valve closed
4/5/2012	11:39:11 PM	PH3 valve closed
4/5/2012	11:39:11 PM	SiCl4 pre valve closed
4/5/2012	11:39:11 PM	SiCl4 post valve closed
4/5/2012	11:39:11 PM	Bypass valve closed
4/5/2012	11:39:11 PM	Bubbler valve closed
4/5/2012	11:39:11 PM	Helium valve opened
4/5/2012	11:39:11 PM	Main Vac valve opened
4/5/2012	11:39:11 PM	Helium MFC set to  20.000000
4/5/2012	11:39:11 PM	H2 MFC set to  0.000000
4/5/2012	11:39:11 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:11 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:11 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:11 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:11 PM	Tube furnace set to 0
4/5/2012	11:39:11 PM	Helium valve closed
4/5/2012	11:39:11 PM	H2 valve closed
4/5/2012	11:39:11 PM	BCl3 valve closed
4/5/2012	11:39:11 PM	PH3 valve closed
4/5/2012	11:39:12 PM	SiCl4 pre valve closed
4/5/2012	11:39:12 PM	SiCl4 post valve closed
4/5/2012	11:39:12 PM	Bypass valve closed
4/5/2012	11:39:12 PM	Bubbler valve closed
4/5/2012	11:39:12 PM	Main Vac valve opened
4/5/2012	11:39:12 PM	Helium MFC set to  0.000000
4/5/2012	11:39:12 PM	H2 MFC set to  0.000000
4/5/2012	11:39:12 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:12 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:12 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:12 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:12 PM	Tube furnace set to 200
4/5/2012	11:39:13 PM	H2 valve closed
4/5/2012	11:39:13 PM	BCl3 valve closed
4/5/2012	11:39:13 PM	PH3 valve closed
4/5/2012	11:39:13 PM	SiCl4 pre valve closed
4/5/2012	11:39:13 PM	SiCl4 post valve closed
4/5/2012	11:39:13 PM	Bypass valve closed
4/5/2012	11:39:14 PM	Bubbler valve closed
4/5/2012	11:39:14 PM	Helium valve opened
4/5/2012	11:39:14 PM	Main Vac valve opened
4/5/2012	11:39:14 PM	Helium MFC set to  20.000000
4/5/2012	11:39:14 PM	H2 MFC set to  0.000000
4/5/2012	11:39:14 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:14 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:14 PM	Tube furnace set to 200
4/5/2012	11:39:14 PM	Helium valve closed
4/5/2012	11:39:14 PM	H2 valve closed
4/5/2012	11:39:14 PM	BCl3 valve closed
4/5/2012	11:39:14 PM	PH3 valve closed
4/5/2012	11:39:14 PM	SiCl4 pre valve closed
4/5/2012	11:39:14 PM	SiCl4 post valve closed
4/5/2012	11:39:14 PM	Bypass valve closed
4/5/2012	11:39:14 PM	Bubbler valve closed
4/5/2012	11:39:14 PM	Main Vac valve opened
4/5/2012	11:39:14 PM	Helium MFC set to  0.000000
4/5/2012	11:39:14 PM	H2 MFC set to  0.000000
4/5/2012	11:39:14 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:14 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:14 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:14 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:14 PM	Tube furnace set to 200
4/5/2012	11:39:14 PM	H2 valve closed
4/5/2012	11:39:14 PM	BCl3 valve closed
4/5/2012	11:39:14 PM	PH3 valve closed
4/5/2012	11:39:14 PM	SiCl4 pre valve closed
4/5/2012	11:39:14 PM	SiCl4 post valve closed
4/5/2012	11:39:14 PM	Bypass valve closed
4/5/2012	11:39:14 PM	Bubbler valve closed
4/5/2012	11:39:14 PM	Helium valve opened
4/5/2012	11:39:14 PM	Main Vac valve opened
4/5/2012	11:39:14 PM	Helium MFC set to  20.000000
4/5/2012	11:39:15 PM	H2 MFC set to  0.000000
4/5/2012	11:39:15 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:15 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:15 PM	Tube furnace set to 200
4/5/2012	11:39:15 PM	Helium valve closed
4/5/2012	11:39:15 PM	H2 valve closed
4/5/2012	11:39:15 PM	BCl3 valve closed
4/5/2012	11:39:15 PM	PH3 valve closed
4/5/2012	11:39:15 PM	SiCl4 pre valve closed
4/5/2012	11:39:15 PM	SiCl4 post valve closed
4/5/2012	11:39:15 PM	Bypass valve closed
4/5/2012	11:39:15 PM	Bubbler valve closed
4/5/2012	11:39:15 PM	Main Vac valve opened
4/5/2012	11:39:15 PM	Helium MFC set to  0.000000
4/5/2012	11:39:15 PM	H2 MFC set to  0.000000
4/5/2012	11:39:15 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:15 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:15 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:15 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:15 PM	Tube furnace set to 200
4/5/2012	11:39:16 PM	H2 valve closed
4/5/2012	11:39:16 PM	BCl3 valve closed
4/5/2012	11:39:16 PM	PH3 valve closed
4/5/2012	11:39:16 PM	SiCl4 pre valve closed
4/5/2012	11:39:16 PM	SiCl4 post valve closed
4/5/2012	11:39:16 PM	Bypass valve closed
4/5/2012	11:39:16 PM	Bubbler valve closed
4/5/2012	11:39:16 PM	Helium valve opened
4/5/2012	11:39:16 PM	Main Vac valve opened
4/5/2012	11:39:16 PM	Helium MFC set to  20.000000
4/5/2012	11:39:16 PM	H2 MFC set to  0.000000
4/5/2012	11:39:16 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:16 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:16 PM	Tube furnace set to 200
4/5/2012	11:39:16 PM	Helium valve closed
4/5/2012	11:39:16 PM	H2 valve closed
4/5/2012	11:39:16 PM	BCl3 valve closed
4/5/2012	11:39:16 PM	PH3 valve closed
4/5/2012	11:39:16 PM	SiCl4 pre valve closed
4/5/2012	11:39:16 PM	SiCl4 post valve closed
4/5/2012	11:39:16 PM	Bypass valve closed
4/5/2012	11:39:16 PM	Bubbler valve closed
4/5/2012	11:39:16 PM	Main Vac valve opened
4/5/2012	11:39:16 PM	Helium MFC set to  0.000000
4/5/2012	11:39:16 PM	H2 MFC set to  0.000000
4/5/2012	11:39:16 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:16 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:16 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:16 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:16 PM	Tube furnace set to 200
4/5/2012	11:39:17 PM	H2 valve closed
4/5/2012	11:39:17 PM	BCl3 valve closed
4/5/2012	11:39:17 PM	PH3 valve closed
4/5/2012	11:39:17 PM	SiCl4 pre valve closed
4/5/2012	11:39:17 PM	SiCl4 post valve closed
4/5/2012	11:39:17 PM	Bypass valve closed
4/5/2012	11:39:17 PM	Bubbler valve closed
4/5/2012	11:39:17 PM	Helium valve opened
4/5/2012	11:39:17 PM	Main Vac valve opened
4/5/2012	11:39:17 PM	Helium MFC set to  20.000000
4/5/2012	11:39:17 PM	H2 MFC set to  0.000000
4/5/2012	11:39:17 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:17 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:17 PM	Tube furnace set to 200
4/5/2012	11:39:17 PM	Helium valve closed
4/5/2012	11:39:17 PM	H2 valve closed
4/5/2012	11:39:17 PM	BCl3 valve closed
4/5/2012	11:39:17 PM	PH3 valve closed
4/5/2012	11:39:17 PM	SiCl4 pre valve closed
4/5/2012	11:39:17 PM	SiCl4 post valve closed
4/5/2012	11:39:17 PM	Bypass valve closed
4/5/2012	11:39:17 PM	Bubbler valve closed
4/5/2012	11:39:17 PM	Main Vac valve opened
4/5/2012	11:39:17 PM	Helium MFC set to  0.000000
4/5/2012	11:39:17 PM	H2 MFC set to  0.000000
4/5/2012	11:39:17 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:17 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:17 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:17 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:18 PM	Tube furnace set to 200
4/5/2012	11:39:18 PM	H2 valve closed
4/5/2012	11:39:18 PM	BCl3 valve closed
4/5/2012	11:39:18 PM	PH3 valve closed
4/5/2012	11:39:18 PM	SiCl4 pre valve closed
4/5/2012	11:39:18 PM	SiCl4 post valve closed
4/5/2012	11:39:18 PM	Bypass valve closed
4/5/2012	11:39:18 PM	Bubbler valve closed
4/5/2012	11:39:18 PM	Helium valve opened
4/5/2012	11:39:18 PM	Main Vac valve opened
4/5/2012	11:39:18 PM	Helium MFC set to  20.000000
4/5/2012	11:39:18 PM	H2 MFC set to  0.000000
4/5/2012	11:39:18 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:18 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:18 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:18 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:18 PM	Tube furnace set to 200
4/5/2012	11:39:19 PM	Helium valve closed
4/5/2012	11:39:19 PM	H2 valve closed
4/5/2012	11:39:19 PM	BCl3 valve closed
4/5/2012	11:39:19 PM	PH3 valve closed
4/5/2012	11:39:19 PM	SiCl4 pre valve closed
4/5/2012	11:39:19 PM	SiCl4 post valve closed
4/5/2012	11:39:19 PM	Bypass valve closed
4/5/2012	11:39:19 PM	Bubbler valve closed
4/5/2012	11:39:19 PM	Main Vac valve opened
4/5/2012	11:39:19 PM	Helium MFC set to  0.000000
4/5/2012	11:39:19 PM	H2 MFC set to  0.000000
4/5/2012	11:39:19 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:19 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:19 PM	Tube furnace set to 200
4/5/2012	11:39:19 PM	H2 valve closed
4/5/2012	11:39:19 PM	BCl3 valve closed
4/5/2012	11:39:19 PM	PH3 valve closed
4/5/2012	11:39:19 PM	SiCl4 pre valve closed
4/5/2012	11:39:19 PM	SiCl4 post valve closed
4/5/2012	11:39:19 PM	Bypass valve closed
4/5/2012	11:39:19 PM	Bubbler valve closed
4/5/2012	11:39:19 PM	Helium valve opened
4/5/2012	11:39:19 PM	Main Vac valve opened
4/5/2012	11:39:19 PM	Helium MFC set to  20.000000
4/5/2012	11:39:19 PM	H2 MFC set to  0.000000
4/5/2012	11:39:19 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:19 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:19 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:19 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:20 PM	Tube furnace set to 200
4/5/2012	11:39:21 PM	Helium valve closed
4/5/2012	11:39:21 PM	H2 valve closed
4/5/2012	11:39:21 PM	BCl3 valve closed
4/5/2012	11:39:21 PM	PH3 valve closed
4/5/2012	11:39:21 PM	SiCl4 pre valve closed
4/5/2012	11:39:21 PM	SiCl4 post valve closed
4/5/2012	11:39:21 PM	Bypass valve closed
4/5/2012	11:39:21 PM	Bubbler valve closed
4/5/2012	11:39:21 PM	Main Vac valve opened
4/5/2012	11:39:21 PM	Helium MFC set to  0.000000
4/5/2012	11:39:21 PM	H2 MFC set to  0.000000
4/5/2012	11:39:21 PM	BCl3 MFC set to  0.000000
4/5/2012	11:39:21 PM	PH3 MFC set to  0.000000
4/5/2012	11:39:21 PM	SiCl4 MFC set to  0.000000
4/5/2012	11:39:21 PM	Bypass solenoid MFC set to  0.000000
4/5/2012	11:39:21 PM	Tube furnace set to 0
4/5/2012	11:39:22 PM	Run finished at 11:39 PM
4/5/2012	11:39:33 PM	Main Vac valve closed
4/5/2012	11:39:39 PM	Main Vac valve opened
